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474 ǮȑȓȓȐ Ǽ.Ǯ., ǯȓșȭȓȐ Ǯ.dz., ǯȜșȠȜȐȓȤ ǻ.ǿ., ǸȖȟȓșȓȐ ǰ.ǿ., ǸȜțȎȘȜȐȎ Ǿ.ǰ. Ȗ ȒȞ.

ǾȖȟ. 4.1. ǸȜțȟȠȞȡȘȤȖȭ ȥȖȝȎ ȘȎȞȏȖȒȘȞȓȚțȖȓȐȜȑȜ ǹǽDz ȃ-ȒȖȎ- ȝȎȕȜțȎ [8]

ǽȓȞȐȎȭ ȘȎȞȏȖȒȘȞȓȚțȖȓȐȎȭ ȝȞȖȏȜȞțȎȭ ȟȠȞȡȘȠȡȞȎ, țȎ ȘȜȠȜȞȜȗ ȏȩșȎ ȝȜșȡȥȓțȎ ȑȓțȓȞȎȤȖȭ ǿǰȅ ȘȜșȓȏȎțȖȗ Ȑ ȃ ȒȖȎȝȎȕȜțȓ Ȑ ȖȚȝȡșȪȟțȜȚ ȞȓȔȖȚȓ ȝȞȖȐȓȒȓțȎ țȎ ȞȖȟ. 4.1, Ȏ ȞȓȕȡșȪȠȎȠȩ ȖȕȚȓȞȓțȖȗ ȝȎȞȎȚȓȠȞȜȐ ǹǽDz, ȖȕȑȜȠȜȐșȓțțȜȑȜ țȎ ȠȎȘȜȗ ȟȠȞȡȘȠȡȞȓ, ȝȞȖȐȓȒȓțȩ Ȑ [7] Ȗ ȠȎȏșȖȤȓ 4.1.

ǰ[10] ȘȎȞȏȖȒȘȞȓȚțȖȓȐȩȓȜȒțȜȝȞȜșȓȠțȩȓǹǽDzȏȩșȖȖȕȑȜȠȜȐșȓțȩ țȎȫȝȖȠȎȘȟȖȎșȪțȩȣp+-n-n+ ȟȠȞȡȘȠȡȞȎȣ4H-SiC, ȐȩȞȎȧȓțțȩȣȚȓȠȜȒȜȚ ȑȎȕȜȠȞȎțȟȝȜȞȠțȜȗȫȝȖȠȎȘȟȖȖȟȠȜșȧȖțȜȗn-ȜȏșȎȟȠȖ _2 ȚȘȚ, ȡȞȜȐțȓȚ șȓȑȖȞȜȐȎțȖȭ _1017 ȟȚ 3, ȠȜșȧȖțȜȗ Ȟ+ ȜȏșȎȟȠȖ _1 ȚȘȚ Ȗ ȡȞȜȐțȓȚ șȓȑȖȞȜȐȎțȖȭ8¸1018 ȟȚ 3, ȏȡȢȓȞțȩȚȝ+ ȟșȜȓȚȠȜșȧȖțȜȗ _1.5 ȚȘȚȖ ȡȞȜȐțȓȚ șȓȑȖȞȜȐȎțȖȭ 5¸1018 ȟȚ 3. ǽȜȒșȜȔȘȎ 4H-SiC ȝ+ ȠȖȝȎ ȖȚȓșȎ ȠȜșȧȖțȡ_375 ȚȘȚȟȡȒȓșȪțȩȚȟȜȝȞȜȠȖȐșȓțȖȓȚ0.015÷0.028 ǼȚ¸ȟȚ. ȀȎȘȖȓȟȠȞȡȘȠȡȞȩȜȟȐȜȓțȩȐȝȞȜȖȕȐȜȒȟȠȐȓȢȖȞȚȩCree ȖȐȩȝȡȟȘȎȬȠȟȭ ȝȞȜȚȩȦșȓțțȜ țȎ ȝșȎȟȠȖțȎȣ 4H-SiC ȠȖȝȎ W4NXD8C-S00 (selected micropipe density, production grade) [17].

ǹǽDzȏȩșȖȖȕȑȜȠȜȐșȓțȩȐȐȖȒȓȝȞȭȚȜȗȚȓȕȎ-ȟȠȞȡȘȠȡȞȩ(ȞȖȟ. 4.2.) ȟ ȜȚȖȥȓȟȘȖȚȖ ȘȜțȠȎȘȠȎȚȖ, ȖȚȓȬȧȖȚȖ ȡȒȓșȪțȜȓ ȘȜțȠȎȘȠțȜȓ ȟȜȝȞȜȠȖȐșȓțȖȓ Sc _3¸10 5 ǼȚ¸ȟȚ2 ȝȞȖ ȠȓȚȝȓȞȎȠȡȞȓ 186°ǿ, ȥȠȜ ȝȜ ȜȤȓțȘȎȚ Ǹ.ǰ. ǰȎȟȖșȓȐȟȘȜȑȜȏșȖȕȘȜȘȞȎȟȥȓȠțȜȗ ȐȓșȖȥȖțȓ Sc ȒșȭȘȎȞȏȖȒȘȞȓȚțȖȓȐȩȣ ǹǽDz [18].

DZȓțȓȞȎȤȖȭ ǿǰȅ ȘȜșȓȏȎțȖȗ Ȑ ȠȎȘȖȣ ǹǽDz ȏȩșȎ ȜȏțȎȞȡȔȓțȎ țȎ ȥȎȟȠȜȠȓ f=9.9 DZDZȤ Ȑ ȖȚȝȡșȪȟțȜȚ ȞȓȔȖȚȓ ȝȞȖ ȒșȖȠȓșȪțȜȟȠȖ ȖȚȝȡșȪȟȎ _40 țȟ, ȟȘȐȎȔțȜȟȠȖ 700. ǮȚȝșȖȠȡȒȎ ȖȚȝȡșȪȟțȜȑȜ ȠȜȘȎ ȏȩșȎ _0.3 Ǯ Ȗ ȟȜȜȠȐȓȠȟȠȐȜȐȎșȎ ȝȜȞȜȑȜȐȜȗ ȝșȜȠțȜȟȠȖ ȠȜȘȎ _6 ȘǮ/ȟȚ2, țȎȝȞȭȔȓțȖȓ șȎȐȖțțȜȑȜ ȝȞȜȏȜȭ ȝȞȖ ȘȜȚțȎȠțȜȗ ȠȓȚȝȓȞȎȠȡȞȓ ȟȜȜȠȐȓȠȟȠȐȜȐȎșȜ 297 ǰ. ǽȎȞȎȚȓȠȞȩ Ȗ ȣȎȞȎȘȠȓȞȖȟȠȖȘȖ ȠȎȘȖȣ ǹǽDz ȝȞȖ-

ǾȖȟ. 4.2. ǸȜțȟȠȞȡȘȤȖȭ ȥȖȝȎ ȘȎȞȏȖȒȘȞȓȚțȖȓȐȜȑȜ ǹǽDz [13]: 1, 8 – ȝșȓțȘȎ Au ȠȜșȧȖțȜȗ _1 ȚȘȚ; 2, 7 – ȜȚȖȥȓȟȘȖȓ ȘȜțȠȎȘȠȩ Ș p+-SiC Ȗ n+-SiC ȟȜȜȠȐȓȠȟȠȐȓțțȜ; 3 – ȟșȜȗ

4H-SiCp+-ȠȖȝȎȠȜșȧȖțȜȗ_1 ȚȘȚ, p+x8¸1018 ȟȚ 3; 4 – ȟșȜȗ 4H-SiC

n-ȠȖȝȎ, ȠȜșȧȖțȜȗ _2.0 ȚȘȚ, nx1.1¸1017 ȟȚ 3; 5 – ȟșȜȗ 4H-SiC

n+-ȠȖȝȎ ȠȜșȧȖțȜȗ _1.5 ȚȘȚ, n+x5¸1018 ȟȚ 3;6 –ȝȜȒșȜȔȘȎ4H-

SiC n-ȠȖȝȎ ȠȜșȧȖțȜȗ _375 ȚȘȚ,

Sx0.015÷0.028 ǼȚ¸ȟȚ

ȐȓȒȓțȩȠȎȘȔȓȐ ȠȎȏș. 4.1. DzȜȟȠȖȑțȡȠȎȭ ȐȫȘȟȝȓȞȖȚȓțȠȓȖȚȝȡșȪȟțȎȭ ǿǰȅ ȚȜȧțȜȟȠȪ ȏȩșȎ _300 ȚǰȠ. ǼȟȤȖșȜȑȞȎȚȚȩ ȖȚȝȡșȪȟȎ ȠȜȘȎ Ȗ ȐȩȣȜȒțȜȗ ǿǰȅ ȚȜȧțȜȟȠȖ ȝȜȘȎȕȎțȩ țȎ ȞȖȟ. 4.3.

ǼȒțȎȘȜȜȔȖȒȎȓȚȩȣȞȓȕȡșȪȠȎȠȜȐȝȜȡȐȓșȖȥȓțȖȬȥȎȟȠȜȠȩǿǰȅ ȑȓțȓȞȎȤȖȖȜȒțȜȝȞȜșȓȠțȩȣ 4H-SiC ǹǽDzȎȐȠȜȞȩ[10–13, 19] țȓȝȜșȡȥȖșȖ. ȅȎȟȠȜȠȎ ǿǰȅ ȑȓțȓȞȎȤȖȖ ȜȘȎȕȎșȎȟȪ ȕțȎȥȖȠȓșȪțȜ țȖȔȓ, ȥȓȚ ȫȠȜ ȟșȓȒȜȐȎșȜ Ȗȕ ȞȎȟȥȓȠȜȐ ȟ ȡȥȓȠȜȚ ȖȕȐȓȟȠțȩȣ șȖȠȓȞȎȠȡȞțȩȣ ȒȎțțȩȣ Ȝ țȎȟȩȧȓțȖȖ ȒȞȓȗȢȜȐȜȗ ȟȘȜȞȜȟȠȖ ȫșȓȘȠȞȜțȜȐ Ȑ SiC, țȜ ȣȜȞȜȦȜ ȟȜȜȠȐȓȠȟȠȐȜȐȎșȎ ȫȘȟȝȓȞȖȚȓțȠȎșȪțȩȚ ȞȓȕȡșȪȠȎȠȎȚ ȝȜ ȖȕȚȓȞȓțȖȬ ȒȞȓȗȢȜȐȜȗ ȟȘȜȞȜȟȠȖ ȫșȓȘȠȞȜțȜȐ Ȑ 4H-SiC, ȝȜșȡȥȓțțȩȚ ǰȎȟȖșȓȐȟȘȖȚ Ǹ.ǰ. ȟ ȟȜȎȐȠȜȞȎȚȖ Ȑ [20].

ǮȐȠȜȞȩ [14, 15] țȎȏșȬȒȎșȖ ǿǰȅ ȑȓțȓȞȎȤȖȬ Ȑ ȜȒțȜȝȞȜșȓȠțȩȣ ȘȎȞȏȖȒȘȞȓȚțȖȓȐȩȣ ǹǽDz Ȑ ȖȚȝȡșȪȟțȜȚ ȞȓȔȖȚȓ Ȑ ȃ-ȒȖȎȝȎȕȜțȓ

ǾȖȟ. 4.3.ǼȟȤȖșșȜȑȞȎȚȚȎȖȚȝȡșȪȟȎ ȠȜȘȎ ȥȓȞȓȕ 4H-SiC ǹǽDz (țȖȔțȖȗ șȡȥ), ȎȚȝșȖȠȡȒȎ ȖȚȝȡșȪȟȎ ȠȜȘȎ _0.35 Ǯ, ȒșȖȠȓșȪțȜȟȠȪ ȖȚȝȡșȪȟȎ 40 țǿ; ȜȑȖȏȎȬȧȎȭ ȖȚȝȡșȪȟȎ ǿǰȅ ȚȜȧțȜȟȠȖ (ȐȓȞȣțȖȗ șȡȥ) [10]

476 ǮȑȓȓȐ Ǽ.Ǯ., ǯȓșȭȓȐ Ǯ.dz., ǯȜșȠȜȐȓȤ ǻ.ǿ., ǸȖȟȓșȓȐ ǰ.ǿ., ǸȜțȎȘȜȐȎ Ǿ.ǰ. Ȗ ȒȞ.

ǾȖȟ. 4.4. ǸȜțȟȠȞȡȘȤȖȭȥȖȝȎȘȎȞ- ȏȖȒȘȞȓȚțȖȓȐȜȑȜǹǽDzX-ȒȖȎȝȎȕȜ- țȎ ȟ ȜȣȞȎțțȩȚȖ ȘȜșȪȤȎȚȖ [15]

(ȠȎȏș. 4.1.). ǸȜțȟȠȞȡȘȤȖȭ ȥȖȝȎǹǽDz, ȝȞȓȒșȜȔȓțțȎȭ Ȑ[14, 15] ȝȞȓȒȟȠȎȐșȓțȎțȎȞȖȟ. 4.4. dzȮȜȠșȖȥȖȓȚȜȠȝȞȓȒȩȒȡȧȖȣȞȎȕȞȎȏȜȠȜȘȥȖȝȜȐ ȘȎȞȏȖȒȘȞȓȚțȖȓȐȩȣ ǹǽDz ȭȐșȭȓȠȟȭ țȎșȖȥȖȓ ȜȣȞȎțțȜȑȜ ȘȜșȪȤȎ, ȟȢȜȞȚȖȞȜȐȎțțȜȑȜ ȖȜțțȩȚ șȓȑȖȞȜȐȎțȖȓȚ 4H-SiC ȐȎțȎȒȖȓȚ.

ǰ ȠȎȏș. 4.2. ȝȞȖȐȓȒȓțȩ țȜȞȚȎșȖȕȜȐȎțțȩȓ ȘȞȖȠȓȞȖȖ ȘȎȥȓȟȠȐȎ Ȓșȭ ȝȎȞȎȚȓȠȞȜȐ ǹǽDz ȖȕȑȜȠȜȐșȓțțȩȣ țȎ ȜȟțȜȐȓ Si, GaAs, 4H-SiC Ȗ 6H-SiC p+-n-n+ ȟȠȞȡȘȠȡȞ. Dzșȭ 4H-SiC ǹǽDz ȞȎȟȥȓȠ ȘȞȖȠȓȞȖȓȐ ȘȎȥȓȟȠȐȎ ȝȞȖȐȓȒȓț ȟ ȡȥȓȠȜȚ Vs = 2¸107 ȟȚ/ȟ Ȗ 7.7¸106 ȟȚ/ȟ (Ȑ ȟȘȜȏȘȎȣ), ȝȜȘȎȕȎȐȦȖȗ, ȥȠȜ Ȑ ȝȜȟșȓȒțȓȚ ȟșȡȥȎȓ ȘȞȖȠȓȞȖȗ ȘȎȥȓȟȠȐȎ ȏȜșȓȓ ȞȓȎșȖȟȠȖȥȓț. Ƕȕ ȠȎȏș. 4.2 ȐȖȒțȜ ȠȎȘȔȓ ȟȡȧȓȟȠȐȓțțȜȓ ȝȞȓȖȚȡȧȓȟȠȐȜ

ȀȎȏșȖȤȎ 4.2. ǻȜȞȚȎșȖȕȜȐȎțțȩȓ ȘȞȖȠȓȞȖȖ ȘȎȥȓȟȠȐȎ Ȓșȭ ȞȎȕșȖȥțȩȣ ȝȎȞȎȚȓȠȞȜȐ ǹǽDz [16] (ȘȞȖȠȓȞȖȖ ȘȎȥȓȟȠȐȎ Si ȒȖȜȒȜȐ ȝȞȖțȭȠȩ ȕȎ 1)

ǽȞȖȚȓȥȎțȖȓ: ȕȒȓȟȪ Dn – ȘȜȫȢȢȖȤȖȓțȠ ȒȖȢȢȡȕȖȖ ȫșȓȘȠȞȜțȜȐ

478 ǮȑȓȓȐ Ǽ.Ǯ., ǯȓșȭȓȐ Ǯ.dz., ǯȜșȠȜȐȓȤ ǻ.ǿ., ǸȖȟȓșȓȐ ǰ.ǿ., ǸȜțȎȘȜȐȎ Ǿ.ǰ. Ȗ ȒȞ.

ȘȎȞȏȖȒȘȞȓȚțȖȓȐȩȣǹǽDzȝȜȠȓȝșȜȐȜȚȡȝȞȓȒȓșȡȒșȭȚȎȘȟȖȚȎșȪțȜȗ ȚȜȧțȜȟȠȖ ȝȜ ȟȞȎȐțȓțȖȬ ȟ țȎȖȏȜșȓȓ ȖȕȡȥȓțțȩȚȖ Ȗ ȜȟȐȜȓțțȩȚȖ Ȑ ȝȞȜȖȕȐȜȒȟȠȐȓ Si Ȗ GaAs ǹǽDz.

ȀȎȘȖȚȜȏȞȎȕȜȚȜȝȩȠȞȎȕȞȎȏȜȠȘȖȖȖȟȟșȓȒȜȐȎțȖȭȜȒțȜȝȞȜșȓȠțȩȣ ȘȎȞȏȖȒȘȞȓȚțȖȓȐȩȣ ǹǽDz ȝȜȘȎȕȎș, ȥȠȜ Ȓșȭ ȜȝȠȖȚȖȕȎȤȖȖ ȝȎȞȎȚȓȠȞȜȐ ǹǽDz țȓȒȜȟȠȎȠȜȥțȜ ȖȚȓȬȧȖȣȟȭ ȒȎțțȩȣ Ȝ ȢȡțȒȎȚȓțȠȎșȪțȩȣ ȟȐȜȗȟȠȐȎȣ ȫȠȜȑȜ ȚȎȠȓȞȖȎșȎ, ȠȞȓȏȡȬȠȟȭ ȡȠȜȥțȓțȖȭ Ȝ ȝȎȞȎȚȓȠȞȎȣ ȡȒȎȞțȜȗ ȖȜțȖȕȎȤȖȖ Ȗ ȏȜșȓȓ ȠȜȥțȩȓ ȒȎțțȩȓ Ȝ ȒȞȓȗȢȜȐȜȗ ȟȘȜȞȜȟȠȖ țȎȟȩȧȓțȖȭȐțȎȖȏȜșȓȓ«ȝȞȜȒȐȖțȡȠȩȣ» ȝȜșȖȠȖȝȎȣ SiC ȒșȭȦȖȞȜȘȜȑȜ ȒȖȎȝȎȕȜțȎ ȠȓȚȝȓȞȎȠȡȞ. ǼȟȜȏȓțțȜ ȫȠȜ ȐȎȔțȜ Ȓșȭ ǹǽDz ȚȖȘȞȜȐȜșțȜȐȩȣ ȝȞȖȏȜȞȜȐ, ȞȎȏȜȠȎȬȧȖȣ Ȑ ȫȘȟȠȞȓȚȎșȪțȩȣ ȡȟșȜȐȖȭȣ.

4.2. ǺȖȘȞȜȐȜșțȜȐȩȓ p-i-n ȒȖȜȒȩ

ǰ ȝȜȟșȓȒțȓȓ ȒȓȟȭȠȖșȓȠȖȓ ȖțȠȓțȟȖȐțȜ ȞȎȕȐȖȐȎȬȠȟȭ ȖȟȟșȓȒȜȐȎțȖȭ Ȗ ȞȎȕȞȎȏȜȠȘȖ Ȑ ȜȏșȎȟȠȖ ȖȟȝȜșȪȕȜȐȎțȖȭ 4H-SiC Ȓșȭ ȟȜȕȒȎțȖȭ ȚȜȧțȩȣȐȩȟȜȘȜȠȓȚȝȓȞȎȠȡȞțȩȣȚȖȘȞȜȐȜșțȜȐȩȣp-i-n ȒȖȜȒȜȐ[21–24]. ǽȞȓȒȝȜȟȩșȘȎȚȖȘȫȠȜȚȡȭȐȖșȖȟȪȡȟȝȓȣȖȐȠȓȣțȜșȜȑȖȖȐȩȞȎȧȖȐȎțȖȭ ȝȜȒșȜȔȓȘ Ȗ ȫȝȖȠȎȘȟȖȎșȪțȩȣ ȟȠȞȡȘȠȡȞ 4H-SiC, Ȏ ȠȎȘȔȓ ȒȜȟȠȖȔȓțȖȭ ȐȠȓȣțȜșȜȑȖȖȟȜȕȒȎțȖȭȐȩȟȜȘȜȠȓȚȝȓȞȎȠȡȞțȩȣȜȚȖȥȓȟȘȖȣȘȜțȠȎȘȠȜȐ Ȗ ȞȎȕȞȎȏȜȠȘȓ ȐȩȟȜȘȜȠȓȚȝȓȞȎȠȡȞțȩȣ ȘȜȞȝȡȟȜȐ Ȓșȭ ȚȖȘȞȜȐȜșțȜȐȩȣ ȒȖȜȒȜȐ, ȥȠȜȜȘȎȕȎșȜȟȪȐȜȕȚȜȔțȩȚȝȞȖȜȏȨȓȒȖțȓțȖȖȡȟȖșȖȗțȓȟȘȜșȪȘȖȣȖȟȟșȓȒȜȐȎȠȓșȪȟȘȖȣȑȞȡȝȝ: ȐǾȜȟȟȖȖ(ȂȀǶȖȚ. Ǯ.Ȃ. ǶȜȢȢȓǾǮǻ, ǼǮǼ«ǿȐȓȠșȎțȎ-ȫșȓȘȠȞȜȝȞȖȏȜȞ, ǿ.-ǽȓȠȓȞȏȡȞȑ), ȁȘȞȎȖțȓ(DZȜȟȡȒȎȞȟȠȐȓțțȜȓ ȝȞȓȒȝȞȖȭȠȖȓ ǻǶǶ «ǼȞȖȜț», ǶȂǽ ȖȚ. ǰ.dz. ǹȎȦȘȎȞȮȐȎ ǻǮǻȁ,

ǸȖȓȐ), DZȞȓȤȖȖ (FORTH, Heraklion), ȂȞȎțȤȖȖ (IMEP, ENSERG, Grenoble) Ȗ ǿȆǮ (Cree) [25–35].

ȀȖȝȖȥțȎȭȟȠȞȡȘȠȡȞȎ4H-SiC p-i-n ȒȖȜȒȎȞȎȕȞȎȏȜȠȎțțȎȭȐ[27, 28], ȝȞȖȐȓȒȓțȎ țȎ ȞȖȟ. 4.5Ȏ, Ȏ ȥȖȝ ȠȎȘȜȑȜ ȒȖȜȒȎ ȐȚȜțȠȖȞȜȐȎțțȩȗ Ȑ ȐȩȟȜȘȜȠȓȚȝȓȞȎȠȡȞțȩȗ ȘȜȞȝȡȟ – țȎ ȞȖȟ. 4.5ȏ. ǾȎȟȟȚȜȠȞȖȚ ȜȟțȜȐțȩȓ ȝȎȞȎȚȓȠȞȩ ȠȎȘȖȣ p-i-n ȒȖȜȒȜȐ.

ǻȎȞȖȟ. 4.6ȝȞȓȒȟȠȎȐșȓțȩȖȕȚȓȞȓțțȩȓȐȒȖȎȝȎȕȜțȓȠȓȚȝȓȞȎȠȡȞ 20 700°ǿȐȜșȪȠȎȚȝȓȞțȩȓȣȎȞȎȘȠȓȞȖȟȠȖȘȖ(ǰǮȃ) ȘȜȞȝȡȟȖȞȜȐȎțțȜȑȜ4H-SiC p-i-n ȒȖȜȒȎȟȝȎȞȎȚȓȠȞȎȚȖp-i-n ȟȠȞȡȘȠȡȞȩ, ȝȜȘȎȕȎțțȩȚȖțȎ ȞȖȟ. 4.5Ȏ. ǰȖȒțȜ, ȥȠȜ ȐȓșȖȥȖțȎ ȜȏȞȎȠțȜȑȜ ȠȜȘȎ ȝȞȖ țȎȝȞȭȔȓțȖȖ 300 ǰ Ȗ ȠȓȚȝȓȞȎȠȡȞȎȣ 600 (700)°ǿ ȟȜȜȠȐȓȠȟȠȐȡȓȠ 10 (180) ȚȘǮ. ǽȜȟȘȜșȪȘȡ Ȓșȭ ȚȖȘȞȜȐȜșțȜȐȩȣp-i-n ȒȖȜȒȜȐȏșȜȘȖȞȡȬȧȓȓțȎȝȞȭȔȓțȖȓȜȝȞȓȒȓșȭȓȠȟȭ ȝȞȖȠȜȘȎȣȚȓțȪȦȓ10 ȚȘǮȎȐȠȜȞȩ[28] ȝȞȖȦșȖȘ ȐȩȐȜȒȡȜȠȜȚ, ȥȠȜȒșȭ

ǾȖȟ. 4.5. ǸȜțȟȠȞȡȘȤȖȭ 4H-SiC p-i-n ȒȖȜȒȎ. ǾȎȕȚȓȞȩ Ȑ ȚȘȚ (Ȏ); ȥȖȝ p-i-n ȒȖȜȒȎ, ȐȚȜțȠȖȞȜȐȎțțȩȗ Ȑ ȐȩȟȜȘȜȠȓȚȝȓȞȎȠȡȞțȩȗ ȘȜȞȝȡȟ: 1 – ȥȖȝ; 2 – ȜȟțȜȐȎțȖȓ ȘȜȞȝȡȟȎ; 3 – ȞȡȏȖțȜȐȎȭ ȐȠȡșȘȎ; 4 – ȘȞȩȦȘȎ; 5 – ȕȜșȜȠȎȭȘȜțȠȎȘȠțȎȭ șȓțȠȎ; 6 – ȡȝșȜȠțȖȠȓșȪ. ǾȎȕȚȓȞȩ Ȑ ȚȘȚ (ȏ) [27]

ȒȎțțȜȗ ȘȜțȟȠȞȡȘȤȖȖ ȥȖȝȎ ȠȓȚȝȓȞȎȠȡȞȎ 600°ǿ ȭȐșȭȓȠȟȭ ȝȞȓȒȓșȪțȜȗ, ȝȞȖ ȘȜȠȜȞȜȗ ȟȜȣȞȎțȭȓȠȟȭ ȞȎȏȜȠȜȟȝȜȟȜȏțȜȟȠȪ p-i-n ȒȖȜȒȎ.

ǿȜȝȞȜȠȖȐșȓțȖȓp-i-n ȒȖȜȒȎRs ȝȞȖȝȞȭȚȜȚȠȜȘȓ40 ȚǮ, ȖȕȚȓȞȓțțȜȓ țȎ ȥȎȟȠȜȠȓ 1 ǺDZȤ Ȑ ȖțȠȓȞȐȎșȓ ȠȓȚȝȓȞȎȠȡȞ 0 700°ǿ ȝȞȖȐȓȒȓțȜ țȎ ȞȖȟ. 4.7. ǰȖȒțȜ, ȥȠȜ ȕȎȐȖȟȖȚȜȟȠȪ Rs = f(T) țȓȚȜțȜȠȜțțȎȭ.

ǶȕȐȓȟȠțȜ, ȥȠȜȐȓșȖȥȖțȎRs ȜȝȞȓȒȓșȭȓȠȟȭȟȡȚȚȜȗȟȜȝȞȜȠȖȐșȓțȖȗ ȏȎȕȩ Ri, Rp+ , Rn+ ȜȏșȎȟȠȓȗ, ȟȜȝȞȜȠȖȐșȓțȖȓȚ ȘȜțȠȎȘȠȜȐ ȖȟșȜȔțȩȚȖ ȝȞȜȤȓȟȟȎȚȖ ȞȓȘȜȚȏȖțȎȤȖȖ Ȗ ȒȖȢȢȡȕȖȖ țȓȜȟțȜȐțȩȣ țȜȟȖȠȓșȓȗ Ȑ ȏȎȕȓ ȒȖȜȒȎ, Ȟ+, ȝ+ ȜȏșȎȟȠȭȣ Ȗ ȘȜțȠȎȘȠȎȣ, Ȏ ȠȎȘȔȓ ȐșȖȭțȖȓȚ ȑșȡȏȜȘȖȣ ȡȞȜȐțȓȗ [36]. ǻȎȝȞȖȚȓȞ, ȟȜȝȞȜȠȖȐșȓțȖȓ ȏȎȕȩ p-i-n ȒȖȜȒȎ Ri ȚȜȔțȜ ȞȎȟȟȥȖȠȎȠȪ ȝȜ ȢȜȞȚȡșȓ [37]

ȑȒȓk – ȝȜȟȠȜȭțțȎȭǯȜșȪȤȚȎțȎ, T – ȠȓȚȝȓȞȎȠȡȞȎ, q – ȕȎȞȭȒȫșȓȘȠȞȜțȎ, Da – ȎȚȏȖȝȜșȭȞțȩȗȘȜȫȢȢȖȤȖȓțȠȒȖȢȢȡȕȖȖ, U – ȐȞȓȚȭȔȖȕțȖțȓȜȟțȜȐțȩȣțȜȟȖȠȓșȓȗ, I – ȝȞȭȚȜȗȠȜȘ. ǰȓșȖȥȖțȎDa =2kT/q¸µnµp/µn +µp, ȑȒȓ µn, µp – ȝȜȒȐȖȔțȜȟȠȖ ȫșȓȘȠȞȜțȜȐ Ȗ ȒȩȞȜȘ ȟȜȜȠȐȓȠȟȠȐȓțțȜ.