Источники / SiCtechnologyPropertiesApplication

94 ǮȑȓȓȐ Ǽ.Ǯ., ǯȓșȭȓȐ Ǯ.dz., ǯȜșȠȜȐȓȤ ǻ.ǿ., ǸȖȟȓșȓȐ ǰ.ǿ., ǸȜțȎȘȜȐȎ Ǿ.ǰ. Ȗ ȒȞ.

ȝȓȞȓțȜȟȐȘȞȖȟȠȎșșȓJ= D¸ Y(ȑȒȓY_ µ – ȑȞȎȒȖȓțȠȘȜțȤȓțȠȞȎȤȖȖ ȐȎȘȎțȟȖȗ(ȖșȖȎȠȜȚȜȐ) ȟȜȜȠȐȓȠȟȠȐȡȬȧȖȗȒȎțțȜȚȡȑȞȎȒȖȓțȠȡȣȖȚȖȥȓȟȘȜȑȜ ȝȜȠȓțȤȖȎșȎ). ȁȟȠȎțȎȐșȖȐȎȬȧȓȓȟȭ Ȑ ȞȓȕȡșȪȠȎȠȓ ȚȎȟȟȜȝȓȞȓțȜȟȎ țȓȞȎȐțȜȚȓȞțȜȓ ȞȎȟȝȞȓȒȓșȓțȖȓ șȓȑȖȞȡȬȧȖȣ ȝȞȖȚȓȟȓȗ ȏȡȒȓȠ ȠȎȘȔȓ ȟȠȖȚȡșȖȞȜȐȎȠȪ țȓȟȠȎȏȖșȪțȜȟȠȪ ȝȜșȖȠȖȝȎ Ȑ ȞȎȟȠȡȧȓȚ ȘȞȖȟȠȎșșȓ.

ǽȞȜȤȓȟȟȢȜȞȚȖȞȜȐȎțȖȭȠȓȞȚȜțȎȝȞȭȔȓțȖȗȐȞȎȟȠȡȧȓȚȘȞȖȟȠȎșșȓȘȎȞȏȖȒȎȘȞȓȚțȖȭȜȟȜȏȓțțȜȥȡȐȟȠȐȖȠȓșȓțȘȐȓșȖȥȖțȓȞȎȒȖȎșȪțȜȑȜ ȑȞȎȒȖȓțȠȎ ȠȓȚȝȓȞȎȠȡȞȩ Ȑ ȘȞȖȟȠȎșșȓ. ǿȒȐȖȑȜȐȜȓ țȎȝȞȭȔȓțȖȓ țȓ ȏȡȒȓȠ ȝȞȓȐȩȦȎȠȪ ȘȞȖȠȖȥȓȟȘȡȬ ȐȓșȖȥȖțȡ U-106 ǽȎ, ȜȏȓȟȝȓȥȖȐȎȭ țȓȜȏȣȜȒȖȚȜȓ ȘȎȥȓȟȠȐȜ ȘȞȖȟȠȎșșȎ ȓȟșȖ, Ȑ ȠȓȥȓțȖȓ ȐȟȓȑȜ ȝȞȜȤȓȟȟȎ ȞȜȟȠȎ, ȞȎȒȖȎșȪțȩȗ ȑȞȎȒȖȓțȠ ȠȓȚȝȓȞȎȠȡȞȩ țȓ ȏȡȒȓȠ ȝȞȓȐȩȦȎȠȪ ȐȓșȖȥȖțȡ 2 K/ȟȚ.

ǹȖȠȓȞȎȠȡȞȎ

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DZșȎȐȎ 5 ǰȩȞȎȧȖȐȎțȖȓ ȫȝȖȠȎȘȟȖȎșȪțȩȣ ȟșȜȓȐ Ȗ ȘȞȖȟȠȎșșȜȐ ȚȓȠȜȒȜȚ ȝȎȞȜȢȎȕțȜȑȜ

ȣȖȚȖȥȓȟȘȜȑȜ ȜȟȎȔȒȓțȖȭ

ǺȓȠȜȒ ȝȎȞȜȢȎȕțȜȑȜ ȣȖȚȖȥȓȟȘȜȑȜ ȜȟȎȔȒȓțȖȭ (CVD) ȦȖȞȜȘȜ ȖȟȝȜșȪȕȡȓȠȟȭȒșȭȜȟȎȔȒȓțȖȭȠȜțȘȖȣȝșȓțȜȘțȎȝȜȒșȜȔȘȎȣȖȕ ȠȐȓȞȒȩȣ țȓșȓȠȡȥȖȣȚȎȠȓȞȖȎșȜȐ. DZȎȕȜȐȎȭȢȎȕȎȒȜșȔțȎȟȜȒȓȞȔȎȠȪȠȞȓȏȡȓȚȩȓ ȘȜȚȝȜțȓțȠȩȣȖȚȖȥȓȟȘȖȣȞȓȎȑȓțȠȜȐ. ȋȠȜȠȚȓȠȜȒȦȖȞȜȘȜȖȟȝȜșȪȕȡȓȠȟȭ Ȑ ȝȜșȡȝȞȜȐȜȒțȖȘȜȐȜȗ ȠȓȣțȜșȜȑȖȖ Ȓșȭ ȜȟȎȔȒȓțȖȭ ȚȜțȜȘȞȖȟȠȎșșȖȥȓȟȘȖȣ, ȝȜșȖȘȞȖȟȠȎșșȖȥȓȟȘȖȣ Ȗ ȎȚȜȞȢțȩȣ ȝșȓțȜȘ, țȎȝȞȖȚȓȞ, ȘȞȓȚțȖȭ, țȖȠȞȖȒȎ ȘȞȓȚțȖȭ Ȗ ȒȞȡȑȖȣ ȚȎȠȓȞȖȎșȜȐ. ǺȓȠȜȒ CVD ȐȘșȬȥȎȓȠ ȞȭȒ ȫȠȎȝȜȐ, Ȑ ȠȜȚ ȥȖȟșȓ:

x ȝȞȓȒȐȎȞȖȠȓșȪțȜȓ ȝȓȞȓȚȓȦȖȐȎțȖȓ ȑȎȕȜȐ-ȞȓȎȑȓțȠȜȐ, ȖțȓȞȠțȜȑȜ ȑȎȕȎ-țȜȟȖȠȓșȭ Ȗ ȐȐȓȒȓțȖȓ ȫȠȜȗ ȟȚȓȟȖ Ȑ ȘȎȚȓȞȡ;

x ȝȜȒȎȥȡ ȑȎȕȜȐȜȗ ȟȚȓȟȖ Ș ȝȜȒșȜȔȘȓ;

x ȎȒȟȜȞȏȤȖȬ ȞȓȎȑȓțȠȜȐ țȎ ȝȜȐȓȞȣțȜȟȠȖ ȝȜȒșȜȔȘȖ;

x ȣȖȚȖȥȓȟȘȖȓȞȓȎȘȤȖȖȝȜȜȏȞȎȕȜȐȎțȖȬȝșȓțȘȖțȎȝȜȐȓȞȣțȜȟȠȖ ȝȜȒșȜȔȘȖ;

x ȡȒȎșȓțȖȓȑȎȕȜȜȏȞȎȕțȩȣȝȜȏȜȥțȩȣȝȞȜȒȡȘȠȜȐȞȓȎȘȤȖȗȖȕ ȘȎȚȓȞȩ.

ǰ ȟșȡȥȎȓ ȘȎȞȏȖȒȎ ȘȞȓȚțȖȭ Ȑ ȞȓȎȘȤȖȜțțȡȬ ȘȎȚȓȞȡ ȝȞȖ ȝȜȚȜȧȖ ȑȎȕȎ-țȜȟȖȠȓșȭ, Ȑ ȘȎȥȓȟȠȐȓ ȘȜȠȜȞȜȑȜ ȖȟȝȜșȪȕȡȓȠȟȭ ȖȟȘșȬȥȖȠȓșȪțȜ ȐȜȒȜȞȜȒ, ȐȐȜȒȭȠ Ȑ ȑȎȕȜȜȏȞȎȕțȜȚ ȟȜȟȠȜȭțȖȖ ȘȞȓȚțȖȗ Ȗ ȡȑșȓȞȜȒȟȜȒȓȞȔȎȧȖȓ ȘȜȚȝȜțȓțȠȩ Ȗ ȐȩȞȎȧȖȐȎȬȠ SiC țȎ ȝȜȒșȜȔȘȓ. ǺȓȠȜȒ ȝȜȕȐȜșȭȓȠ ȜȠțȜȟȖȠȓșȪțȜ șȓȑȘȜ ȜȟȡȧȓȟȠȐșȭȠȪ șȓȑȖȞȜȐȎțȖȓ. ǾȜȟȠ ȐȓȒȓȠȟȭ ȝȞȖ ȟȞȎȐțȖȠȓșȪțȜ țȓȐȩȟȜȘȜȗ ȠȓȚȝȓȞȎȠȡȞȓ. Dzșȭ șȓȑȖȞȜȐȎțȖȭ ȎȘȤȓȝȠȜȞțȜȗ ȝȞȖȚȓȟȪȬ Ȑ ȞȓȎȘȤȖȜțțȡȬ ȘȎȚȓȞȡ ȐȐȜȒȭȠ AlCl3 ȖșȖ B2H6. Dzșȭ ȝȜșȡȥȓțȖȭ ȟșȜȓȐ ȟ ȝ-ȠȖȝȜȚ ȝȞȜȐȜȒȖȚȜȟȠȖ Ȗ ȐȩȟȜȘȜȗ ȘȜțȤȓțȠȞȎȤȖȓȗ ȝȞȖȚȓȟȖ ȖȟȝȜșȪȕȡȓȠȟȭ NH3.

ǻȎ ȞȖȟ. 5.1 ȝȞȓȒȟȠȎȐșȓțȎ ȠȖȝȜȐȎȭ ȟȣȓȚȎ ȡȟȠȎțȜȐȘȖ CVD Ȗ ȘȜțȟȠȞȡȘȤȖȭ ȞȓȎȘȠȜȞȎ ȑȜȞȖȕȜțȠȎșȪțȜȑȜ ȠȖȝȎ. ȅȠȜȏȩ ȜȏȓȟȝȓȥȖȠȪ

ǾȖȟ. 5.1. ȀȖȝȜȐȎȭ ȟȣȓȚȎ CVD-ȡȟȠȎțȜȐȘȖ (a) Ȗ ȐțȡȠȞȓțțȭȭ ȘȜțȟȠȞȡȘȤȖȭ ȞȓȎȘȠȜȞȎ ȑȜȞȖȕȜțȠȎșȪțȜȑȜ ȠȖȝȎ (ȏ). 1 – ȢȖșȪȠȞ Ȓșȭ ȜȥȖȟȠȘȖ ȐȜȒȜȞȜȒȎ, 2 – ȞȜȠȎȚȓȠȞȩ, 3 – ȞȓȎȘȤȖȜțțȎȭȘȎȚȓȞȎ, 4 – ȐȎȘȡȡȚțȩȗțȎȟȜȟ, 5 – ȒȓȞȔȎȠȓșȪ ȘȞȖȟȠȎșșȎ-ȕȎȠȞȎȐȘȖ

ȞȎȐțȜȚȓȞțȩȗ ȝȜȠȜȘ ȑȎȕȎ Ȗ ȖȟȘșȬȥȖȠȪ ȐȜȕȚȡȧȎȬȧȖȓ ȐȜȕȒȓȗȟȠȐȖȭ, ȥȎȟȠȪȝȜȒȟȠȎȐȘȖ-ȒȓȞȔȎȠȓșȭ, ȜȏȞȎȧȓțțȎȭȘȐȝȡȟȘțȜȚȡȜȠȐȓȞȟȠȖȬȒșȭ ȝȜȒȎȥȖ ȑȎȕȎ, ȐȩȝȜșțȓțȎ Ȑ ȐȖȒȓ țȎȘșȜțțȜȗ ȝȜȐȓȞȣțȜȟȠȖ. Dzșȭ ȝȜșȡȥȓțȖȭ ȠȞȓȏȡȓȚȜȗ ȠȓȚȝȓȞȎȠȡȞȩ Ȑ ȞȓȎȘȤȖȜțțȜȗ ȘȎȚȓȞȓ ȖȟȝȜșȪȕȡȓȠȟȭ ȖțȒȡȘȤȖȜțțȩȗ țȎȑȞȓȐ ȠȜȘȎȚȖ ȐȩȟȜȘȜȗ ȥȎȟȠȜȠȩ (200 500 ȘDZȤ). ǰ ȘȎȥȓȟȠȐȓȞȓȎȘȤȖȜțțȩȣȑȎȕȜȐȐȚȓȠȜȒȓCVD ȝȞȖȚȓțȭȬȠSiCl4–C6H14,

SiH4-C3H8, CH3SiCl3, SiH4-C2H2, SiC14-C3H3 ȖȒȞȡȑȖȓ. ǼȟȜȏȜȑȜȐțȖȚȎțȖȭ ȠȞȓȏȡȓȠ ȐȩȏȜȞ ȚȜșȭȞțȩȣ ȒȜșȓȗ ȖȟȣȜȒțȩȣ ȘȜȚȝȜțȓțȠȜȐ Ȑ ȟȚȓȟȖ.

ǸȎȘ ȝȞȎȐȖșȜ, ȚȜțȜȘȞȖȟȠȎșșȖȥȓȟȘȖȓ ȟșȜȖ ȝȜșȡȥȎȬȠ ȝȞȖ ȐȓȟȪȚȎ țȖȕȘȜȚ ȜȠțȜȦȓțȖȖ ȚȜșȭȞțȜȗ ȘȜțȤȓțȠȞȎȤȖȖ ȘȞȓȚțȖȭ Ș ȚȜșȭȞțȜȗ ȘȜțȤȓțȠȞȎȤȖȖ ȐȜȒȜȞȜȒȎ Si/H<103. ǿȜȜȠțȜȦȓțȖȓ ȚȜșȭȞțȩȣ ȒȜșȓȗ ȘȜȚȝȜțȓțȠȜȐ Ȑ ȟȚȓȟȖ Si/C ȚȜȔțȜ ȐȎȞȪȖȞȜȐȎȠȪ Ȑ ȒȜȐȜșȪțȜ ȦȖȞȜȘȖȣ ȝȞȓȒȓșȎȣ 0.5 20. ǮȐȠȜȞȩ [1] ȠȓȜȞȓȠȖȥȓȟȘȖ Ȗ ȫȘȟȝȓȞȖȚȓțȠȎșȪțȜ ȖȟȟșȓȒȜȐȎșȖ ȐșȖȭțȖȓ ȟȜȟȠȎȐȎ ȑȎȕȜȐȜȗ ȢȎȕȩ țȎ ȞȜȟȠ ȫȝȖȠȎȘȟȖȎșȪțȩȣ ȝșȓțȜȘ SiC. ǿȜȑșȎȟțȜ ȠȓȞȚȜȒȖțȎȚȖȥȓȟȘȖȚ ȞȎȟȥȓȠȎȚ ȟȘȜȞȜȟȠȪ ȞȜȟȠȎ ȡȐȓșȖȥȖȐȎȓȠȟȭ ȟ ȞȜȟȠȜȚ ȜȠțȜȦȓțȖȭ Si/(Si+C) ȒȜ 0.496, ȝȜȟșȓ ȥȓȑȜ ȞȓȕȘȜ ȝȎȒȎȓȠ. ȋȘȟȝȓȞȖȚȓțȠȎșȪțȩȓ ȒȎțțȩȓ ȟȜȑșȎȟȡȬȠȟȭ ȟ ȞȎȟȥȓȠȜȚ.

100 ǮȑȓȓȐ Ǽ.Ǯ., ǯȓșȭȓȐ Ǯ.dz., ǯȜșȠȜȐȓȤ ǻ.ǿ., ǸȖȟȓșȓȐ ǰ.ǿ., ǸȜțȎȘȜȐȎ Ǿ.ǰ. Ȗ ȒȞ.

ǰȩȞȎȧȖȐȎțȖȓ ȝȞȜȖȕȐȜȒȖȠȟȭ Ȑ ȒȖȎȝȎȕȜțȓ ȠȓȚȝȓȞȎȠȡȞ ȜȠ 1100 ȒȜ 2100°ǿ. ǶȟȝȜșȪȕȡȓȚȎȭ ȠȓȚȝȓȞȎȠȡȞȎ ȐȜ ȚțȜȑȜȚ ȜȝȞȓȒȓșȭȓȠȟȭ ȚȎȠȓȞȖȎșȜȚ ȝȜȒșȜȔȘȖ. ȀȎȘ ȝȞȖ ȝȞȖȚȓțȓțȖȖ ȘȞȓȚțȖȭ Ȑ ȘȎȥȓȟȠȐȓ ȝȜȒșȜȔȘȖ ȠȓȚȝȓȞȎȠȡȞȎ ȜȟȎȔȒȓțȖȭ țȓ ȚȜȔȓȠ ȝȞȓȐȩȦȎȠȪ ȠȓȚȝȓȞȎȠȡȞȩ ȝșȎȐșȓțȖȭ ȘȞȓȚțȖȭ (_1420°ǿ).

ǰȞȎȏȜȠȎȣ[1 3] ȏȩșȖȝȞȜȐȓȒȓțȩȖȟȟșȓȒȜȐȎțȖȭȚȓȣȎțȖȕȚȎȞȜȟȠȎ ȚȜțȜȘȞȖȟȠȎșșȜȐ Ȗ ȫȝȖȟșȜȓȐ SiC Ȑ ȟșȡȥȎȓ CVD-ȝȞȜȤȓȟȟȎ. ǽȞȖțȖȚȎșȜȟȪ, ȥȠȜȐȟȖȟȠȓȚȓȞȓȎșȖȕȡȓȠȟȭșȎȚȖțȎȞțȩȗȞȓȔȖȚȑȎȕȜȐȜȑȜȝȜȠȜȘȎ. ǶȟȝȜșȪȕȜȐȎșȎȟȪ ȚȜȒȓșȪȝȞȖȑȞȎțȖȥțȜȑȜȟșȜȭȐȝȞȓȒȝȜșȜȔȓțȖȖ, ȥȠȜ țȎ ȝȜȐȓȞȣțȜȟȠȖ ȝȜȒșȜȔȘȖ Ȗ ȐȏșȖȕȖ ȓȓ ȟȘȜȞȜȟȠȪ ȑȎȕȜȐȜȑȜ ȝȜȠȜȘȎ ȞȎȐțȎ țȡșȬ. ǽȞȖ ȫȠȜȚ ȞȎȟȟȚȎȠȞȖȐȎșȜȟȪ ȒȐȎ ȞȓȔȖȚȎ:

1. ǽȞȖ ȐȩȟȜȘȖȣ ȠȓȚȝȓȞȎȠȡȞȎȣ (Ȁ> 1400°ǿ) ȚȎȟȟȜȝȓȞȓțȜȟ Ȗ ȟȘȜȞȜȟȠȪ ȞȜȟȠȎ ȝșȓțȘȖ țȎ ȝȜȒșȜȔȘȓ ȜȝȞȓȒȓșȭȬȠȟȭ ȒȖȢȢȡȕȖȓȗ ȘȜȚȝȜțȓțȠ ȥȓȞȓȕ ȝȜȑȞȎțȖȥțȩȗ ȟșȜȗ [1]. ȋȠȜȠ ȝȞȜȤȓȟȟ ȜȠțȜȟȖȠȓșȪțȜ ȟșȎȏȜ ȕȎȐȖȟȖȠ ȜȠȠȓȚȝȓȞȎȠȡȞȩ. ǿȜȜȠțȜȦȓțȖȓ ȚȓȔȒȡȟȘȜȞȜȟȠȪȬ ȞȜȟȠȎVg Ȗ ȠȓȚȝȓȞȎȠȡȞȜȗ Ȑ ȫȠȜȚ ȞȓȔȖȚȓ ȚȜȔȓȠ ȏȩȠȪ ȝȞȓȒȟȠȎȐșȓțȜ Ȑ ȐȖȒȓ

ȑȒȓȀ – ȠȓȚȝȓȞȎȠȡȞȎȞȜȟȠȎ, T0 – ȘȜȚțȎȠțȎȭȠȓȚȝȓȞȎȠȡȞȎ, n=0.25 0.45. ǰȫȠȜȚȟșȡȥȎȓȘȎȔȡȧȎȭȟȭȫțȓȞȑȖȭȎȘȠȖȐȎȤȖȖȝȞȜȤȓȟȟȎȞȜȟȠȎȟȜȟȠȎȐșȭȓȠ 3.5 4.5 ǸȘȎș/ȚȜșȪ [4].

2. ǽȞȖ ȜȠțȜȟȖȠȓșȪțȜ țȖȕȘȖȣ ȠȓȚȝȓȞȎȠȡȞȎȣ _1100 1400°ǿ Vg ȜȝȞȓȒȓșȭȓȠȟȭ ȑȓȠȓȞȜȑȓțțȩȚȖ ȞȓȎȘȤȖȭȚȖ. ǽȞȖ ȫȠȜȚ ȟȘȜȞȜȟȠȪ ȞȜȟȠȎ ȒȜșȔțȎȟȖșȪțȜȕȎȐȖȟȓȠȪȜȠȠȓȚȝȓȞȎȠȡȞȩ. ǰȞȓȔȖȚȓ, șȖȚȖȠȖȞȡȓȚȜȚ ȑȓȠȓȞȜȑȓțțȩȚȖ ȞȓȎȘȤȖȭȚȖ, Vg ȜȝȞȓȒȓșȭȓȠȟȭ ȎȒȟȜȞȏȤȖȓȗ ȞȓȎȑȖȞȡȬȧȖȣ ȘȜȚȝȜțȓțȠȜȐ, ȞȓȎȘȤȖȭȚȖ ȞȎȕșȜȔȓțȖȭ-ȐȜȟȟȠȎțȜȐșȓțȖȭ Ȗ ȒȓȟȜȞȏȤȖȓȗȝȞȜȒȡȘȠȜȐȞȓȎȘȤȖȗ. ǰȟșȡȥȎȓ, ȘȜȑȒȎVg ȘȜțȠȞȜșȖȞȡȓȠȟȭ ȑȓȠȓȞȜȑȓțțȩȚȖ ȞȓȎȘȤȖȭȚȖ, ȟȝȞȎȐȓȒșȖȐȜ ȡȞȎȐțȓțȖȓ ǮȞȞȓțȖȡȟȎ

ȑȒȓ %E – ȘȎȔȡȧȎȭȟȭ ȫțȓȞȑȖȭ ȎȘȠȖȐȎȤȖȖ, R – ȡțȖȐȓȞȟȎșȪțȎȭ ȑȎȕȜȐȎȭ ȝȜȟȠȜȭțțȎȭ. ǰȓșȖȥȖțȎ %E ȚȜȔȓȠ ȏȩȠȪ ȜȝȞȓȒȓșȓțȎ Ȗȕ țȎȘșȜțȎ ȕȎȐȖȟȖȚȜȟȠȖ Vg_f(1/ T). ǰ șȖȠȓȞȎȠȡȞȓ ȖȚȓȓȠȟȭ ȏȜșȪȦȜȗ ȞȎȕȏȞȜȟ

ȐȓșȖȥȖț %E. ȀȎȘ ȝȞȖ ȐȩȞȎȧȖȐȎțȖȖ ȝșȓțȜȘ 3ǿ-SiC țȎ 6ǻ-SiC ȝȜȒșȜȔȘȎȣ %E ȘȜșȓȏșȓȠȟȭ Ȑ ȝȞȓȒȓșȎȣ %E= 12 26 ǸȘȎș/ȚȜșȪ.

5.1. DZȓȠȓȞȜȫȝȖȠȎȘȟȖȭ

ǽȞȖȖȟȝȜșȪȕȜȐȎțȖȖȘȞȓȚțȖȭȐȘȎȥȓȟȠȐȓȝȜȒșȜȔȓȘȜȟțȜȐțȜȗȝȞȜȏșȓ- ȚȜȗȭȐșȭȓȠȟȭțȓȟȜȜȠȐȓȠȟȠȐȖȓȝȜȟȠȜȭțțȩȣȞȓȦȓȠȜȘ3C-SiC (a=4.3598 Å) ȖȘȞȓȚțȖȭ(5.4282 Å), ȎȠȎȘȔȓȟȡȧȓȟȠȐȓțțȎȭȞȎȕțȖȤȎȐȘȜȫȢȢȖȤȖȓțȠȎȣ ȠȓȞȚȖȥȓȟȘȜȑȜ ȞȎȟȦȖȞȓțȖȭ. ǮȐȠȜȞȩ [5] ȜȝȞȓȒȓșȭȬȠ ȟȞȓȒțȓȓ ȕțȎȥȓțȖȓ ȘȜȫȢȢȖȤȖȓțȠȜȐ ȠȓȞȚȖȥȓȟȘȜȑȜ ȞȎȟȦȖȞȓțȖȭ Si Ȗ SiC Ȑ ȠȓȚȝȓȞȎȠȡȞțȜȚ ȒȖȎȝȎȕȜțȓ 293 673 Ǹ ȘȎȘ 3.6¸10 6 ȑȞȎȒ 1 Ȗ 4.9¸10 6 ȑȞȎȒ 1, ȟȜȜȠȐȓȠȟȠȐȓțțȜ. ȋȠȖ ȞȎȕșȖȥȖȭ ȝȞȖȐȜȒȭȠ Ș ȐȜȕțȖȘțȜȐȓțȖȬ ȚȓȣȎțȖȥȓȟȘȖȣ țȎȝȞȭȔȓțȖȗțȎȑȞȎțȖȤȓȞȎȕȒȓșȎȚȓȔȒȡȝȜȒșȜȔȘȜȗȖȫȝȖȠȎȘȟȖȎșȪțȩȚ ȟșȜȓȚ, ȥȠȜ ȟȝȜȟȜȏȟȠȐȡȓȠ ȢȜȞȚȖȞȜȐȎțȖȬ ȏșȜȘȜȐ, ȒȐȜȗțȖȘȜȐ Ȗ ȒȓȢȓȘȠȜȐ ȡȝȎȘȜȐȘȖ, ȞȎȟȝȞȜȟȠȞȎțȭȬȧȖȣȟȭ ȐȑșȡȏȪ ȫȝȖȠȎȘȟȖȎșȪțȜȑȜ ȟșȜȭ [6 9]. Dzșȭ ȟțȖȔȓțȖȭ ȐșȖȭțȖȭ ȞȎȟȟȜȑșȎȟȜȐȎțȖȭ ȝȎȞȎȚȓȠȞȜȐ ȞȓȦȓȠȜȘ țȎ ȘȎȥȓȟȠȐȜ ȫȝȖȠȎȘȟȖȎșȪțȩȣ ȝșȓțȜȘ ȖȟȝȜșȪȕȡȓȠȟȭ ȚȓȠȜȒ țȎțȓȟȓțȖȭ ȝȞȜȚȓȔȡȠȜȥțȜȑȜ ȏȡȢȓȞțȜȑȜ ȟșȜȭ [10 12]. ǽȞȖȞȜȒȎ ȏȡȢȓȞțȜȑȜȟșȜȭȖȟȟșȓȒȜȐȎșȎȟȪ ȚȓȠȜȒȎȚȖ ȚȭȑȘȜȗȞȓțȠȑȓțȜȐȟȘȜȗ ȟȝȓȘ-

ȠȞȜȟȘȜȝȖȖ (medium energy ion scattering MEIS) Ȗ ȝȞȜȟȐȓȥȖȐȎȬȧȓȗ ȫșȓȘȠȞȜțțȜȗ ȚȖȘȞȜȟȝȓȘȠȞȜȟȘȜȝȖȓȗ – Transmission Electron Microscope (TEM). ȁȟȠȎțȜȐșȓțȜ, ȥȠȜ ȏȡȢȓȞțȩȗ ȟșȜȗ ȭȐșȭȓȠȟȭ ȠȜțȘȖȚ (țȓȟȘȜșȪȘȜ țȚ) ȚȜțȜȘȞȖȟȠȎșșȖȥȓȟȘȖȚ 3C-SiC. ǻȎșȖȥȖȓ ȏȡȢȓȞțȜȑȜ ȟșȜȭȝȞȖȐȜȒȖȠȘȞȓȕȘȜȚȡȟțȖȔȓțȖȬțȎȝȞȭȔȓțȖȗ, ȎȫȝȖȠȎȘȟȖȎșȪțȩȓ ȟșȜȖȖȚȓȬȠȒȜȟȠȎȠȜȥțȜȟȜȐȓȞȦȓțțȡȬȟȠȞȡȘȠȡȞȡ. ǶȕȐȓȟȠțȜțȓȟȘȜșȪȘȜ ȟȝȜȟȜȏȜȐ țȎțȓȟȓțȖȭ ȏȡȢȓȞțȜȑȜ ȟșȜȭ. ȀȎȘ Ȑ ȞȎȏȜȠȓ [13] ȓȑȜ țȎțȜȟȖșȖ ȝȡȠȓȚȞȎȟȝȩșȓțȖȭȚȖȦȓțȖȖȕȘȎȞȏȖȒȎȘȞȓȚțȖȭȐȐȩȟȜȘȜȥȎȟȠȜȠțȜȚ ȞȎȕȞȭȒȓ Ȑ ȎȞȑȜțȓ. ǯȜșȓȓ ȦȖȞȜȘȜ ȝȞȖȚȓțȭȓȠȟȭ ȒȞȡȑȜȗ ȟȝȜȟȜȏ. ȋȠȜ ȠȎȘ țȎȕȩȐȎȓȚȎȭ ȘȎȞȏȜțȖȕȎȤȖȭ – țȎțȓȟȓțȖȓ ȠȜțȘȜȑȜ ȟșȜȭ ȡȑșȓȞȜȒȎ țȎ ȘȞȓȚțȖȓȐȡȬ ȝȜȒșȜȔȘȡ țȓȝȜȟȞȓȒȟȠȐȓțțȜ ȝȓȞȓȒ ȝȞȜȤȓȟȟȜȚ ȞȜȟȠȎ. Dzșȭ ȫȠȜȑȜ ȝȜȒșȜȔȘȡ ȝȞȓȒȐȎȞȖȠȓșȪțȜ ȝȞȜȑȞȓȐȎȬȠ ȒȜ ȠȓȚȝȓȞȎȠȡȞȩ 1360Ȝǿ Ȗ Ȑ ȝȜȠȜȘ ȑȎȕȎ-țȜȟȖȠȓșȭ ȐȐȜȒȭȠ ƙ3ƕ8 [14, 15].

ǰ țȎȟȠȜȭȧȓȓ ȐȞȓȚȭ CVD-ȚȓȠȜȒȜȚ ȝȜșȡȥȎȬȠ ȐȩȟȜȘȜȘȎȥȓȟȠȐȓțțȩȓ 3C-SiC ȫȝȖȠȎȘȟȖȎșȪțȩȓ ȟșȜȖ țȎ ȘȞȓȚțȖȓȐȩȣ ȝȜȒșȜȔȘȎȣ ȏȜșȪȦȜȗ ȝșȜȧȎȒȖ. ǸȜțȤȓțȠȞȎȤȖȬ ȝȞȖȚȓȟȓȗ ȚȜȔțȜ ȐȎȞȪȖȞȜȐȎȠȪ

ȜȠ 1.1015 ȒȜ 1019 ȟȚ 3, Ȏ ȝȜȒȐȖȔțȜȟȠȪ ȫșȓȘȠȞȜțȜȐ ȒȜȟȠȖȑȎȓȠ ȕțȎȥȓțȖȭ 520 ȟȚ2/ǰ¸ȟ.

ǰȓȒȡȠȟȭȞȎȏȜȠȩȝȜȟȠȖȚȡșȖȞȜȐȎțȖȬȞȜȟȠȎșȎȕȓȞțȩȚȖȕșȡȥȓțȖȓȚ. ǽșȓțȘȖȜȟȎȔȒȎȬȠțȎȝȜȒșȜȔȘȖ, ȞȎȕȜȑȞȓȐȎȓȚȩȓȖȕșȡȥȓțȖȓȚƙƖ2 șȎȕȓȞȎȟM=9.27 ȚȘȚ. ȁȟȠȎțȜȐșȓțȜ[16], ȥȠȜȝȜșȡȥȎȓȚȩȓȝșȓțȘȖȖȚȓȬȠ ȝȓȞȖȜȒȖȥȓȟȘȡȬ ȐȜșțȜȜȏȞȎȕțȡȬ ȟȠȞȡȘȠȡȞȡ, ȟȜȟȠȜȭȧȡȬ Ȗȕ ȒȐȡȣ ȝȜȒ-

102 ǮȑȓȓȐ Ǽ.Ǯ., ǯȓșȭȓȐ Ǯ.dz., ǯȜșȠȜȐȓȤ ǻ.ǿ., ǸȖȟȓșȓȐ ǰ.ǿ., ǸȜțȎȘȜȐȎ Ǿ.ǰ. Ȗ ȒȞ.

ȟȖȟȠȓȚ ȝȡȥțȜȟȠȓȗ. ǽȓȞȖȜȒ ȝȜȐȠȜȞȓțȖȭ ȜȝȞȓȒȓșȭȓȠȟȭ ȒșȖțȜȗ ȐȜșțȩ șȎȕȓȞțȜȑȜ ȖȕșȡȥȓțȖȭ Ȗ ȜȏȡȟșȜȐșȓț ȝȓȞȖȜȒȖȥțȩȚ ȞȎȟȝȞȓȒȓșȓțȖȓȚ ȠȓȚȝȓȞȎȠȡȞȩțȎȝȜȒșȜȔȘȓ. ǶȟȝȜșȪȕȜȐȎțȖȓȘȜȞȜȠȘȜȐȜșțȜȐȜȑȜȖȕșȡȥȓțȖȭ (M=380 țȚ) ȝȞȖȐȜȒȖȠ Ș ȜȏȞȎȕȜȐȎțȖȬ ȟȐȓȞȣȞȓȦȓȠȜȘ Ȑ ȟȠȞȡȘȠȡȞȓ ȝșȓțȜȘ SiC țȎ ȝȜȒșȜȔȘȎȣ Ȗȕ Al2O3 Ȗ ȟȠȖȚȡșȖȞȡȓȠ Ȗȣ ȞȜȟȠ [17].

ǻȓȟȚȜȠȞȭ țȎ ȝȞȜȑȞȓȟȟ Ȑ ȠȓȣțȜșȜȑȖȖ 3C-SiC ȝșȓțȘȖ țȎ ȘȞȓȚțȖȖ ȒȜȟȖȣȝȜȞȟȜȒȓȞȔȎȠȏȜșȪȦȜȓȘȜșȖȥȓȟȠȐȜȒȓȢȓȘȠȜȐȟȠȞȡȘȠȡȞȩ:ȒȐȜȗțȖȘȖ, ȒȓȢȓȘȠȩȡȝȎȘȜȐȘȖȖȎțȠȖȢȎȕțȩȓȑȞȎțȖȤȩ(antiphase boundaries APB). ǶȟȝȜșȪȕȜȐȎțȖȓȞȎȕȜȞȖȓțȠȖȞȜȐȎțțȩȣȝȜȒșȜȔȓȘȘȞȓȚțȖȭȜȠțȜȟȖȠȓșȪțȜ ȝșȜȟȘȜȟȠȖ (100) ȝȜȕȐȜșȭȓȠ ȖȕȏȓȔȎȠȪ ȜȏȞȎȕȜȐȎțȖȭ APB ȒȓȢȓȘȠȜȐ.

5.2. DZȜȚȜȫȝȖȠȎȘȟȖȭ

3C-SiC țȎ6H-SiC ȝȜȒșȜȔȘȎȣ. ǽȞȖȖȟȝȜșȪȕȜȐȎțȖȖȚȜțȜȘȞȖȟȠȎșșȜȐ SiC Ȑ ȘȎȥȓȟȠȐȓ ȝȜȒșȜȔȓȘ ȟțȖȚȎȓȠȟȭ ȞȭȒ ȝȞȜȏșȓȚ, ȐȜȕțȖȘȎȬȧȖȣ ȝȞȖ ȑȓȠȓȞȜȫȝȖȠȎȘȟȖȖ. ȀȎȘ Ȑ ȟșȡȥȎȓ ȐȩȞȎȧȖȐȎțȖȭ 3C-SiC țȎ 6H-SiC ȝȜȒșȜȔȘȎȣ 3ǿ(111) / 6ǻ(0001) ȞȎȕțȜȟȠȪ ȝȜȟȠȜȭțțȩȣ ȞȓȦȓȠȘȖ țȓ ȝȞȓȐȩȦȎȓȠ 0.3%. ǸȜȫȢȢȖȤȖȓțȠȩ ȠȓȞȚȖȥȓȟȘȜȑȜ ȞȎȟȦȖȞȓțȖȭ ȠȎȘȔȓ ȏșȖȕȘȖ. ǰȟȓ ȫȠȜ ȝȜȕȐȜșȭȓȠ CVD-ȚȓȠȜȒȜȚ ȝȜșȡȥȎȠȪ ȒȜȐȜșȪțȜ ȐȩȟȜȘȜȘȎȥȓȟȠȐȓțțȩȓ ȫȝȖȠȎȘȟȖȎșȪțȩȓ ȟșȜȖ [17 19]. ǼȝȠȖȚȎșȪțȩȗ ȠȓȚȝȓȞȎȠȡȞțȩȗ ȞȓȔȖȚ Ȓșȭ ȞȜȟȠȎ ȑȓȘȟȎȑȜțȎșȪțȩȣ ȟșȜȓȐ ȫȠȜ ȖțȠȓȞȐȎș 1700 1750°ǿ. ǸȡȏȖȥȓȟȘȖȗ ȘȎȞȏȖȒ ȘȞȓȚțȖȭ ȜȏȞȎȕȡȓȠȟȭ ȝȞȖ ȏȜșȓȓ țȖȕȘȖȣ ȠȓȚȝȓȞȎȠȡȞȎȣ. ǿȘȜȞȜȟȠȪ ȞȜȟȠȎ Ȗ ȘȎȥȓȟȠȐȜ ȫȝȖȟșȜȓȐ țȎ ȑȞȎțȖ (0001)Si ȐȩȦȓ, ȥȓȚ țȎ (0001)ƙ 6ǻ-SiC ȝȜȒșȜȔȓȘ. ǽșȓțȘȖ 3C-SiC ȐȩȞȎȧȓțțȩȓ țȎ 6H-SiC, ȘȎȘ ȝȞȎȐȖșȜ, ȖȚȓȬȠ ȕțȎȥȖȠȓșȪțȜ ȏȜșȓȓ țȖȕȘȡȬ ȝșȜȠțȜȟȠȪ ȒȓȢȓȘȠȜȐ, ȥȓȚ ȝșȓțȘȖ ȐȩȞȎȧȓțțȩȓ țȎ Si. ȀȓȚ țȓ Țȓțȓȓ, ȜțȖ ȟȜȒȓȞȔȎȠ ȐȩȟȜȘȡȬ ȝșȜȠțȜȟȠȪ ȑȞȎțȖȤ ȒȐȜȗțȖ-

ȘȜȐȎțȖȭ (double position boundaries – DPBs) [20,21]. ǮȐȠȜȞȩ [20]

ȡȠȐȓȞȔȒȎȬȠ, ȥȠȜ ȚȜțȜȘȞȖȟȠȎșșȖȥȓȟȘȖȓ ȟșȜȖ 3C-SiC Ȑ ȝȞȖțȤȖȝȓ, țȓ ȚȜȑȡȠ ȏȩȠȪ ȝȜșȡȥȓțȩ țȎ ȣȜȞȜȦȜ ȜȞȖȓțȠȖȞȜȐȎțțȩȣ ȑȞȎțȭȣ (0001)Si 6H-SiC. ȀȜșȪȘȜ ȞȎȕȜȞȖȓțȠȎȤȖȭ ȝȜȒșȜȔȓȘ ȝȜȕȐȜșȭȓȠ ȐȩȞȎȧȖȐȎȠȪ ȚȜțȜȘȞȖȟȠȎșșȖȥȓȟȘȖȓ ȟșȜȖ. ȋȠȜȠ ȐȩȐȜȒ ȜȏȨȭȟțȭȓȠȟȭ Ȑ ȞȎȚȘȎȣ ȚȜȒȓșȖ ȝȜȐȓȞȣțȜȟȠțȩȣ ȟȠȡȝȓțȓȗ. ǽȞȖ ȫȠȜȚ ȡȥȖȠȩȐȎșȖȟȪ ȜȟȜȏȓțțȜȟȠȖ ȟȠȞȜȓțȖȭ ȘȞȖȟȠȎșșȜȐ ȘȎȞȏȖȒȎȘȞȓȚțȖȭ. ǶȕȐȓȟȠțȜ, ȥȠȜȝȜșȖȠȖȝȩ SiC ȞȎȕșȖȥȎȬȠȟȭ ȝȜȟșȓȒȜȐȎȠȓșȪțȜȟȠȪȬ ȡȘșȎȒȘȖ ȒȐȜȗțȩȣ ȟșȜȓȐ Si Ȗ C Ȗ ȥȖȟșȜȚ ȟșȜȓȐ Ȑ ȝȓȞȖȜȒȓ ȝȜȐȠȜȞȭȓȚȜȟȠȖ. ǰ ȥȎȟȠțȜȟȠȖ 3ǿ-SiC ȣȎȞȎȘȠȓȞȖȕȡȓȠȟȭ ȝȜȟșȓȒȜȐȎȠȓșȪțȜȟȠȪȬ Ǯǰǿ, Ǯǰǿ, ..., Ȏ 6ǻ – ǮǰǿǮǿǰ, ǮǰǿǮǿǰ, ... . ǻȎȓȟȠȓȟȠȐȓțțȜȗȝȜȐȓȞȣțȜȟȠȖȘȞȖȟȠȎșșȜȐ6ǻ-SiC ȐȟȓȑȒȎ

ȖȚȓȬȠȟȭȡȥȎȟȠȘȖ, ȝȞȖțȎȒșȓȔȎȧȖȓȝȜȟșȓȒȜȐȎȠȓșȪțȜȟȠȭȚǮǰǿȖǮǿǰ. ȋȠȜ ȝȞȖȐȜȒȖȠ Ș ȠȜȚȡ, ȥȠȜ țȎ ȠȎȘȜȗ ȝȜȐȓȞȣțȜȟȠȖ ȘȞȖȟȠȎșșȜȐ ȐȩȞȎȟȠȎȬȠ ȒȐȜȗțȖȘȜȐȩȓ ȝșȓțȘȖ 3C-SiC. dzȟșȖ ȝȜȒșȜȔȘȖ ȜȏȞȎȏȜȠȎțȩ ȝȜȒ ȡȑșȜȚ Ș ȝșȜȟȘȜȟȠȖ (0001), ȠȜ ȞȓȕȘȜ ȡȐȓșȖȥȖȐȎȓȠȟȭ ȝșȜȠțȜȟȠȪ ȟȠȡȝȓțȓȘ. ǮȠȜȚȩ, ȝȜȟȠȡȝȎȬȧȖȓ țȎ ȝȜȒșȜȔȘȡ, ȚȖȑȞȖȞȡȬȠ ȝȜ ȝȜȐȓȞȣțȜȟȠȖ Ș ȟȠȡȝȓțȪȘȎȚ, Ȗ ȠȎȘȖȚ ȜȏȞȎȕȜȚ ȜȟȡȧȓȟȠȐșȭȓȠȟȭ ȝȓȞȓȒȎȥȎ ȟȠȞȡȘȠȡȞțȜȗ ȖțȢȜȞȚȎȤȖȖ. ǽȜȒȑȜȠȜȐȘȎ ȝȜȒșȜȔȓȘ ȕȎȘșȬȥȎȓȠȟȭ Ȑ ȦșȖȢȜȐȘȓ, ȝȜșȖȞȜȐȘȓ Ȗ ȠȞȎȐșȓțȖȖ Ȓșȭ ȝȜșȡȥȓțȖȭ ȞȎȕȜȞȖȓțȠȎȤȖȖ ȝȜȒ ȡȑșȜȚ

B_1.5 6° Ș ȝȜȐȓȞȣțȜȟȠȖ (0001)Si [20].

4H Ȗ 6H-SiC țȎ 6H-SiC ȝȜȒșȜȔȘȎȣ. Ǹ țȎȟȠȜȭȧȓȚȡ ȐȞȓȚȓțȖ ȜȏȨȓȚțȩȓ ȘȞȖȟȠȎșșȩ 4H Ȗ 6H-SiC ȝȜșȡȥȎȬȠ ȖșȖ ȚȓȠȜȒȜȚ PVT ȖșȖ, Ȑ ȕțȎȥȖȠȓșȪțȜ ȏȜșȓȓ țȖȕȘȜȚ ȝȞȜȚȩȦșȓțțȜȚ ȜȏȨȓȚȓ, ȐȩȟȜȘȜȠȓȚȝȓȞȎȠȡȞțȩȚȣȖȚȖȥȓȟȘȖȚȜȟȎȔȒȓțȖȓȚȝȎȞȎHigh Temperature Chemical Vapor Deposition (HTCVD) [22 26] (pȖȟ. 5.2).

ǰ ȝȜȟșȓȒțȖȓ ȑȜȒȩ ȒȜȟȠȖȑțȡȠ ȐȝȓȥȎȠșȭȬȧȖȗ ȝȞȜȑȞȓȟȟ Ȑ ȜȏșȎȟȠȖ ȞȜȟȠȎSiC ȚȓȠȜȒȜȚPVT. ǼȒțȎȘȜ, ȝȞȜȏșȓȚȩȐȟȓȓȧȓȜȟȠȎȬȠȟȭ. ǻȎȝȞȖȚȓȞ, ȝȜȘȎȕȎțȜ, ȥȠȜ ȝȞȖ ȖȟȝȜșȪȕȜȐȎțȖȖ ȚȓȠȜȒȎ PVT ȟȠȓȣȖȜȚȓȠȞȖȭ ȖȕȚȓțȭȓȠȟȭ ȐȒȜșȪ ȜȟȖ ȞȜȟȠȎ Ȗ ȝȜ ȒȖȎȚȓȠȞȡ ȟșȖȠȘȎ. ȋȠȜ ȝȞȖȐȜȒȖȠ Ș ȐȎȞȖȎȤȖȖ ȫșȓȘȠȞȖȥȓȟȘȖȣ ȣȎȞȎȘȠȓȞȖȟȠȖȘ Ȗ

104 ǮȑȓȓȐ Ǽ.Ǯ., ǯȓșȭȓȐ Ǯ.dz., ǯȜșȠȜȐȓȤ ǻ.ǿ., ǸȖȟȓșȓȐ ǰ.ǿ., ǸȜțȎȘȜȐȎ Ǿ.ǰ. Ȗ ȒȞ.

ȞȜȟȠȎ, ȟȞȎȐțȖȚȡȬȟPVT. ǸȜțȤȓțȠȞȎȤȖȭȜȟȠȎȠȜȥțȩȣȝȞȖȚȓȟȓȗțȖȔȓ, ȥȓȚ Ȑ ȘȞȖȟȠȎșșȎȣ ȐȩȞȎȧȓțțȩȣ ȚȓȠȜȒȜȚ PVT. ǸȞȖȟȠȎșșȩ ȝȜ ȫșȓȘȠȞȖȥȓȟȘȖȚ ȝȎȞȎȚȓȠȞȎȚ ȖȚȓȬȠ ȣȜȞȜȦȡȬ ȜȒțȜȞȜȒțȜȟȠȪ. ǼȒțȎȘȜ țȖȕȘȎȭȠȓȞȚȖȥȓȟȘȎȭȡȟȠȜȗȥȖȐȜȟȠȪȟȖșȎțȎȡȐȓșȖȥȖȐȎȓȠȐȓȞȜȭȠțȜȟȠȪ ȝȎȞȎȕȖȠțȩȣ ȝȞȓ-ȞȓȎȘȤȖȗ Ȑ ȑȎȕȜȐȜȗ ȢȎȕȓ.

ǾȎȕȐȖȠȖȓȚ ȫȠȜȑȜ ȚȓȠȜȒȎ ȭȐșȭȓȠȟȭ ȚȓȠȜȒ ȑȎșȜȖȒțȜȑȜ ȣȖȚȖȥȓȟ-

ȘȜȑȜ ȜȟȎȔȒȓțȖȭ (Halide Chemical Vapor Deposition – HCVD). ǰ țȓȚ ȖȟȝȜșȪȕȡȬȠȟȭ ȠȓȞȚȖȥȓȟȘȖ ȟȠȎȏȖșȪțȩȓ ȝȞȓȘȡȞȟȜȞȩ, ȥȠȜ ȡȟȠȞȎțȭȓȠ ȝȞȓ-ȞȓȎȘȤȖȖ[28, 29]. ǰȞȎȏȜȠȓ[29] ȟȜȜȏȧȎȓȠȟȭ, ȥȠȜȑȎșȜȖȒțȩȚCVD ȚȓȠȜȒȜȚȝȜșȡȥȓțȩȜȏȨȓȚțȩȓ4H- Ȗ6H-SiC ȘȞȖȟȠȎșșȩȟȜȥȓțȪțȖȕȘȜȗ ȘȜțȤȓțȠȞȎȤȖȓȗȎȕȜȠȎȖȏȜȞȎ< 1015 ȟȚ 3. ǿȘȜȞȜȟȠȪȞȜȟȠȎȟȜȟȠȎȐșȭșȎ ȒȜ250 300 ȚȘȚ/ȥȎȟ. ǽȜȘȎȕȎțȎȐȜȕȚȜȔțȜȟȠȪȝȜșȡȥȓțȖȭȘȞȖȟȠȎșșȜȐ ȠȜșȧȖțȜȗȒȜ5 ȚȚȖȒȖȎȚȓȠȞȜȚ50, 75 ȚȚȟȝșȜȠțȜȟȠȪȬ ȒȖȟșȜȘȎȤȖȗ ȝȜȞȭȒȘȎ 104 ȟȚ 2 Ȗ ȚȖȘȞȜȠȞȡȏȜȘ Țȓțȓȓ 5 ȟȚ 2.

ǰȞȎȏȜȠȓ [30] ȝȜȘȎȕȎțȜ, ȥȠȜ CVD ȞȜȟȠ SiC țȎ ȝȜȞȖȟȠȩȣ ȝȜȒșȜȔȘȎȣ SiC ȚȜȔȓȠ ȝȞȖȐȓȟȠȖ Ș ȟțȖȔȓțȖȬ ȝșȜȠțȜȟȠȖ ȒȖȟșȜȘȎȤȖȗ Ȑ ȫȝȖȠȎȘȟȖȎșȪțȩȣȟșȜȭȣ. ȋȠȜȟȜȝȞȜȐȜȔȒȎȓȠȟȭȟțȖȔȓțȖȓȚȖțȠȓțȟȖȐțȜȟȠȖ ȝȖȘȜȐ ȒȓȢȓȘȠțȜȗ șȬȚȖțȓȟȤȓțȤȖȖ L1 _2.901 ȫǰ Ȗ ȐȜȕȞȎȟȠȎțȖȓȚ ȖțȠȓțȟȖȐțȜȟȠȖȝȞȖȘȞȎȓȐȜȗșȬȚȖțȓȟȤȓțȤȖȖȐțȖȕȘȜȠȓȚȝȓȞȎȠȡȞțȜȚ ȟȝȓȘȠȞȓ ȢȜȠȜșȬȚȖțȓȟȤȓțȤȖȖ [31,32].

ǾȜȟȠ 4ǻ- Ȗ 6ǻ-SiC ȟșȜȓȐ ȜȏȩȥțȜ ȝȞȜȖȕȐȜȒȖȠȟȭ țȎ ȕȎȠȞȎȐȘȎȣ ȞȎȕȜȞȖȓțȠȖȞȜȐȎțțȩȣ ȜȠțȜȟȖȠȓșȪțȜ ȝșȜȟȘȜȟȠȖ (0001), ȥȠȜ ȜȏȓȟȝȓȥȖȐȎȓȠȡȟșȜȐȖȭȒșȭȑȜȚȜȫȝȖȠȎȘȟȖȖȖȝȜȕȐȜșȭȓȠȖȕȏȓȔȎȠȪȜȏȞȎȕȜȐȎțȖȭ ȞȭȒȎ ȒȓȢȓȘȠȜȐ (ȜȏȩȥțȜ ȠȞȓȣȑȞȎțțȩȣ), ȣȎȞȎȘȠȓȞțȩȣ Ȓșȭ ȫȝȖȠȎȘȟȖȖ SiC [33, 34]. Dzșȭ ȠȎȘȜȗ ȫȝȖȠȎȘȟȖȖ ȖȟȝȜșȪȕȡȓȠȟȭ ȠȓȞȚȖț ȟȠȡȝȓț- ȥȎȠȩȗȞȜȟȠ(step-flow growth). ǽȞȖȫȠȜȚȜȥȓțȪȥȎȟȠȜțȎȏșȬȒȎȓȠȟȭȜȏȨȓȒȖțȓțȖȓȥȎȟȠȖȚȎșȩȣȟȠȡȝȓțȓȗȐȏȜșȪȦȖȓȟȠȡȝȓțȪȘȖȟ ȡȐȓșȖȥȓțțȜȗ ȐȩȟȜȠȜȗȟȠȡȝȓțȓȘ. ȋȠȜȠȫȢȢȓȘȠțȎȕȩȐȎȬȠȑȞȡȝȝȖȞȜȐȎțȖȓȚȟȠȡȝȓțȓȘ (step-bunching). ǼțȐșȖȭȓȠțȎȘȎȥȓȟȠȐȜȫȝȖȟșȜȓȐ, ȐȥȎȟȠțȜȟȠȖ, țȎ ȜȒțȜȞȜȒțȜȟȠȪ șȓȑȖȞȜȐȎțȖȭ. ȋȢȢȓȘȠ ȑȞȡȝȝȖȞȜȐȎțȖȭ ȟȠȡȝȓțȓȘ ȟȖșȪțȜ ȕȎȐȖȟȖȠ ȜȠ ȜȞȖȓțȠȎȤȖȖ ȝȜȒșȜȔȘȖ Ȗ ȐȜȕȞȎȟȠȎȓȠ ȟ ȡȐȓșȖȥȓțȖȓȚ ȡȑșȎ ȞȎȕȜȞȖȓțȠȎȤȖȖȝșȜȟȘȜȟȠȖȝȜȒșȜȔȘȖȜȠțȜȟȖȠȓșȪțȜȝșȜȟȘȜȟȠȖ(0001). ǰȩȟȜȠȎȟȠȡȝȓțȓȘȐȜȕȞȎȟȠȎȓȠȟȡȐȓșȖȥȓțȖȓȚȡȑșȎȜȠȘșȜțȓțȖȭȝȜȒșȜȔȘȖ. ǾȎȕșȖȥȎȬȠȚȎșȩȓȚȎȘȞȜȟȠȡȝȓțȪȘȖ, ȜȏȞȎȕȜȐȎțțȩȓțȓȟȘȜșȪȘȖȚȖ ȟȠȡȝȓțȪȘȎȚȖ ȟ Ȝȏȧȓȗ ȐȩȟȜȠȜȗ (ȜȒȖț Si-C ȏȖȟșȜȗ) Ȗ ȚȎȘȞȜȟȠȡȝȓțȪȘȖ ȟȜȟȠȜȭȧȖȓ Ȗȕ ȏȜșȪȦȜȑȜ ȥȖȟșȎ ȚȎȘȞȜȟȠȡȝȓțȓȘ.

ǰșȎȏȜȞȎȠȜȞȖȖ NASA Lewis ȞȎȕȞȎȏȜȠȎțȎ ȠȓȣțȜșȜȑȖȭ ȠȜȥțȜȑȜ șȓȑȖȞȜȐȎțȖȭȫȝȖȠȎȘȟȖȎșȪțȩȣ ȝșȓțȜȘSiC. ȁȟȠȎțȜȐșȓțȜ, ȥȠȜȜȠțȜȦȓ-

țȖȓ Si/C ȝȜȠȜȘȜȐȝȞȖȫȝȖȠȎȘȟȖȎșȪțȜȚCVD ȞȜȟȠȓȚȜȔȓȠȖȟȝȜșȪȕȜȐȎȠȪȟȭȒșȭȘȜțȠȞȜșȭȐȐȓȒȓțȖȭȝȞȖȚȓȟȓȗȖ, ȟȜȜȠȐȓȠȟȠȐȓțțȜ, ȫșȓȘȠȞȖȥȓȟȘȖȣ ȝȎȞȎȚȓȠȞȜȐ ȐȩȞȎȧȖȐȎȓȚȜȑȜ ȫȝȖȠȎȘȟȖȎșȪțȜȑȜ ȟșȜȭ. ȋȠȜȠ ȝȞȜȤȓȟȟ, țȎȕȩȐȎȓȚȩȗ site-competition epitaxy (SCE), ȝȜȕȐȜșȭȓȠ ȝȞȜȐȜȒȖȠȪ ȘȜțȠȞȜșȖȞȡȓȚȜȓ șȓȑȖȞȜȐȎțȖȓ Ȗ ȝȜșȡȥȎȠȪ ȫȝȖȠȎȘȟȖȎșȪțȩȓ ȝșȓțȘȖ ȘȎȘ țȖȕȘȜșȓȑȖȞȜȐȎțțȩȓ, ȠȎȘ Ȗ ȟ ȐȩȟȜȘȜȗ ȘȜțȠȞȜșȖȞȡȓȚȜȗ ȘȜțȤȓțȠȞȎȤȖȓȗȝȞȖȚȓȟȖ. ȂȖȕȖȥȓȟȘȎȭȚȜȒȓșȪSCE ȜȟțȜȐȎțȎțȎȘȜțȘȡȞȓțȤȖȖ ȚȓȔȒȡ ȚȜșȓȘȡșȎȚȖ SiC Ȗ șȓȑȖȞȡȬȧȓȑȜ ȫșȓȚȓțȠȎ ȝȞȖ ȐțȓȒȞȓțȖȖ Ȗȣ

ȐȞȓȦȓȠȘȡțȎȝȜȐȓȞȣțȜȟȠȖȘȞȖȟȠȎșșȎSiC. ǰȐȓȒȓțȖȓȝȞȖȚȓȟȖȘȜțȠȞȜșȖȞȡȓȠȟȭ ȐȩȏȜȞȜȚ ȜȠțȜȦȓțȖȭ Si/C ȐțȡȠȞȖ ȞȓȎȘȠȜȞȎ. ȋȠȜ ȝȜȕȐȜșȭȓȠ ȐșȖȭȠȪ țȎ ȘȜșȖȥȓȟȠȐȜ șȓȑȖȞȡȬȧȖȣ ȎȠȜȚȜȐ ȝȞȖȚȓȟȖ ȐțȓȒȞȭȬȧȖȣȟȭ

ȐȟȜȜȠȐȓȠȟȠȐȡȬȧȖȓȟȜȟȠȜȭțȖȭȘȞȖȟȠȎșșȖȥȓȟȘȜȗȞȓȦȓȠȘȖ, șȖȏȜȟȜȟȠȜȭțȖȭ ȡȑșȓȞȜȒțȜȗ ȞȓȦȓȠȘȖ (C-ȟȜȟȠȜȭțȖȭ), șȖȏȜ ȘȞȓȚțȖȓȐȜȗ ȞȓȦȓȠȘȖ (Si-ȟȜȟȠȜȭțȖȭ) țȎȝȜȐȓȞȣțȜȟȠȖȞȎȟȠȡȧȓȑȜȘȞȖȟȠȎșșȎ. ȀȎȘȖȚȜȏȞȎȕȜȚ, ȚȜȒȓșȪ ȜȟțȜȐȎțȎ țȎ ȘȜțȘȡȞȓțȤȖȖ ȚȓȔȒȡ ȎȕȜȠȜȚ Ȗ ȡȑșȓȞȜȒȜȚ Ȓșȭ C-ȟȜȟȠȜȭțȖȗȖȚȓȔȒȡȎșȬȚȖțȖȓȚȖȘȞȓȚțȖȓȚȒșȭSi-ȟȜȟȠȜȭțȖȗ. ǸȜț- ȤȓțȠȞȎȤȖȭșȓȑȖȞȡȬȧȖȣȎȠȜȚȜȐn-ȠȖȝȎ(ȎȕȜȠ), ȘȜȠȜȞȩȓȚȜȑȡȠȕȎțȖȚȎȠȪ ȠȜșȪȘȜC-ȟȜȟȠȜȭțȖȭ, ȐțȓȒȞȭȬȧȖȓȟȭȐȞȎȟȠȡȧȖȗSiC ȫȝȖȠȎȘȟȖȎșȪțȩȗ ȟșȜȗ, ȚȜȔȓȠȏȩȠȪȟțȖȔȓțȎȝȡȠȓȚȝȜȐȩȦȓțȖȭȘȜțȤȓțȠȞȎȤȖȖȡȑșȓȞȜȒȎ ȠȎȘȘȎȘȡȑșȓȞȜȒȘȜțȘȡȞȖȞȡȓȠȟȎȕȜȠȜȚȒșȭȟȜȜȠȐȓȠȟȠȐȡȬȧȖȣƙ-ȟȜȟȠȜȭ- țȖȗ. ǰȜȏȧȓȚȘȜțȤȓțȠȞȎȤȖȭȎȕȜȠȎȐȐȩȞȎȧȖȐȎȓȚȜȚȫȝȖȠȎȘȟȖȎșȪțȜȚ ȟșȜȓȝȞȜȝȜȞȤȖȜțȎșȪțȎȜȠțȜȦȓțȖȬSi/C, ȐȠȜȐȞȓȚȭȘȎȘȘȜțȤȓțȠȞȎȤȖȭ ȎșȬȚȖțȖȭ ȜȏȞȎȠțȜ ȝȞȜȝȜȞȤȖȜțȎșȪțȎ ȫȠȜȚȡ ȜȠțȜȦȓțȖȬ.

ǰȝȜȟșȓȒțȖȓ ȑȜȒȩ ȞȎȕȞȎȏȜȠȎț ȞȭȒ ȘȜțȟȠȞȡȘȤȖȗ ȞȓȎȘȠȜȞȜȐ, ȝȜȕȐȜșȭȬȧȖȣȝȜșȡȥȎȠȪȫȝȖȠȎȘȟȖȎșȪțȩȓȟȠȞȡȘȠȡȞȩȐȩȟȜȘȜȑȜȘȎȥȓȟȠȐȎ. ȋȠȜȞȓȎȘȠȜȞȩȟȑȜȞȭȥȓȗȟȠȓțȘȜȗ(Hot-Wall Reactor), ȝȜȕȐȜșȭȬȧȖȓȝȜșȡȥȎȠȪȒȜȟȠȎȠȜȥțȜȠȜșȟȠȩȓȐȩȟȜȘȜȘȎȥȓȟȠȐȓțțȩȓȟșȎȏȜșȓȑȖȞȜȐȎțțȩȓ ȝșȓțȘȖȟȣȜȞȜȦȓȗȚȜȞȢȜșȜȑȖȓȗȖȐȩȟȜȘȜȗȜȒțȜȞȜȒțȜȟȠȪȬ(ȞȖȟ. 5.2). ǼțȖȜȏȓȟȝȓȥȖȐȎȬȠȜȒțȜȞȜȒțȜȟȠȪȝȜșȓȑȖȞȜȐȎțȖȬȟȠȜȥțȜȟȠȪȬȒȜ 2% ȖȠȜșȧȖțȓȒȜ1%. DzșȭȜȏȓȟȝȓȥȓțȖȭȜȒțȜȞȜȒțȜȟȠȖȖȟȝȜșȪȕȡȓȠȟȭȐȞȎȧȓțȖȓ ȕȎȠȞȎȐȜȥțȜȑȜ ȘȞȖȟȠȎșșȎ. ȂȖȞȚȎ Aixtron [33] ȖȕȑȜȠȎȐșȖȐȎȓȠ ȝșȎțȓȠȎȞțȩȓ ȞȓȎȘȠȜȞȩ (Multiwafer Reactor) ȟ ȣȜșȜȒțȜȗ Ȗ ȑȜȞȭȥȓȗ ȟȠȓțȘȎȚȖȟȜȒțȜȐȞȓȚȓțțȩȚȝȞȜȤȓȟȟȜȚȫȝȖȠȎȘȟȖȖțȎ ȟȓȚȖ2´ ȒȬȗȚȜȐȩȣȝȜȒșȜȔȘȎȣȖșȖȝȭȠȖ3´ ȒȬȗȚȜȐȩȣ. ǽȞȓȒșȜȔȓțȎțȜȐȎȭȘȜțȤȓȝȤȖȭȘȜțȟȠȞȡȘȤȖȖȞȓȎȘȠȜȞȎ[35]. ǼțȎțȎȕȐȎțȎȠȞȡȏȥȎȠȩȚȞȓȎȘȠȜȞȜȚ (The Chimney Reactor). ȋȠȜȠȚȓȠȜȒȝȜȒȜȏȓțȠȓȣțȖȘȓ HTCVD ȠȓȚ, ȥȠȜ ȫȠȜȐȓȞȠȖȘȎșȪțȎȭȘȜțȟȠȞȡȘȤȖȭȖȚȎȟȟȜȝȓȞȓțȜȟȚȜȔȓȠȜȟȡȧȓȟȠȐșȭȠȪ-

106 ǮȑȓȓȐ Ǽ.Ǯ., ǯȓșȭȓȐ Ǯ.dz., ǯȜșȠȜȐȓȤ ǻ.ǿ., ǸȖȟȓșȓȐ ǰ.ǿ., ǸȜțȎȘȜȐȎ Ǿ.ǰ. Ȗ ȒȞ.

ȟȭ ȘȞȡȝțȩȚȖ ȘșȎȟȠȓȞȎȚȖ Si. ǾȓȎȘȠȜȞȩ ȫȠȜȑȜ ȠȖȝȎ ȜȏȓȟȝȓȥȖȐȎȬȠ ȐȩȟȜȘȡȬ ȟȘȜȞȜȟȠȪ ȞȜȟȠȎ 15 50 ȚȘȚ/ȥȎȟ Ȗ țȖȕȘȡȬ ȘȜțȤȓțȠȞȎȤȖȬ ȝȞȖȚȓȟȓȗ 1013 ȟȚ 3 [36].

5.3.ǰȩȞȎȧȖȐȎțȖȓ ȘȞȖȟȠȎșșȜȐ

ȖțȎțȓȟȓțȖȓ ȕȎȧȖȠțȩȣ ȝȜȘȞȩȠȖȗ

Dzșȭ ȐȩȞȎȧȖȐȎțȖȭ 3C-SiC ȘȞȖȟȠȎșșȜȐ Ȗ țȎțȓȟȓțȖȭ ȕȎȧȖȠțȩȣ ȝȜȘȞȩȠȖȗ țȎ ȖȕȒȓșȖȭ Ȗȕ ȑȞȎȢȖȠȎ ȖȟȝȜșȪȕȡȓȠȟȭ ȜȒțȎ Ȗȕ ȞȎȕțȜȐȖȒțȜȟȠȓȗ CVD-ȚȓȠȜȒȎ. ǽȞȖ ȫȠȜȚ ȝȞȖȚȓțȭȓȠȟȭ, ȘȎȘ ȝȞȎȐȖșȜ, ȝȞȜȤȓȟȟ ȠȓȞȚȖȥȓȟȘȜȑȜ ȐȜȟȟȠȎțȜȐșȓțȖȭ ȚȓȠȖșȠȞȖȣșȜȞȟȖșȎțȎ Ȑ ȐȜȒȜȞȜȒȓ țȎ țȎȑȞȓȠȜȗ ȑȞȎȢȖȠȜȐȜȗ țȖȠȖ ȖșȖ ȖȕȒȓșȖȖ [37 41]. ȀȓȚȝȓȞȎȠȡȞȎ ȑȞȎȢȖȠȜȐȜȗ ȒȓȠȎșȖ ȭȐșȭȓȠȟȭ ȜȒțȖȚ Ȗȕ ȜȟțȜȐțȩȣ ȝȎȞȎȚȓȠȞȜȐ, ȜȝȞȓȒȓșȭȬȧȖȣȘȞȖȟȠȎșșȖȥȓȟȘȡȬȟȠȞȡȘȠȡȞȡ. ǰȠȓȚȝȓȞȎȠȡȞțȜȚȖțȠȓȞȐȎșȓ 900 1000°ǿȢȜȞȚȖȞȡȬȠȟȭȎȚȜȞȢțȩȓȝșȓțȘȖȘȎȞȏȖȒȎȘȞȓȚțȖȭ, Ȑ ȖțȠȓȞȐȎșȓȠȓȚȝȓȞȎȠȡȞ1000 1500°ǿȜȏȞȎȕȡȬȠȟȭȝȜșȖȘȞȖȟȠȎșșȖȥȓȟȘȖȓ ȟșȜȖ SiC Ȗ țȎȘȜțȓȤ, ȝȞȖ Ȁx1600 2000°ǿ ȝȞȜȖȟȣȜȒȖȠ ȕȎȞȜȔȒȓțȖȓ Ȗ ȞȜȟȠȚȜțȜȘȞȖȟȠȎșșȜȐ3C-SiC. ǸȞȜȚȓȠȓȚȝȓȞȎȠȡȞȩȝȜȒșȜȔȘȖ, ȟȘȜȞȜȟȠȪ ȜȟȎȔȒȓțȖȭ SiC ȜȝȞȓȒȓșȭȓȠȟȭ ȟȘȜȞȜȟȠȪȬ ȝȜȠȜȘȎ ȐȜȒȜȞȜȒȎ Ȗ ȘȜșȖȥȓȟȠȐȜȚ ȘȞȓȚțȖȗ- Ȗ ȡȑșȓȞȜȒȟȜȒȓȞȔȎȧȖȣ ȘȜȚȝȜțȓțȠȜȐ Ȑ ȑȎȕȜȐȜȚ ȝȜȠȜȘȓ. ǼȟțȜȐțȩȚȖ ȖȟȠȜȥțȖȘȎȚȖ ȝȜȟȠȡȝșȓțȖȭ ȝȞȖȚȓȟȓȗ ȭȐșȭȬȠȟȭ: ȚȓȠȖșȣșȜȞȟȖșȎț, ȐȜȒȜȞȜȒ, ȎȞȚȎȠȡȞȎȡȟȠȎțȜȐȘȖȖȜȘȞȡȔȎȬȧȎȭȟȞȓȒȎ. ǽȜȫȠȜȚȡ Ȓșȭ ȝȜșȡȥȓțȖȭ ȝȜȘȞȩȠȖȗ Ȗ ȘȞȖȟȠȎșșȜȐ ȝȜșȡȝȞȜȐȜȒțȖȘȜȐȜȗ ȥȖȟȠȜȠȩ ȝȞȜȐȜȒȖȠȟȭ ȜȥȖȟȠȘȎ ȘȜȚȝȜțȓțȠȜȐ ȞȓȎȘȤȖȖ Ȗ ȒȓȠȎșȓȗ ȎȞȚȎȠȡȞȩ. ǰ țȎȟȠȜȭȧȓȓ ȐȞȓȚȭ ȫȠȖȚ ȚȓȠȜȒȜȚ ȝȜșȡȥȎȬȠ ȘȞȖȟȠȎșșȩ n-ȠȖȝȎ 3ǿ-SiC ȟ ȘȜțȤȓțȠȞȎȤȖȓȗ țȓȟȘȜȚȝȓțȟȖȞȜȐȎțțȩȣ ȝȞȖȚȓȟȓȗ 3 5¸1016 ȟȚ 3, ȝȜȒȐȖȔțȜȟȠȪȬ ȫșȓȘȠȞȜțȜȐ100 250 ȟȚ2/ǰ¸ȟ. ǾȓȘȜȞȒțȜȓ ȕțȎȥȓțȖȓ ȝȜȒȐȖȔțȜȟȠȖ ȟȜȟȠȎȐșȭȓȠ ȐȓșȖȥȖțȡ ȒȜ1000 ȟȚ2/ǰ¸ȟ. ǽșȜȧȎȒȪ ȘȞȖȟȠȎșșȜȐ țȓ ȝȞȓȐȩȦȎȓȠ ȐȓșȖȥȖțȩ 20 ȚȚ2. ǸȞȖȟȠȎșșȩ 3C-SiC, ȝȜșȡȥȓțțȩȓȞȎȕșȜȔȓțȖȓȚȚȓȠȖșȠȞȖȣșȜȞȟȖșȎțȎȐȐȜȒȜȞȜȒȓ, ȖȚȓȬȠȓȟȠȓȟȠȐȓțțȡȬȜȑȞȎțȘȡ. ȂȜȞȚȎȘȞȖȟȠȎșșȜȐȕȎȐȖȟȖȠȜȠȡȟșȜȐȖȗ ȞȜȟȠȎ. ǮȏȟȜșȬȠțȜȓȏȜșȪȦȖțȟȠȐȜȘȞȖȟȠȎșșȜȐȚȜȔțȜȜȠțȓȟȠȖȘȜȒțȜȚȡ ȖȕȠȞȓȣȜȟțȜȐțȩȣȠȖȝȜȐ: ȝȞȖȕȚȎȠȖȥȓȟȘȜȗ ȢȜȞȚȩ, ȟȘȓșȓȠțȜȗȖȝșȎȟȠȖțȥȎȠȜȗ. ǸȞȖȟȠȎșșȩ ȝȓȞȐȜȑȜȠȖȝȎ ȜȏȩȥțȜ ȐȩȠȭțȡȠȩ ȐȒȜșȪ ȜȒțȜȑȜ țȎȝȞȎȐșȓțȖȭ Ȗ ȖȚȓȬȠ ȜȠ 6 ȒȜ 9 ȑȞȎțȓȗ ȝȟȓȐȒȜȝȞȖȕȚȩ. ǸȞȖȟȠȎșșȩ ȐȠȜȞȜȑȜȠȖȝȎȣȎȞȎȘȠȓȞȖȕȡȬȠȟȭ țȎșȖȥȖȓȚțȓȟȘȜșȪȘȖȣ ȒȐȡȣȑȞȎțțȩȣ ȐȣȜȒȭȧȖȣȡȑșȜȐ, ȠȜȓȟȠȪȏȜșȪȦȖȚȘȜșȖȥȓȟȠȐȜȚȒȐȜȗțȖȘȜȐȩȣ ȟȠȞȡȘȠȡȞ. ǻȎȘȜțȓȤ ȘȞȖȟȠȎșșȩ ȝșȎȟȠȖțȥȎȠȜȑȜ ȠȖȝȎ ȟȝșȬȧȓțȩ ȐȒȜșȪ ȜȒ-

țȜȗ Ȗȕ Ȝȟȓȗ Ȗ ȥȎȧȓ ȐȟȓȑȜ ȖȚȓȬȠ ȢȜȞȚȡ ȑȓȘȟȎȑȜțȎșȪțȩȣ ȝșȎȟȠȖțȜȘ. ǾȓțȠȑȓțȜȐȟȘȖȗ ȎțȎșȖȕ, ȑȜțȖȜȚȓȠȞȖȥȓȟȘȖȓ ȖȕȚȓȞȓțȖȭ Ȗ ȠȞȎȐșȓțȖȓ ȝȜȘȎȕȩȐȎȬȠ, ȥȠȜ ȠȜșȪȘȜ ȘȞȖȟȠȎșșȩ ȝșȎȟȠȖțȥȎȠȜȑȜ ȠȖȝȎ ȭȐșȭȬȠȟȭ ȚȜțȜȘȞȖȟȠȎșșȎȚȖ. ǸȞȖȟȠȎșșȩ ȝȞȖȕȚȎȠȖȥȓȟȘȜȑȜ ȠȖȝȎ ȭȐșȭȬȠȟȭ ȒȐȜȗțȖȘȎȚȖ, ȎȘȞȖȟȠȎșșȩȟȘȓșȓȠțȜȗȢȜȞȚȩ– ȟșȜȔțȩȚȖȒȐȜȗțȖȘȜȐȩȚȖ ȜȏȞȎȕȜȐȎțȖȭȚȖ. ǸȞȖȟȠȎșșȩ ȝșȎȟȠȖțȥȎȠȜȑȜ ȠȖȝȎ ȜȏșȎȒȎȬȠ ȟȓȘȠȜȞȖȎșȪțȩȚ ȟȠȞȜȓțȖȓȚ, ȝȖȞȎȚȖȒȩȞȜȟȠȎȟȜȟȓȒțȖȣ ȑȞȎțȓȗȚȜȑȡȠ ȕțȎȥȖȠȓșȪțȜ ȞȎȕșȖȥȎȠȪȟȭ ȝȜ ȫșȓȘȠȞȖȥȓȟȘȖȚ Ȗ ȜȝȠȖȥȓȟȘȖȚ ȟȐȜȗȟȠȐȎȚ [35 38, 40]. ȀȎȘ Ȓșȭ ȖȕȑȜȠȜȐșȓțȖȭ ȟȐȓȠȜȒȖȜȒȜȐ, țȓȜȏȣȜȒȖȚȜ ȖȟȝȜșȪȕȜȐȎȠȪ ȝȜȐȓȞȣțȜȟȠȪ ȠȜșȪȘȜ ȜȝȞȓȒȓșȓțțȩȣ ȝȖȞȎȚȖȒ ȞȜȟȠȎ ȘȞȖȟȠȎșșȜȐ [42]. ȋȠȜ ȜȑȞȎțȖȥȖȐȎȓȠ ȖȟȝȜșȪȕȜȐȎțȖȓ C-SiC Ȓșȭ ȖȕȑȜȠȜȐșȓțȖȭ ȝȜșȡȝȞȜȐȜȒțȖȘȜȐȩȣ ȝȞȖȏȜȞȜȐ.

ǺȓȠȜȒCVD ȝȜȕȐȜșȭȓȠȜȠțȜȟȖȠȓșȪțȜ șȓȑȘȜȝȜșȡȥȎȠȪȘȞȖȟȠȎșșȩ ȘȎȘn-, ȠȎȘȖȞ-ȠȖȝȎȝȞȜȐȜȒȖȚȜȟȠȖ. ǹȓȑȖȞȜȐȎțȖȓȎȕȜȠȜȚȝȞȜȖȕȐȜȒȖȠȟȭ șȖȏȜ ȐȐȓȒȓțȖȓȚ Ȑ ȝȜȠȜȘ ȐȜȒȜȞȜȒȎ N2 (ȘȜțȤȓțȠȞȎȤȖȭ ȫșȓȘȠȞȜțȜȐ ȒȜ1018 ȟȚ 3), șȖȏȜNH3 – ȒșȭȝȜșȡȥȓțȖȭȟȖșȪțȜșȓȑȖȞȜȐȎțțȩȣȟșȜȓȐ. DzșȭșȓȑȖȞȜȐȎțȖȭȎȘȤȓȝȠȜȞțȩȚȖȝȞȖȚȓȟȭȚȖȖȟȝȜșȪȕȡȬȠȟȭAl(C2H5)3, Al(CH3)3 ȖșȖ B2H6. DzȜȐȜșȪțȜ ȦȖȞȜȘȜ ȚȓȠȜȒ CVD ȖȟȝȜșȪȕȡȓȠȟȭ Ȓșȭ țȎțȓȟȓțȖȭ ȕȎȧȖȠțȩȣ SiC ȝȜȘȞȩȠȖȗ țȎ țȎȑȞȓȐȎȠȓșȖ Ȗȕ ȘȎȞȏȖȒȎ ȘȞȓȚțȖȭ [43] Ȗ ȠȓȣțȜșȜȑȖȥȓȟȘȡȬ ȑȞȎȢȖȠȜȐȡȬ ȜȟțȎȟȠȘȡ, Ȑ ȥȎȟȠțȜȟȠȖ, Ȓșȭ ȝȜșȡȝȞȜȐȜȒțȖȘȜȐȜȗ ȝȞȜȚȩȦșȓțțȜȟȠȖ. ȋȠȜ ȚȜȑȡȠ ȏȩȠȪ ȝȖȞȎȚȖȒȩ, ȠȞȡȏȩ, șȜȒȜȥȘȖ Ȗ ȒȞȡȑȖȓ ȜȏȨȓȘȠȩ ȞȎȕșȖȥțȜȗ ȢȜȞȚȩ. ǻȎ ȝȜȐȓȞȣțȜȟȠȪ ȖȕȒȓșȖȭ țȎțȜȟȭȠ ȝșȜȠțȩȗ ȟșȜȗ SiC ȠȜșȧȖțȜȗ ȜȠ 10 ȒȜ 500 ȚȘȚ. ǰ ȞȭȒȓ ȟșȡȥȎȓȐ ȜȟȎȔȒȓțțȩȗ ȟșȜȗ șȓȑȖȞȡȬȠ ȝȞȖȚȓȟȭȚȖ Ȓșȭ ȜȏȞȎȕȜȐȎțȖȭ ȠȜȘȜȝȞȜȐȜȒȭȧȓȗ ȝȜȐȓȞȣțȜȟȠȖ.

108 ǮȑȓȓȐ Ǽ.Ǯ., ǯȓșȭȓȐ Ǯ.dz., ǯȜșȠȜȐȓȤ ǻ.ǿ., ǸȖȟȓșȓȐ ǰ.ǿ., ǸȜțȎȘȜȐȎ Ǿ.ǰ. Ȗ ȒȞ.

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