Источники / SiCtechnologyPropertiesApplication

56 ǮȑȓȓȐ Ǽ.Ǯ., ǯȓșȭȓȐ Ǯ.dz., ǯȜșȠȜȐȓȤ ǻ.ǿ., ǸȖȟȓșȓȐ ǰ.ǿ., ǸȜțȎȘȜȐȎ Ǿ.ǰ. Ȗ ȒȞ.

ȚȜȚȓțȠ ȐȞȓȚȓțȖ, ȝȞȖ ȘȜȠȜȞȜȚ ȡȟȠȞȎțȭȓȠȟȭ ȝȓȞȓȜȣșȎȔȒȓțȖȓ ȝȎȞȎ ȐȟșȓȒȟȠȐȖȓ ȐȩȞȎȐțȖȐȎțȖȭ ȠȓȚȝȓȞȎȠȡȞ ȟȡȏșȖȚȎȤȖȖ Ȗ ȝȜȐȓȞȣțȜȟȠȖ ȞȜȟȠȎ ǰ ȫȠȜȚ ȟșȡȥȎȓ ȠȜșȧȖțȎ ȘȞȖȟȠȎșșȎ ȒȜȟȠȖȑȎȓȠ ȟȐȜȓȑȜ ȝȞȓȒȓșȪțȜȑȜ ȕțȎȥȓțȖȭ SM !M¸%TG/ %TH Ȗ ȝȞȜȤȓȟȟ ȞȜȟȠȎ ȝȞȓȘȞȎȧȎȓȠȟȭ.

ǶȕȚȓțȓțȖȭTV ȖTC ȠȎȘȔȓȚȜȑȡȠȝȞȖȐȓȟȠȖȘȜȏȞȎȕȜȐȎțȖȬȒȓȢȓȘȠȜȐ Ȑ ȘȞȖȟȠȎșșȓ, ȒȎȔȓ ȓȟșȖ ȟȘȜȞȜȟȠȪ ȞȜȟȠȎ țȎȣȜȒȖȠȟȭ Ȑ ȝȞȖȓȚșȓȚȜȚ ȒȖȎȝȎȕȜțȓ. ǶȕșȖȦțȓȓ ȟțȖȔȓțȖȓ ȠȓȚȝȓȞȎȠȡȞȩ TV 2600 K ȐȩȕȜȐȓȠ ȟȚȓȧȓțȖȓ ȟȠȓȣȖȜȚȓȠȞȖȖ ȟȡȏșȖȚȎȤȖȖ Ȑ țȎȝȞȎȐșȓțȖȖ ȥȞȓȕȚȓȞțȜȑȜ ȡȐȓșȖȥȓțȖȭ ȎȠȜȚȎȞțȜȑȜ ȘȞȓȚțȖȭ Ȑ ȝȎȞȓ. dzȟșȖ ȝȞȖ ȐȩȟȜȘȜȗ ȠȓȚȝȓȞȎȠȡȞȓ TV, ȠȓȚȝȓȞȎȠȡȞȎȘȞȖȟȠȎșșȎTC ȜȘȎȔȓȠȟȭȒȜȟȠȎȠȜȥțȜțȖȕȘȜȗ, ȖȕȏȩȠȜȥțȩȗȘȞȓȚțȖȗȏȡȒȓȠȘȜțȒȓțȟȖȞȜȐȎȠȪȟȭȖȕȝȎȞȎȜȏȞȎȕȡȭȔȖȒȘȡȬȢȎȕȡȘȞȓȚțȖȭțȎȢȞȜțȠȓȞȜȟȠȎ[18]. ȋȠȜ ȝȞȖȐȜȒȖȠȘȜȏȞȎȕȜȐȎțȖȬ ȐȠȜȞȜȢȎȕțȩȣȐȘșȬȥȓțȖȗȐȐȖȒȓȝȡȕȩȞȓȗ(«ȜȠȞȖȤȎȠȓșȪțȩȣ» ȘȞȖȟȠȎșșȜȐ), ȚȖȘȞȜȝȎȗȝ, ȝȞȖȟȡȠȟȠȐȖȓȘȜȠȜȞȩȣȚȜȔȓȠȖțȖȤȖȖȞȜȐȎȠȪȜȏȞȎȕȜȐȎțȖȓ ȐȠȜȞȖȥțȩȣ ȒȓȢȓȘȠȜȐ Ȑ ȜȏȨȮȚȓ ȞȎȟȠȡȧȓȑȜ ȘȞȖȟȠȎșșȎ [19, 20].

ǸȎȘ ȐȖȒțȜ Ȗȕ ȞȖȟ. 2.6ȏ ȝȞȖ ȐȩȏȞȎțțȜȗ ȖȟȣȜȒțȜȗ ȟȠȓȝȓțȖ ȝȓȞȓȜȣșȎȔȒȓțȖȭ %TG = 90 K ȟȘȜȞȜȟȠȪ ȞȜȟȠȎ, țȎȏșȬȒȎȓȚȎȭ țȎ ȟȎȚȜȗ ȞȎțțȓȗ ȟȠȎȒȖȖ ȝȞȜȤȓȟȟȎ, ȟȡȧȓȟȠȐȓțțȜ ȝȞȓȐȜȟȣȜȒȖȠ ȜȝȠȖȚȎșȪțȡȬ ȐȓșȖȥȖțȡ. ǰȜȕțȖȘȎȬȧȖȓ Ȑ ȫȠȜ ȐȞȓȚȭ ȒȓȢȓȘȠȩ ȏȡȒȡȠ țȎȟșȓȒȜȐȎȠȪȟȭ țȎ ȝȜȟșȓȒȡȬȧȖȣ ȫȠȎȝȎȣ ȞȜȟȠȎ, Ȗ ȜȝȞȓȒȓșȭȠȪ ȖȠȜȑȜȐȜȓ ȘȎȥȓȟȠȐȜ ȟȠȞȡȘȠȡȞȩ ȘȞȖȟȠȎșșȎ. ȀȎȘȖȚ ȜȏȞȎȕȜȚ, Ȑȟȓ ȝȎȞȎȚȓȠȞȩ, ȜȠ ȘȜȠȜȞȩȣ ȕȎȐȖȟȖȠ ȞȓȔȖȚ ȞȜȟȠȎ ȘȞȖȟȠȎșșȎ Ȑ ȝȓȥȖ, ȒȜșȔțȩ ȖȕțȎȥȎșȪțȜ ȏȩȠȪ ȜȝȠȖȚȎșȪțȩȚȖ. ǿșȓȒȡȓȠ ȠȎȘȔȓ ȜȠȚȓȠȖȠȪ, ȥȠȜ ȘȜȚȝȜțȓțȠȎ ȠȓȝșȜȐȜȑȜ ȝȜȠȜȘȎ QV Ȗ ȟȘȞȩȠȎȭ ȠȓȝșȜȠȎ ȘȞȖȟȠȎșșȖȕȎȤȖȖ L, ȕȎȒȎȬȧȖȓ ȠȓȚȝ ȞȜȟȠȎ, ȝȜ ȚȓȞȓ ȝȞȖȏșȖȔȓțȖȭ ȠȓȚȝȓȞȎȠȡȞȩ ȝȜȐȓȞȣțȜȟȠȖ ȘȞȖȟȠȎșșȖȕȎȤȖȖ Ș ȟȐȜȓȚȡ ȝȞȓȒȓșȪțȜȚȡ ȕțȎȥȓțȖȬ ȝȓȞȓȟȠȎȬȠ ȐșȖȭȠȪ țȎ ȘȎȥȓȟȠȐȜȘȞȖȟȠȎșșȎ, ȝȜȟȘȜșȪȘȡȖȕ-ȕȎȡȏȩȐȎțȖȭȝȓȞȓȜȣșȎȔȒȓțȖȭ ȝȎȞȎȝȞȓȘȞȎȧȎȓȠȟȭ ȖȟȎȚȞȜȟȠ. ǰȚȓȟȠȓȟȠȓȚțȎȫȠȜȗȜȘȜțȥȎȠȓșȪțȜȗ ȟȠȎȒȖȖ, ȘȜȚȝȜțȓțȠȎ ȠȓȝșȜȐȜȑȜ ȝȜȠȜȘȎ QW, ȟȜȜȏȧȎȓȚȎȭ ȘȞȖȟȠȎșșȡ ȜȠ ȞȎȕȜȑȞȓȠȩȣ ȟȠȓțȜȘ ȠȖȑșȭ, ȒȎȔȓ ȝȜȟșȓ ȜȟȠȎțȜȐȘȖ ȞȜȟȠȎ ȜȟȠȎȓȠȟȭ ȜȠșȖȥțȜȗ ȜȠ țȡșȭ Ȗ ȒȜșȔțȎ ȜȠȐȜȒȖȠȪȟȭ ȥȓȞȓȕ ȜȏȨȮȚ ȘȞȖȟȠȎșșȎ.

ǽȜȒȜȑȞȓȐ ȝȜȐȓȞȣțȜȟȠȖ ȞȜȟȠȎ ȫȠȖȚ ȝȜȠȜȘȜȚ ȠȓȝșȎ ȟȡȧȓȟȠȐȓțțȜ ȡȚȓțȪȦȎȓȠ ȚȎȘȟȖȚȎșȪțȡȬ ȠȜșȧȖțȡ ȘȞȖȟȠȎșșȎ SM, ȘȜȠȜȞȎȭ ȚȜȔȓȠ ȏȩȠȪ ȝȜșȡȥȓțȎ ȝȞȖ ȒȎțțȜȚ ȞȓȔȖȚȓ ȞȜȟȠȎ. ǸȞȜȚȓ ȫȠȜȑȜ țȓȜȏȣȜȒȖȚȜȟȠȪ ȞȎȟȟȓȭțȖȭ ȖȕȏȩȠȜȥțȜȑȜ ȘȜșȖȥȓȟȠȐȎ ȠȓȝșȎ QW ȐȩȕȩȐȎȓȠ ȡȐȓșȖȥȓțȖȓ ȑȞȎȒȖȓțȠȜȐ ȠȓȚȝȓȞȎȠȡȞȩ, ȥȠȜ ȝȞȖȐȜȒȖȠ Ș ȐȜȕțȖȘțȜȐȓțȖȬ ȠȓȞȚȜțȎȝȞȭȔȓțȖȗ, ȞȓșȎȘȟȎȤȖȭȘȜȠȜȞȩȣȭȐșȭȓȠȟȭȜȒțȜȗȖȕȑșȎȐțȩȣ ȝȞȖȥȖțȜȏȞȎȕȜȐȎțȖȭȒȖȟșȜȘȎȤȖȗȖȖȕȚȓțȓțȖȭȝȜșȖȠȖȝȎȞȎȟȠȡȧȓȑȜ

ȘȞȖȟȠȎșșȎ. ǿșȓȒȜȐȎȠȓșȪțȜ, ȖȕȏȩȠȜȥțȎȭ ȐȓșȖȥȖțȎ QW ȒȜșȔțȎ ȞȎȟȟȚȎȠȞȖȐȎȠȪȟȭȘȎȘ«ȝȎȞȎȕȖȠțȎȭ» ȠȓȝșȜȠȎ, ȘȜȠȜȞȡȬȟșȓȒȡȓȠȚȖțȖȚȖȕȖȞȜȐȎȠȪ ȜȝȠȖȚȖȕȎȤȖȓȗ ȘȜțȟȠȞȡȘȤȖȖ ȝȞȖ ȞȎȕȞȎȏȜȠȘȓ ȝȓȥȖ.

ȀȎȘȖȚȜȏȞȎȕȜȚ, ȎțȎșȖȠȖȥȓȟȘȜȓȖȟȟșȓȒȜȐȎțȖȓȚȜȒȓșȪțȜȗȕȎȒȎȥȖ ȝȜȘȎȕȎșȜ, ȥȠȜ ȞȜȟȠ ȘȞȖȟȠȎșșȜȐ ȘȎȞȏȖȒȎ ȘȞȓȚțȖȭ Ȗȕ ȝȎȞȜȑȎȕȜȐȜȗ ȢȎȕȩȭȐșȭȓȠȟȭȟȎȚȜȟȜȑșȎȟȜȐȎțțȩȚȝȞȜȤȓȟȟȜȚ, ȝȞȜȠȓȘȎțȖȓȘȜȠȜȞȜȑȜ ȜȝȞȓȒȓșȭȓȠȟȭ ȝȜȠȜȘȜȚ ȣȖȚȖȥȓȟȘȖȣ ȘȜȚȝȜțȓțȠ țȎ ȝȜȐȓȞȣțȜȟȠȪ ȞȎȕȒȓșȎ ȢȎȕ Ȗ ȜȠȐȜȒȜȚ ȟȘȞȩȠȜȗ ȠȓȝșȜȠȩ ȢȎȕȜȐȜȑȜ ȝȞȓȐȞȎȧȓțȖȭ ȥȓȞȓȕ ȜȏȨȓȚ ȘȞȖȟȠȎșșȎ. ǯȡȒȡȥȖ ȟȐȭȕȎțțȜȗ ȟ ȖțȠȓțȟȖȐțȜȟȠȪȬ ȠȓȝșȜȝȓȞȓȒȎȥȖ ȥȓȞȓȕ ȘȞȖȟȠȎșș ȠȓȚȝȓȞȎȠȡȞȎ ȝȜȐȓȞȣțȜȟȠȖ ȘȞȖȟȠȎșșȖȕȎȤȖȖ ȕȎȐȖȟȖȠ ȜȠ ȠȜșȧȖțȩ ȘȞȖȟȠȎșșȎ Ȗ, ȟ ȒȞȡȑȜȗ ȟȠȜȞȜțȩ, ȜȝȞȓȒȓșȭȭ ȟȠȓȝȓțȪ ȝȓȞȓȜȣșȎȔȒȓțȖȭ, ȓȒȖțȟȠȐȓțțȩȚ ȜȏȞȎȕȜȚ ȐșȖȭȓȠ țȎ ȒȜȟȠȎȐȘȡ ȣȖȚȖȥȓȟȘȖȣ ȘȜȚȝȜțȓțȠ ȥȓȞȓȕ ȘȎȚȓȞȡ ȘȢȞȜțȠȡ ȞȜȟȠȎ. ǰȫȠȜȚ Ȗ ȕȎȘșȬȥȎȓȠȟȭ ȟȡȧțȜȟȠȪ ȟȎȚȜȟȜȑșȎȟȜȐȎțțȜȟȠȖ ȝȞȜȤȓȟȟȎ ȞȜȟȠȎ SiC Ȗȕ ȝȎȞȜȑȎȕȜȐȜȗ ȢȎȕȩ.

58 ǮȑȓȓȐ Ǽ.Ǯ., ǯȓșȭȓȐ Ǯ.dz., ǯȜșȠȜȐȓȤ ǻ.ǿ., ǸȖȟȓșȓȐ ǰ.ǿ., ǸȜțȎȘȜȐȎ Ǿ.ǰ. Ȗ ȒȞ.

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DZșȎȐȎ 3 ǿȜȝȡȠȟȠȐȡȬȧȖȓȝȞȜȤȓȟȟȩ, ȜȝȞȓȒȓșȭȬȧȖȓ

ȡȟșȜȐȖȭȞȜȟȠȎȘȎȞȏȖȒȎȘȞȓȚțȖȭ

3.1. ǴȖȒȘȎȭ ȢȎȕȎ ȘȞȓȚțȖȭ țȎ ȢȞȜțȠȓ ȘȞȖȟȠȎșșȖȕȎȤȖȖ

ȃȜȠȭȐȜȕȚȜȔțȜȟȠȪ ȜȏȞȎȕȜȐȎțȖȭ ȔȖȒȘȜȗȢȎȕȩ ȘȞȓȚțȖȭȝȞȖȞȜȟȠȓ SiC ȖȕȝȎȞȜȐȜȗȢȎȕȩȝȞȓȒȝȜșȎȑȎșȎȟȪȞȎțțȓȓ>1@, ȜȒțȎȘȜȝȜșȡȥȖȠȪ ȝȞȭȚȩȓ ȒȜȘȎȕȎȠȓșȪȟȠȐȎ Ȝ țȎșȖȥȖȖ ȟȘȜțȒȓțȟȖȞȜȐȎțțȜȑȜ ȘȞȓȚțȖȭ țȎ ȝȜȐȓȞȣțȜȟȠȖ ȘȞȖȟȠȎșșȖȕȎȤȖȖ ȐȜ ȐȞȓȚȭ ȞȜȟȠȎ ȒȜșȑȜȓ ȐȞȓȚȭ țȓ ȡȒȎȐȎșȜȟȪ. ǰȚȓȟȠȓ ȟ ȠȓȚ ȠȜȥțȜ ȡȟȠȎțȜȐȖȠȪ ȠȓȝșȜȐȩȓ ȡȟșȜȐȖȭ Ȑ ȭȥȓȗȘȓȞȜȟȠȎ, ȝȞȖȐȜȒȭȧȖȓȘȜȏȞȎȕȜȐȎțȖȬȔȖȒȘȜȗȢȎȕȩȘȞȓȚțȖȭ, ȝȞȓȒȟȠȎȐșȭșȜȟȪ ȜȥȓțȪȐȎȔțȩȚ, ȠȎȘȘȎȘȟȜȏȞȎȕȜȐȎțȖȓȚȐȘșȬȥȓțȖȗ ȐȠȜȞȜȗ ȢȎȕȩ ȘȞȓȚțȖȭ ȟȐȭȕȩȐȎșȜȟȪ ȐȜȕțȖȘțȜȐȓțȖȓ ȚȖȘȞȜȝȎȗȝȜȐ Ȗ ȝșȎțȎȞțȩȣ ȒȓȢȓȘȠȜȐ Ȑ ȟȠȞȡȘȠȡȞȓ ȘȞȖȟȠȎșșȜȐ SiC.

ȋȘȟȝȓȞȖȚȓțȠȎșȪțȜȓ ȝȜȒȠȐȓȞȔȒȓțȖȓ Ȗ ȠȓȞȚȜȒȖțȎȚȖȥȓȟȘȜȓ ȜȏȜȟțȜȐȎțȖȓȟȡȧȓȟȠȐȜȐȎțȖȭȔȖȒȘȜȗȢȎȕȩȘȞȓȚțȖȭțȎȢȞȜțȠȓȘȞȖȟȠȎșșȖȕȎȤȖȖȝȞȖȞȜȟȠȓSiC ȖȕȝȎȞȜȐȜȗȢȎȕȩȐȒȖȎȝȎȕȜțȓȠȓȚȝȓȞȎȠȡȞ 1500 3150 K ȏȩșȜ ȝȜșȡȥȓțȜ Ȑ ȞȎȏȜȠȓ [2].

ǸȎȘȡȔȓȜȠȚȓȥȎșȜȟȪ,ȭȥȓȗȘȎ ȞȜȟȠȎ ȘȎȞȏȖȒȎ ȘȞȓȚțȖȭ Ȗȕ ȝȎȞȜȐȜȗ ȢȎȕȩ ȟȜȟȠȜȖȠ Ȗȕ ȠȞȓȣ ȜȏșȎȟȠȓȗ: ȖȟȠȜȥțȖȘ

ȟȦȖȣȠȜȗ ȘȎȞȏȖȒȎ ȘȞȓȚțȖȭ, ȞȎȟȠȡȧȖȗ ȘȞȖȟȠȎșș Ȗ ȜȏșȎȟȠȪ ȚȎȟȟȜȝȓȞȓțȜȟȎ ȚȓȔȒȡ ȖȟȠȜȥțȖȘȜȚ Ȗ ȘȞȖȟȠȎșșȜȚ (ȟȚ. ȞȖȟ. 3.1). ǶȟȠȜȥțȖȘ

ȟȦȖȣȠȜȗSiC (SiC – ȖȟȠȜȥțȖȘ)

ȞȎȟȝȜșȜȔȓț țȎ Ȓțȓ ȭȥȓȗȘȖ

ȞȜȟȠȎ Ȗ ȝȜȒȒȓȞȔȖȐȎȓȠȟȭ ȝȞȖ ȠȓȚȝȓȞȎȠȡȞȓ ȟȡȏșȖȚȎȤȖȖ TV. ǾȎȕțȖȤȎ ȠȓȚȝȓȞȎȠȡȞ ȚȓȔȒȡ ȖȟȝȎȞȖȠȓșȓȚ Ȗ ȝȜȐȓȞȣțȜȟȠȪȬ ȘȞȖȟȠȎșșȖȕȎȤȖȖ %TV =(TV TS) ȜȏȓȟȝȓȥȖȐȎȓȠțȓȜȏȣȜȒȖȚȡȬȒșȭȞȜȟȠȎȟȠȓȝȓțȪȝȓȞȓȜȣșȎȔȒȓțȖȭ. dzȟșȖȞȎȕțȖȤȎȠȓȚȝȓȞȎȠȡȞȭȐșȭȓȠȟȭȒȜȟȠȎȠȜȥțȜȏȜșȪȦȜȗ, ȒșȭȠȜȑȜȥȠȜȏȩȞȎȐțȜȐȓȟțȜȓȒȎȐșȓțȖȓȎȠȜȚȎȞțȜȑȜȘȞȓȚțȖȭȐ SiC ȝȎȞȓ PSi(TV) ȜȘȎȕȎșȜȟȪȏȜșȪȦȓȒȎȐșȓțȖȭțȎȟȩȧȓțȖȭ PSiSat (TS ), ȠȜȐȜȕțȖȘȎȓȠ ȘȜțȒȓțȟȎȤȖȭ ȔȖȒȘȜȗ ȢȎȕȩ. ȀȎȘȖȚ ȜȏȞȎȕȜȚ, Ȓșȭ ȜȏȞȎȕȜȐȎțȖȭ ȔȖȒȘȜȗ ȢȎȕȩ ȘȞȓȚțȖȭ țȓȜȏȣȜȒȖȚȜ, ȥȠȜȏȩ ȞȎȕțȖȤȎ ȠȓȚȝȓȞȎȠȡȞ %TV ȝȞȓȐȩȦȎșȎ țȓȘȜȠȜȞȜȓ ȘȞȖȠȖȥȓȟȘȜȓ ȕțȎȥȓțȖȓ ȝȞȖ ȘȜȠȜȞȜȚ,

PSi (TV ) = pSatSi (TS ) . ȋȠȎ ȘȞȖȠȖȥȓȟȘȎȭ ȞȎȕțȖȤȎ ȠȓȚȝȓȞȎȠȡȞ ȚȜȔȓȠ

ȏȩȠȪ ȜȝȞȓȒȓșȓțȎ, ȓȟșȖ țȎȗȠȖ ȝȎȞȤȖȎșȪțȜȓ ȒȎȐșȓțȖȓ ȘȞȓȚțȖȭ PSi(TV) Ȗ ȝȎȞȤȖȎșȪțȜȓ ȒȎȐșȓțȖȓ țȎȟȩȧȓțȖȭ PSiSat (TS ) ȝȞȖ ȟȜȜȠ-

ȐȓȠȟȠȐȡȬȧȖȣ ȠȓȚȝȓȞȎȠȡȞȎȣ, ȖȟȝȜșȪȕȡȭ ȡȞȎȐțȓțȖȓ ǰȎț-DZȜȢȢȎ.

ǻȎȗȒȓțțȎȭ ȕȎȐȖȟȖȚȜȟȠȪ ȜȠȠȓȚȝȓȞȎȠȡȞȩ PSiSat (T ) ȖPSi(T) ȝȜȘȎȕȎțȎ țȎ ȞȖȟ. 3.2 (ȘȞȖȐȩȓ 1 Ȗ 2). ǸȎȘ ȐȖȒțȜ Ȗȕ ȘȞȖȐȩȣ ȔȖȒȘȎȭ ȢȎȕȎ ȘȞȓȚțȖȭ țȓ ȜȏȞȎȕȡȓȠȟȭ, ȘȜȑȒȎ ȒȎȐșȓțȖȭ ȘȞȓȚțȖȭ Ȑ ȝȎȞȓ PSi Ȗ ȒȎȐșȓ-

țȖȓțȎȟȩȧȓțȖȭ PSiSat ȟȜȜȠȐȓȠȟȠȐȡȬȠȜȒțȜȗȖȠȜȗȔȓȠȓȚȝȓȞȎȠȡȞȓȟȡȏșȖȚȎȤȖȖ PSi (TB ) < PSiSat (TB ) (ȠȜȥȘȖA ȖB). DzȎȐșȓțȖȭȡȞȎȐțȖȐȎȬȠȟȭ

PSi (TB ) = PSiSat (TD ) ȠȜșȪȘȜ, ȘȜȑȒȎȠȓȚȝȓȞȎȠȡȞȎȝȜȒșȜȔȘȖȡȚȓțȪȦȎȓȠȟȭ ȒȜ ȘȞȖȠȖȥȓȟȘȜȗ ȠȓȚȝȓȞȎȠȡȞȩ (ȠȜȥȘȎ D). ǴȖȒȘȎȭ ȢȎȕȎ ȘȞȓȚțȖȭ țȎȢȞȜțȠȓȘȞȖȟȠȎșșȖȕȎȤȖȖȝȜȭȐșȭȓȠȟȭȝȞȖȝȎȞȤȖȎșȪțȜȚȒȎȐșȓțȖȖ ȘȞȓȚțȖȭȐȝȎȞȓȏȜșȪȦȓȚȒȎȐșȓțȖȭțȎȟȩȧȓțȖȭ PSi (TV ) > PSiSat (TS ), ȝȞȖȡȟșȜȐȖȖȒȎșȪțȓȗȦȓȑȜȟțȖȔȓțȖȖȠȓȚȝȓȞȎȠȡȞȩȝȜȒșȜȔȘȖ. ǸȞȖȠȖȥȓȟȘȎȭȞȎȕțȜȟȠȪ ȠȓȚȝȓȞȎȠȡȞ %Tǿ=(TV TS) ȕȎȐȖȟȖȠȜȠȠȓȚȝȓȞȎȠȡȞȩ ȟȡȏșȖȚȎȤȖȖ, ȜȒțȎȘȜ, ȘȎȘ ȐȖȒțȜ Ȗȕ ȞȖȟȡțȘȎ (ȘȞȖȐȎȭ 3), ȫȠȎ ȞȎȕțȜȟȠȪ

ǾȖȟ. 3.2. ǵȎȐȖȟȖȚȜȟȠȪ ȒȎȐșȓțȖȭ ȘȞȓȚțȖȭ ȜȠ ȠȓȚȝȓȞȎȠȡȞȩ ȟȡȏșȖ-

ȚȎȤȖȖ: 1 – PSiSat (T ) – ȒȎȐșȓțȖȓ

țȎȟȩȧȓțȖȭSi; 2 – PSi(T) – ȝȎȞȤȖȎșȪțȜȓȒȎȐșȓțȖȓSi;3 –%Tǿ(TV) – ȘȞȖȠȖȥȓȟȘȎȭ ȞȎȕțȜȟȠȪ ȠȓȚȝȓȞȎȠȡȞȩ «ȖȟȝȎȞȖȠȓșȪ–ȝȜȒșȜȔȘȎ» țȓȜȏȣȜȒȖȚȎȭ Ȓșȭ ȘȜțȒȓțȟȎȤȖȖ ȔȖȒȘȜȗ ȢȎȕȩ ȘȞȓȚțȖȭ [2]

62 ǮȑȓȓȐ Ǽ.Ǯ., ǯȓșȭȓȐ Ǯ.dz., ǯȜșȠȜȐȓȤ ǻ.ǿ., ǸȖȟȓșȓȐ ǰ.ǿ., ǸȜțȎȘȜȐȎ Ǿ.ǰ. Ȗ ȒȞ.

Ȑ ȣȎȞȎȘȠȓȞțȜȚ Ȓșȭ ȞȜȟȠȎ SiC ȒȖȎȝȎȕȜțȓ ȠȓȚȝȓȞȎȠȡȞ 2300 2600 K ȝȞȎȘȠȖȥȓȟȘȖ ȝȜȟȠȜȭțțȎȭ. ǻȎȝȞȖȚȓȞ, ȝȞȖ ȠȓȚȝȓȞȎȠȡȞȓ ȟȡȏșȖȚȎȤȖȖ 2300 K ȜȔȖȒȎȓȚȎȭ ȞȎȕțȜȟȠȪ ȠȓȚȝȓȞȎȠȡȞȩ %Tǿ=161 K.

ǿȞȎȐțȓțȖȓ ȝȎȞȤȖȎșȪțȜȑȜ ȒȎȐșȓțȖȭ ȘȞȓȚțȖȭ Ȑ ȟȖȟȠȓȚȎȣ SiC-Si Ȗ SiC-C ȝȞȖȐȓȒȓțțȜȓ Ȑ [3, 4] ȟ ȒȎȐșȓțȖȓȚ țȎȟȩȧȓțȖȭ ȕȎȠȎȏȡșȖȞȜȐȎțțȜȚ Ȑ [4, 5] ȠȎȘȔȓ ȡȘȎȕȩȐȎȓȠ țȎ ȐȜȕȚȜȔțȜȟȠȪ ȜȏȞȎȕȜȐȎțȖȭ ȔȖȒȘȜȗ ȢȎȕȩ ȝȞȖ ȟȠȎțȒȎȞȠțȜȚ ȝȞȜȤȓȟȟȓ ȞȜȟȠȎ Ȑ ȜȏȓȖȣ ȟȖȟȠȓȚȎȣ. ǼȒțȎȘȜ ȘȜțȒȓțȟȎȤȖȭ ȘȞȓȚțȖȭ Ȑ ȟȖȟȠȓȚȓ SiC-Si ȏȜșȓȓ ȐȓȞȜȭȠțȎ, ȠȎȘ ȘȎȘ ȝȞȖ ȜȒȖțȎȘȜȐȩȣ ȠȓȚȝȓȞȎȠȡȞȎȣ ȟȡȏșȖȚȎȤȖȖ ȝȎȞȤȖȎșȪțȜȓ ȒȎȐșȓțȖȓ ȘȞȓȚțȖȭ Ȑ ȟȖȟȠȓȚȓ SiC-Si ȏȜșȓȓ ȥȓȚ țȎ ȝȜȞȭȒȜȘ ȝȞȓȐȜȟȣȜȒȖȠ ȒȎȐșȓțȖȓ ȘȞȓȚțȖȭ Ȑ ȟȖȟȠȓȚȓ SiC-C.

3.2. ȋȘȟȝȓȞȖȚȓțȠȎșȪțȎȭ ȝȞȜȐȓȞȘȎ ȡȟșȜȐȖȗ ȘȜțȒȓțȟȎȤȖȖ ȔȖȒȘȜȑȜ ȘȞȓȚțȖȭ

ȋȘȟȝȓȞȖȚȓțȠȎșȪțȎȭȝȞȜȐȓȞȘȎȞȎȟȥȓȠȜȐȝȞȜȐȜȒȖșȎȟȪȐ[2] ȟ ȝȜȚȜȧȪȬ ȟȝȓȤȖȎșȪțȜ ȞȎȕȞȎȏȜȠȎțțȜȗ Ȓșȭ ȫȠȜȗ ȤȓșȖ ȫșȓȘȠȞȜțțȜ-șȡȥȓȐȜȗ ȡȟȠȎțȜȐȘȖ(ȞȖȟ. 3.3). ǼȣșȎȔȒȎȓȚȎȭȐȜȒȜȗȐȎȘȡȡȚțȎȭȘȎȚȓȞȎȡȟȠȎțȜȐȘȖ, ȖȕȑȜȠȜȐșȓțțȎȭ Ȗȕ țȓȞȔȎȐȓȬȧȓȗ ȟȠȎșȖ, ȜȠȘȎȥȖȐȎșȎȟȪ ȒȜ ȒȎȐșȓțȖȭ 10 6 ȀȜȞȞ. ȋșȓȘȠȞȜțțȜ-șȡȥȓȐȜȗȡȕȓșȟȜȟȠȜȭșȖȕȝȞȭȚȜțȎȘȎșȪțȜȑȜ ȐȜșȪȢȞȎȚȜȐȜȑȜȘȎȠȜȒȎ, ȝȜȕȐȜșȭȬȧȓȑȜȝȜșȡȥȖȠȪȠȜȘȫȚȖȟȟȖȖ0.2 0.4 Ǯ

ȖȑȞȎȢȖȠȜȐȜȑȜ ȚȜțȠȎȔțȜȑȜ ȟȠȜșȖȘȎ, ȘȜȠȜȞȩȗ ȜȒțȜȐȞȓȚȓțțȜ ȐȩȝȜșțȭș ȞȜșȪ ȎțȜȒȎ. ȋșȓȘȠȞȜțțȎȭ ȏȜȚȏȎȞȒȖȞȜȐȘȎ țȖȔțȓȗ ȝȜȐȓȞȣțȜȟȠȖ ȟȠȜșȖȘȎȝȞȖȡȟȘȜȞȭȬȧȓȚțȎȝȞȭȔȓțȖȖ5.0 ȘǰȜȏȓȟȝȓȥȖȐȎșȎȏȩȟȠȞȩȗ

ȖȞȎȐțȜȚȓȞțȩȗțȎȑȞȓȐȟȠȜșȖȘȎȒȜȠȓȚȝȓȞȎȠȡȞȩ2300 K. ȀȓȚȝȓȞȎȠȡȞȎ ȖȕȚȓȞȭșȎȟȪȜȝȠȖȥȓȟȘȖȚȝȖȞȜȚȓȠȞȜȚȟȠȜȥțȜȟȠȪȬ±1% ȝȜȐȟȓȗȝșȜȧȎȒȖ ȟȠȜșȖȘȎ, ȑȜȞȖȕȜțȠȎșȪțȜȓ ȝȓȞȓȚȓȧȓțȖȓ ȘȜȠȜȞȜȑȜ ȜȏȓȟȝȓȥȖȐȎșȜȟȪ șȖțȓȗțȩȚȚȎțȖȝȡșȭȠȜȞȜȚ. ǸȎșȖȏȞȜȐȘȎȝȖȞȜȚȓȠȞȎȜȟȡȧȓȟȠȐșȭșȎȟȪ ȝȜ ȠȜȥȘȎȚ ȝșȎȐșȓțȖȭ ȥȖȟȠȩȣ ȚȓȠȎșșȜȐ (ȚȓȒȖ, țȖȘȓșȭ Ȗ ȝșȎȠȖțȩ).

ǻȎ ȟȠȜșȖȘȓ ȚȜțȠȖȞȜȐȎșȖȟȪ ȒȐȎ ȝȞȭȚȜȡȑȜșȪțȩȣ ȜȏȞȎȕȤȎ SiC ȟ ȞȎȕȚȓȞȎȚȖ 7×16 Ȗ 12×25 ȚȚ2, ȐȩȞȓȕȎțțȩȓ Ȗȕ SiC ȝșȎȟȠȖțȩ ȒȖȎȚȓȠȞȜȚ 50 ȚȚ Ȗ ȠȜșȧȖțȜȗ 724 ȚȘȚ. ǽșȎȟȠȖțȎ ȝȜșȖȞȜȐȎșȎȟȪ ȟ ȜȒțȜȗ ȟȠȜȞȜțȩ, ȖȠȜȑȜȐȎȭȒȜȐȜȒȘȎȘȜȠȜȞȜȗȜȏȓȟȝȓȥȖȐȎșȎȟȪȎșȚȎȕțȜȗȝȎȟȠȜȗ ȟ ȞȎȕȚȓȞȜȚ ȕȓȞțȎ _1 ȚȘȚ. ǽȓȞȓȒ ȝȜȟȠȎțȜȐȘȜȗ Ȑ ȘȎȚȓȞȡ ȜȏȞȎȕȤȩ ȜȥȖȧȎșȖȟȪ Ȑ ȘȖȝȭȧȓȚ ȠȞȖȣșȜȞȫȠȖșȓțȓ Ȑ ȠȓȥȓțȖȓ 10 ȚȖțȡȠ Ȗ ȕȎȠȓȚ 5 ȚȖțȡȠ Ȑ ȡșȪȠȞȎȕȐȡȘȜȐȜȗ ȐȎțțȓ ȟ ȚȓȠȎțȜșȜȚ. ǻȎ ȟȠȜșȖȘȓ ȘȎȚȓȞȩ ȝșȎȟȠȖțȩ ȡȟȠȎțȎȐșȖȐȎșȖȟȪ «ȟȓțȒȐȖȥ-ȚȓȠȜȒȜȚ»: ȚȓțȪȦȖȗ ȜȏȞȎȕȓȤ ȞȎȕȚȓȧȎșȟȭ țȎȒ ȏȜșȪȦȖȚ, ȝȜșȖȞȜȐȎțțȜȗ ȟȠȜȞȜțȜȗ ȒȞȡȑ ȝȞȜȠȖȐ

ǾȖȟ. 3.3. ǿȣȓȚȎ ȫȘȟȝȓȞȖȚȓțȠȎșȪțȜȗ ȫșȓȘȠȞȜțțȜ-șȡȥȓȐȜȗ ȡȟȠȎțȜȐȘȖ [2]

ȒȞȡȑȎ. ǰȓȞȣțȖȗȜȏȞȎȕȓȤȟșȡȔȖșȐȘȎȥȓȟȠȐȓȝȜȒșȜȔȘȖ, ȐȠȜ ȐȞȓȚȭȘȎȘ țȖȔțȖȗ, ȞȎȟȝȜșȜȔȓțțȩȗ țȓȝȜȟȞȓȒȟȠȐȓțțȜ țȎ ȑȞȎȢȖȠȜȐȜȚ ȟȠȜșȖȘȓ, ȟșȡȔȖș ȖȟȝȎȞȖȠȓșȓȚ. ǺȓȔȒȡ ȜȏȞȎȕȤȎȚȖ ȟȠȎȐȖșȜȟȪ ȠȜțȘȜȓ ȑȞȎȢȖȠȜȐȜȓȘȜșȪȤȜȠȜșȧȖțȜȗ_0,25 ȚȚ, ȘȜȠȜȞȜȓȟȜȕȒȎȐȎșȜȚȓȔȒȡȜȏȞȎȕȤȎȚȖ țȓȜȏȣȜȒȖȚȩȗ ȕȎȕȜȞ. ȀȎȘȎȭ ȘȜțȢȖȑȡȞȎȤȖȭ ȝȜȕȐȜșȭșȎ ȜȥȓțȪ ȝȞȜȟȠȜ ȖȕȚȓȞȭȠȪȒșȭȟȞȎȐțȓțȖȭȠȓȚȝȓȞȎȠȡȞȡȝȜȒșȜȔȘȖȖȖȟȠȜȥțȖȘȎțȓȏȜșȪȦȖȚ ȑȜȞȖȕȜțȠȎșȪțȩȚ ȝȓȞȓȚȓȧȓțȖȓȚ ȑȞȎȢȖȠȜȐȜȑȜ ȟȠȜșȖȘȎ.

ǯȩșȜ ȝȞȜȐȓȒȓțȜ ȒȐȎ ȫȘȟȝȓȞȖȚȓțȠȎ. ǰ ȝȓȞȐȜȚ ȫȘȟȝȓȞȖȚȓțȠȓ, ȜȏȓȟȝȓȥȖȐȎȭȒȜȟȠȎȠȜȥțȡȬ ȞȎȕțȖȤȡȠȓȚȝȓȞȎȠȡȞȚȓȔȒȡȖȟȝȎȞȖȠȓșȓȚ Ȗ ȝȜȒșȜȔȘȜȗ %T = (TV TS) «ȟȓțȒȐȖȥ-ȟȠȞȡȘȠȡȞȎ» ȠȓȞȚȖȥȓȟȘȖ țȓ ȖȕȜșȖȞȜȐȎșȎȟȪ. ǾȎȕțȜȟȠȪ ȠȓȚȝȓȞȎȠȡȞ, ȖȕȚȓȞȓțțȎȭ ȝȞȖ ȫȠȖȣ ȡȟșȜȐȖȭȣ, ȜȘȎȕȎșȎȟȪ 191Ǹ (TV = 2066 K Ȗ TS = 1875 K). ȋȘȟȝȜțȖȞȜȐȎțȖȓ ȫșȓȘȠȞȜțțȜȑȜ șȡȥȎ țȎ ȟȠȜșȖȘ ȝȞȜȒȜșȔȎșȜȟȪ Ȑ ȠȓȥȓțȖȓ 20 ȚȖțȡȠ. ǰȞȓȚȭ ȜȣșȎȔȒȓțȖȭ ȝȜȒșȜȔȘȖ ȒȜ ȠȓȚȝȓȞȎȠȡȞȩ ȘȞȖȟȠȎșșȖȕȎȤȖȖ ȘȞȓȚțȖȭ1687 ǸȕȎțȖȚȎșȜ16 ȟȓȘȡțȒ, ȥȓȚȡȟȜȜȠȐȓȠȟȠȐȜȐȎșȎȟȘȜȞȜȟȠȪ ȜȣșȎȔȒȓțȖȭ ȝȜȒșȜȔȘȖ aC _12 K/ȟ.

64 ǮȑȓȓȐ Ǽ.Ǯ., ǯȓșȭȓȐ Ǯ.dz., ǯȜșȠȜȐȓȤ ǻ.ǿ., ǸȖȟȓșȓȐ ǰ.ǿ., ǸȜțȎȘȜȐȎ Ǿ.ǰ. Ȗ ȒȞ.

ǰȜ ȐȠȜȞȜȚ ȫȘȟȝȓȞȖȚȓțȠȓ ȟ ȝȜȚȜȧȪȬ ȠȓȝșȜȐȜȑȜ ȫȘȞȎțȎ Ȑ ȐȖȒȓ ȑȞȎȢȖȠȜȐȜȑȜȤȖșȖțȒȞȎ, ȘȜȠȜȞȩȗȡȟȠȎțȎȐșȖȐȎșȟȭțȎȟȠȜșȖȘȓȐȜȘȞȡȑ «ȟȓțȒȐȖȥȟȠȞȡȘȠȡȞȩ», ȞȎȕțȖȤȎȠȓȚȝȓȞȎȠȡȞ%T ȡȚȓțȪȦȎșȎȟȪ. ǵȎ ȟȥȓȠ ȟȡȧȓȟȠȐȓțțȜȑȜȡȐȓșȖȥȓțȖȭȠȓȚȝȓȞȎȠȡȞȩȝȜȒșȜȔȘȖTS = 1988 K ȝȞȖ ȠȓȝșȜȐȜȗ ȖȕȜșȭȤȖȖ ȞȎȕțȖȤȎ ȠȓȚȝȓȞȎȠȡȞ ȖȟȠȜȥțȖȘ – ȝȜȒșȜȔȘȎ ȡȚȓțȪȦȖșȎȟȪȒȜ%T= 71 K, ȐȠȜȐȞȓȚȭȘȎȘȠȓȚȝȓȞȎȠȡȞȎȖȟȝȎȞȖȠȓșȭ ȝȜȥȠȖ țȓ ȖȕȚȓțȖșȎȟȪ TV = 2059 K. ǽȞȜȒȜșȔȖȠȓșȪțȜȟȠȪ ȫȘȟȝȜțȖȞȜȐȎțȖȭ ȏȩșȎ 20 ȚȖțȡȠ, Ȏ ȐȞȓȚȭ ȜȣșȎȔȒȓțȖȭ ȝȜȒșȜȔȘȖ ȜȠ ȠȓȚȝȓȞȎȠȡȞȩ 1988 K ȒȜ 1687 K _24 ȟȓȘȡțȒȩ, ȥȠȜ ȒȎȓȠ ȠȎȘȡȬ Ȕȓ ȟȘȜȞȜȟȠȪ ȜȣșȎȔȒȓțȖȭ ȟȠȞȡȘȠȡȞȩ aC _12 K/ȟ, ȘȎȘ Ȗ Ȑ ȝȓȞȐȜȚ ȟșȡȥȎȓ.

3.3. ǼȏȟȡȔȒȓțȖȓ ȞȓȕȡșȪȠȎȠȜȐ ȫȘȟȝȓȞȖȚȓțȠȎ

ǾȓȕȡșȪȠȎȠȩ, ȖșșȬȟȠȞȖȞȡȬȧȖȓȚȜȞȢȜșȜȑȖȬȝȜȐȓȞȣțȜȟȠȖȝȜȒșȜȔȘȖȝȜȟșȓȝȓȞȐȜȑȜȫȘȟȝȓȞȖȚȓțȠȎ, ȝȞȓȒȟȠȎȐșȓțȩțȎȞȖȟ. 3.4. ǻȎ ȞȖȟ. 3.4Ȏ ȐȖȒțȩ ȕȎȘȞȖȟȠȎșșȖȕȜȐȎțțȩȓ ȘȎȝșȖ ȘȞȓȚțȖȭ, ȣȎȜȠȖȥȓȟȘȖ ȞȎȟȝȞȓȒȓșȓțțȩȓ ȝȜ Ȑȟȓȗ ȝȜȐȓȞȣțȜȟȠȖ ȘȜțȒȓțȟȎȤȖȖ. ǯȜșȪȦȖȓ ȘȎȝșȖ țȎ ȞȖȟ. 3.4ȏȟȐȖȒȓȠȓșȪȟȠȐȡȬȠ ȜȠȜȚ, ȥȠȜ țȎșȖȥȖȓ ȒȓȢȓȘȠȜȐ ȟȡȧȓȟȠȐȓțțȜ ȐșȖȭȓȠ țȎ șȜȘȎșȪțȩȓ ȡȟșȜȐȖȭ ȘȜțȒȓțȟȎȤȖȖ Ȗȕ ȝȎȞȜȑȎȕȜȐȜȗ ȢȎȕȩ țȎ ȝȜȐȓȞȣțȜȟȠȪ. ǽȞȖȥȖțȡ ȫȠȜȑȜ ȚȜȔțȜ ȜȏȨȭȟțȖȠȪ ȝȞȖȟȡȠȟȠȐȖȓȚ ȚȓȣȎțȖȥȓȟȘȖȣ țȎȝȞȭȔȓțȖȗ Ȗ Ȗȣ ȐșȖȭțȖȓȚ țȎ ȫțȓȞȑȖȬ ȝȜȐȓȞȣțȜȟȠțȩȣ ȎȠȜȚȜȐ, Ȑ ȞȓȕȡșȪȠȎȠȓ ȥȓȑȜ ȖȕȚȓțȭȓȠȟȭ ȟȚȎȥȖȐȎȓȚȜȟȠȪ ȝȜȐȓȞȣțȜȟȠȖ Ȗ ȟȠȓȝȓțȪ ȝȓȞȓȟȩȧȓțȖȭ ȝȎȞȎ Ȑ ȜȘȞȓȟȠțȜȟȠȖ ȒȓȢȓȘȠȜȐ [6].

ǾȓțȠȑȓțȜȢșȡȜȞȓȟȤȓțȠțȩȗȟȝȓȘȠȞȜȒțȜȗȖȕȕȎȘȞȖȟȠȎșșȖȕȜȐȎțțȩȣ ȘȎȝȓșȪ, ȝȜșȡȥȓțțȩȗEDAX ȚȓȠȜȒȜȚ(Energy-Dispersive Analysis of X- Rays (EDAX)), ȝȞȓȒȟȠȎȐșȓțțȎȞȖȟ. 3.5. ǿȝȓȘȠȞȜȑȞȎȚȚȎȝȜȒȠȐȓȞȔȒȎȓȠ, ȥȠȜȘȎȝșȭȒȓȗȟȠȐȖȠȓșȪțȜȭȐșȭȓȠȟȭȕȎȘȞȖȟȠȎșșȖȕȜȐȎțțȩȚȘȞȓȚțȖȓȚ

ȟ ȜȠțȜȟȖȠȓșȪțȜ ȚȎșȩȚ ȘȜșȖȥȓȟȠȐȜȚ ȡȑșȓȞȜȒȎ Ȗ ȔȓșȓȕȎ Ȑ ȐȖȒȓ ȝȞȖȚȓȟȖ.

ȁȑșȓȞȜȒ ȚȜȔȓȠ ȝȜȝȎȟȠȪ Ȑ ȘȞȓȚțȖȗ Ȗȕ ȒȞȡȑȖȣ, ȟȜȒȓȞȔȎȧȖȣ ȡȑșȓȞȜȒ ȘȜȚȝȜțȓțȠ ȝȎȞȎ ȖșȖ ȕȎ ȟȥȓȠ ȒȖȢȢȡȕȖȖ Ȗȕ ȑȞȎȢȖȠȜȐȜȑȜ ȜȟțȜȐȎțȖȭ. ǿșȓȒȩȔȓșȓȕȎȐȘȎȝșȓȚȜȑșȖ ȠȎȘȔȓȝȜȭȐȖȠȪȟȭȖȕȑȞȎȢȖȠȜȐȜȑȜ ȜȟțȜȐȎțȖȭ ȟȐȭȕȎțțȜȑȜ

ǾȖȟ. 3.5. EDAX ȟȝȓȘȠȞ ȕȎȘȞȖȟȠȎșșȖȕȜ- ȟ ȚȓȠȎșșȖȥȓȟȘȖȚȖ ȫșȓȚȓț- ȐȎțțȜȗ Si ȘȎȝșȖ [2] ȠȎȚȖ ȫșȓȘȠȞȜțțȜ-șȡȥȓȐȜȗ

ȟȖȟȠȓȚȩ.

ǻȎȞȖȟ. 3.6 ȝȞȓȒȟȠȎȐșȓțȩ ȞȎȕșȖȥțȩȓ ȜȏșȎȟȠȖȝȜȐȓȞȣțȜȟȠȖ ȝȜȒșȜȔȘȖ, ȝȜșȡȥȓțțȜȗ ȝȞȖ ȠȓȞȚȖȥȓȟȘȜȗ ȖȕȜșȭȤȖȖ «ȟȓțȒȐȖȥ-ȟȠȞȡȘȠȡ- Ȟȩ». ǽȞȖȚȓțȓțȖȓ ȐȜ ȐȠȜȞȜȚ ȫȘȟȝȓȞȖȚȓțȠȓ ȠȓȞȚȖȥȓȟȘȜȗ ȖȕȜșȭȤȖȖ «ȟȓțȒȐȖȥ-ȟȠȞȡȘȠȡȞȩ» ȝȜȕȐȜșȖșȜ ȡȟȠȞȎțȖȠȪ ȘȜțȒȓțȟȎȤȖȬ ȘȞȓȚțȖȭ ȕȎ ȟȥȓȠȟȡȧȓȟȠȐȓțțȜȑȜȡȚȓțȪȦȓțȖȭȞȎȕțȖȤȩȠȓȚȝȓȞȎȠȡȞ%T ȚȓȔȒȡ ȖȟȠȜȥțȖȘȜȚ Ȗ ȝȜȒșȜȔȘȜȗ.

ȋȘȟȝȓȞȖȚȓțȠȎșȪțȩȓȞȓȕȡșȪȠȎȠȩȟȜȑșȎȟȡȬȠȟȭȟȜȤȓțȘȎȚȖ, ȐȩȝȜșțȓțțȩȚȖ Ȑ ȝȞȓȒȩȒȡȧȓȚ ȞȎȕȒȓșȓ. ǿȜȑșȎȟțȜ ȝȓȞȐȜȚȡ ȫȘȟȝȓȞȖȚȓțȠȡ ȝȞȖȠȓȚȝȓȞȎȠȡȞȓȟȡȏșȖȚȎȤȖȖTV =2066 K ȞȎȕțȖȤȎȠȓȚȝȓȞȎȠȡȞȖȟȝȎ-

66 ǮȑȓȓȐ Ǽ.Ǯ., ǯȓșȭȓȐ Ǯ.dz., ǯȜșȠȜȐȓȤ ǻ.ǿ., ǸȖȟȓșȓȐ ǰ.ǿ., ǸȜțȎȘȜȐȎ Ǿ.ǰ. Ȗ ȒȞ.

ȞȖȠȓșȪ–ȝȜȒșȜȔȘȎȞȎȐțȎ%T= 191 K. ǾȎȟȥȓȠțȜȓȕțȎȥȓțȖȓȘȞȖȠȖȥȓȟȘȜȗȞȎȕțȖȤȩȠȓȚȝȓȞȎȠȡȞȝȞȖȠȓȚȝȓȞȎȠȡȞȓȟȡȏșȖȚȎȤȖȖTV = 2066 K ȞȎȐțȜ %T= 174.7 K. ȀȎȘȖȚ ȜȏȞȎȕȜȚ, ȫȘȟȝȓȞȖȚȓțȠȎșȪțȜȓ ȕțȎȥȓțȖȓ ȞȎȕțȖȤȩ ȠȓȚȝȓȞȎȠȡȞȩ %T= 191 K ȜȝȞȓȒȓșȭȓȠ ȠȜȥȘȡ ȞȎȟȝȜșȜȔȓțțȡȬȐȩȦȓȘȞȖȐȜȗ3 țȎȞȖȟ. 3.2, ȥȠȜțȎȣȜȒȖȠȟȭ ȐȝȞȓȒȓșȎȣ ȒȎȐșȓțȖȗ ȜȏȡȟșȜȐșȖȐȎȬȧȖȣȘȜțȒȓțȟȎȤȖȬȘȞȓȚțȖȭțȎȝȜȒșȜȔȘȡ. ȁȟșȜȐȖȭȚȖ ȐȠȜȞȜȑȜȫȘȟȝȓȞȖȚȓțȠȎȏȩșȖTV = 2059 K Ȗ%T= 71 K. ǿȜȑșȎȟțȜȫȠȖȚ ȡȟșȜȐȖȭȚȠȜȥȘȎțȎȞȖȟ. 3.2 ȝȜȝȎȒȎȓȠȐȕȜțȡțȖȔȓȘȞȖȐȜȗ%T= f(TV ), ȠȎȘ ȘȎȘ ȘȞȖȠȖȥȓȟȘȎȭ ȞȎȕțȖȤȎ ȠȓȚȝȓȞȎȠȡȞȩ ȝȞȖ TV = 2059 K ȞȎȐțȎ %T= 174.8 K, Ȑ ȠȜ ȐȞȓȚȭ ȘȎȘ ȫȘȟȝȓȞȖȚȓțȠȎșȪțȩȓ ȡȟșȜȐȖȭ ȜȏȡȟșȜȐșȖȐȎȬȠ ȠȜșȪȘȜ %T= 71 K. ǿșȓȒȜȐȎȠȓșȪțȜ, ȠȓȞȚȖȥȓȟȘȎȭ ȖȕȜșȭȤȖȭ «ȟȓțȒȐȖȥ-ȟȠȞȡȘȠȡȞȩ» ȖȟȘșȬȥȎȓȠȐȜȕȚȜȔțȜȟȠȪȘȜțȒȓțȟȎȤȖȖȔȖȒȘȜȑȜ ȘȞȓȚțȖȭ Ȑ ȡȟșȜȐȖȭȣ ȐȠȜȞȜȑȜ ȜȝȩȠȎ.

ȅȖȟșȓțțȩȓ ȜȤȓțȘȖ ȒȖțȎȚȖȘȖ ȖȟȝȎȞȓțȖȭ ȘȞȓȚțȖȓȐȩȣ ȘȎȝȓșȪ Ȑ ȠȓȥȓțȖȓ ȝȓȞȖȜȒȎ ȜȣșȎȔȒȓțȖȭ ȏȩșȖ ȐȩȝȜșțȓțȩ țȎ ȏȎȕȓ ȚȜȒȖȢȖȤȖȞȜȐȎțțȜȗ ȢȜȞȚȡșȩ DZȓȞȤȎ-ǸțȡȒȟȓțȎ

ȑȒȓR0 – țȎȥȎșȪțȩȗ ȞȎȒȖȡȟȘȞȓȚțȖȓȐȜȗȘȎȝșȖ, S – ȝșȜȠțȜȟȠȪ ȘȞȓȚțȖȭ, tC – ȐȞȓȚȭ, Ȑ ȠȓȥȓțȖȓ ȘȜȠȜȞȜȑȜ ȘȎȚȓȞȎ ȜȣșȎȔȒȎȓȠȟȭ ȒȜ ȠȓȚȝȓȞȎȠȡȞȩ ȘȞȖȟȠȎșșȖȕȎȤȖȖ ȘȞȓȚțȖȭ; T(t) = TS Bǿ¸t – ȡȚȓțȪȦȓțȖȓ ȠȓȚȝȓȞȎȠȡȞȩȝȜȒșȜȔȘȖȝȞȖȜȣșȎȔȒȓțȖȖ(TS – țȎȥȎșȪțȎȭȠȓȚȝȓȞȎȠȡȞȎ ȝȜȒșȜȔȘȖ Ȗ Bǿ – ȟȘȜȞȜȟȠȪ ȜȣșȎȔȒȓțȖȭ), M – ȚȜșȭȞțȎȭ ȚȎȟȟȎ ȘȞȓȚțȖȭ, R – ȡțȖȐȓȞȟȎșȪțȎȭ ȑȎȕȜȐȎȭ ȝȜȟȠȜȭțțȎȭ. DzȎȐșȓțȖȓ țȎȟȩȧȓțȖȭ ȘȞȓȚțȖȭ ȜȝȞȓȒȓșȭșȜȟȪ ȝȜ ȢȜȞȚȡșȓ PSat(t) = PSat(T(t)).

ǼȤȓțȘȖ ȝȜȘȎȕȎșȖ, ȥȠȜ ȜȟȠȎȠȜȥțȩȗ ȞȎȕȚȓȞ ȘȎȝșȖ ȕȎȐȖȟȖȠ ȜȠ ȟȘȜȞȜȟȠȖ ȜȣșȎȔȒȓțȖȭ ȝȜȒșȜȔȘȖ Bǿ. ǽȞȖ ȝȓȞȐȜȚ ȫȘȟȝȓȞȖȚȓțȠȓ Ȑȟȓ ȘȎȝșȖ țȎȥȎșȪțȜȑȜ ȞȎȒȖȡȟȎ R0 .3.0 ȚȘȚ ȏȡȒȡȠ ȜȟȠȎȐȎȠȪȟȭ țȎ ȝȜȐȓȞȣțȜȟȠȖ ȘȞȖȟȠȎșșȖȕȎȤȖȖ ȝȜȟșȓ ȜȣșȎȔȒȓțȖȭ ȒȜ ȠȓȚȝȓȞȎȠȡȞȩ ȘȞȖȟȠȎșșȖȕȎȤȖȖ ȘȞȓȚțȖȭ ȟȜ ȟȘȜȞȜȟȠȪȬ Bǿ= 12 K/ȟ Ȗ tC = 16 c. ȁȚȓțȪȦȓțȖȓȟȘȜȞȜȟȠȖȜȣșȎȔȒȓțȖȭȐ2 ȞȎȕȎ(Bǿ=6 K/ȟ, T(0)=1875 K, T(tC) = 1687 K) ȝȞȖȐȓȒȓȠ Ș ȝȜșțȜȚȡ ȖȟȝȎȞȓțȖȬ ȘȎȝȓșȪ Ƞȓȣ Ȕȓ ȞȎȕȚȓȞȜȐ R0 = 3.0 ȚȘȚ Ȑ ȠȓȥȓțȖȓ 7 ȟȓȘȡțȒ. ǻȓȜȏȣȜȒȖȚȜ ȜȠȚȓȠȖȠȪ, ȥȠȜ Ȗȕ-ȕȎȚȎșȜȑȜȞȎȟȟȠȜȭțȖȭ ȚȓȔȒȡȝșȎȟȠȖțȎȚȖ(Ȗȕ-ȕȎȚȎșȜȗȠȜșȧȖțȩ ȑȞȎȢȖȠȜȐȜȑȜ ȘȜșȪȤȎ) ȠȓȚȝȓȞȎȠȡȞȎ ȝȜȒșȜȔȘȖ TS Ȗ ȠȓȚȝȓȞȎȠȡȞȎ ȟȡȏșȖȚȖȞȡȬȧȓȗ ȝșȎȟȠȖțȩ TV, ȝȞȖ ȜȣșȎȔȒȓțȖȖ Ȑ ȘȎȔȒȜȚ ȫȘȟȝȓȞȖȚȓțȠȓ ȚȜțȜȠȜțțȜ ȡȚȓțȪȦȎșȎȟȪ ȟ ȜȒțȜȗ Ȗ ȠȜȗ Ȕȓ ȟȘȜȞȜȟȠȪȬ. ǽȜȫ-

ȠȜȚȡȘȜțȒȓțȟȎȤȖȭ ȘȎȝȓșȪȐȝȓȞȐȜȚȫȘȟȝȓȞȖȚȓțȠȓ ȜȏȡȟșȜȐșȖȐȎșȎȟȪ ȝȓȞȓȟȩȧȓțȖȓȚ ȝȎȞȎ, Ȏ ȜȠȟȡȠȟȠȐȖȓ ȘȜțȒȓțȟȎȤȖȖ ȐȜ ȐȞȓȚȭ ȐȠȜȞȜȑȜ ȫȘȟȝȓȞȖȚȓțȠȎ ȜȏȨȭȟțȭȓȠȟȭ ȚȎșȩȚ țȎȟȩȧȓțȖȓȚ ȎȠȜȚȎȞțȩȚ ȘȞȓȚțȖȓȚ, țȜ țȓ ȖȟȝȎȞȓțȖȓȚ ȘȎȝȓșȪ țȎ ȫȠȎȝȓ ȜȣșȎȔȒȓțȖȭ.

ǼȥȓțȪ ȐȎȔțȜ ȝȜȒȥȓȞȘțȡȠȪ, ȥȠȜ ȘȞȖȠȖȥȓȟȘȎȭ ȞȎȕțȜȟȠȪ ȠȓȚȝȓȞȎȠȡȞ %TC = f(TV ) Ȑ ȟȜȜȠȐȓȠȟȠȐȖȖ ȟ ȘȞȖȐȜȗ 3 țȎ ȞȖȟ. 3.2. ȡȚȓțȪȦȎȓȠȟȭ ȟ ȞȜȟȠȜȚ ȠȓȚȝȓȞȎȠȡȞȩ ȟȡȏșȖȚȎȤȖȖ TV. ȋȠȜ ȚȜȔțȜ ȜȏȨȭȟțȖȠȪ ȡȐȓșȖȥȓțȖȓȚ ȐȓȞȜȭȠțȜȟȠȖ ȜȏȞȎȕȜȐȎțȖȭ ȤȓțȠȞȜȐ ȘȜțȒȓțȟȎȤȖȖ ȔȖȒȘȜȗ ȢȎȕȩ, Ȗȕ-ȕȎ ȡȐȓșȖȥȓțȖȭ ȜȏȧȓȑȜ ȒȎȐșȓțȖȭ ȝȎȞȎ, ȡȐȓșȖȥȓțȖȭ ȝȜȒȐȖȔțȜȟȠȖ ȎȠȜȚȜȐ Ȗ ȖțȠȓțȟȖȢȖȘȎȤȖȓȗ ȢșȡȘȠȡȎȤȖȜțțȩȣ ȝȞȜȤȓȟȟȜȐ ȟȞȜȟȠȜȚȠȓȚȝȓȞȎȠȡȞȩȝȎȞȎ. ȁȟȠȞȎțȓțȖȓȘȜțȒȓțȟȎȤȖȖȔȖȒȘȜȗȢȎȕȩ ȘȞȓȚțȖȭ țȎ ȢȞȜțȠȓ ȞȜȟȠȎ ȭȐșȭȓȠȟȭ ȜȥȓțȪ ȐȎȔțȩȚ, ȠȎȘ ȘȎȘ ȓȟȠȪ ȜȟțȜȐȎțȖȭ ȟȥȖȠȎȠȪ, ȥȠȜ ȘȞȓȚțȖȓȐȩȓ ȐȘșȬȥȓțȖȭ ȭȐșȭȬȠȟȭ ȜȒțȜȗ Ȗȕ ȑșȎȐțȩȣȝȞȖȥȖțȜȏȞȎȕȜȐȎțȖȭȚȖȘȞȜȝȎȗȝ, ȐȎȘȎțȟȖȗȖȝșȎțȎȞțȩȣ ȐȘșȬȥȓțȖȗȐȟșȖȠȘȎȣSiC [1, 7 10]. ǰȜȟȜȏȓțțȜȟȠȖȫȠȜȭȐșȓțȖȓȖȚȓȓȠ ȟȡȧȓȟȠȐȓțțȜȓ ȐșȖȭțȖȓ țȎ țȎȥȎșȪțȜȗ ȟȠȎȒȖȖ ȞȜȟȠȎ, ȘȜȑȒȎ ȟȠȓȝȓțȪ ȝȓȞȓȜȣșȎȔȒȓțȖȭ ȭȐșȭȓȠȟȭ ȚȎȘȟȖȚȎșȪțȜȗ [1].

3.4. DZȞȎȢȖȠȖȕȎȤȖȭ ȝȜȐȓȞȣțȜȟȠȖ ȘȞȖȟȠȎșșȖȕȎȤȖȖ țȎ țȎȥȎșȪțȜȗ ȟȠȎȒȖȖ ȞȜȟȠȎ

ǰȘșȬȥȓțȖȭ ȡȑșȓȞȜȒȎ ȭȐșȭȬȠȟȭ ȐȠȜȞȩȚ ȝȜȟșȓ ȘȞȓȚțȖȓȐȩȣ ȐȘșȬȥȓțȖȗ ȐȖȒȜȚ ȚȎȘȞȜȟȘȜȝȖȥȓȟȘȖȣ ȒȓȢȓȘȠȜȐ Ȑ ȘȞȖȟȠȎșșȎȣ SiC. ǼȒțȎȘȜ ȝȞȖȞȜȒȎ Ȗȣ ȜȏȞȎȕȜȐȎțȖȭ țȎ ȝȜȐȓȞȣțȜȟȠȖ ȝȜȒșȜȔȘȖ ȏȩșȎ ȓȧȮ ȏȜșȓȓ țȓȝȜțȭȠțȜȗ, ȥȓȚ ȜȏȞȎȕȜȐȎțȖȓ ȘȞȓȚțȖȓȐȩȣ ȐȘșȬȥȓțȖȗ, ȠȎȘ ȘȎȘ ȝȎȞ ȟȡȏșȖȚȖȞȜȐȎțțȜȑȜ SiC țȓ ȟȜȒȓȞȔȖȠ ȟȐȜȏȜȒțȜȑȜ ȡȑșȓȞȜȒȎ. ǿȖȠȡȎȤȖȭ ȝȞȜȭȟțȖșȎȟȪ ȝȜȟșȓ ȠȧȎȠȓșȪțȜȑȜ ȎțȎșȖȕȎ ȠȓȝșȜȢȖȕȖȥȓȟȘȖȣ ȝȞȜȤȓȟȟȜȐ, ȝȞȜȖȟȣȜȒȭȧȖȣ Ȑ ȘȎȚȓȞȓ țȎ Ȑȟȓȣ ȫȠȎȝȎȣ ȞȜȟȠȎ ȘȞȖȟȠȎșșȜȐ SiC [6].

ǼȟȜȏȜȓ ȐțȖȚȎțȖȓ ȡȒȓșȭșȜȟȪ ȥȖȟșȓțțȜȚȡ ȚȜȒȓșȖȞȜȐȎțȖȬ ȝȜșȭ ȠȓȚȝȓȞȎȠȡȞȩ țȎ ȟȠȎȒȖȖ ȞȎȕȜȑȞȓȐȎ ȝȓȥȖ, ȘȜȠȜȞȜȓ ȝȞȜȖȕȐȜȒȖșȜȟȪ ȟ ȝȜȚȜȧȪȬ ȝȎȘȓȠȎ ȝȞȜȑȞȎȚȚ GAMBIT-1.3.1/FIDAP-8.6. ǺȜȒȓșȪțȎȭ ȕȎȒȎȥȎȡȥȖȠȩȐȎșȎȕȎȐȖȟȖȚȜȟȠȪȠȓȝșȜȢȖȕȖȥȓȟȘȖȣȝȎȞȎȚȓȠȞȜȐȘȜțȟȠȞȡȘȤȖȜțțȩȣ ȚȎȠȓȞȖȎșȜȐ ȝȓȥȖ ȜȠ ȠȓȚȝȓȞȎȠȡȞȩ, ȐșȖȭțȖȓ ȞȎȟȝȞȓȒȓșȓțȖȭ ȠȓȚȝȓȞȎȠȡȞȩ țȎ ȟȜȟȠȎȐ, ȝȎȞȤȖȎșȪțȜȓ Ȗ Ȝȏȧȓȓ ȒȎȐșȓțȖȓ ȘȜȚȝȜțȓțȠ ȝȎȞȜȑȎȕȜȐȜȗ ȟȚȓȟȖ Ȗ ȞȓȔȖȚ ȝȜȒȎȥȖ ȚȜȧțȜȟȠȖ țȎ ȞȓȕȖȟȠȖȐțȩȗ țȎȑȞȓȐȎȠȓșȪ ȝȞȖ ȐȘșȬȥȓțȖȖ ȝȓȥȖ. ǽȞȖ ȢȜȞȚȡșȖȞȜȐȘȓ ȕȎȒȎȥȖȠȎȘȔȓȝȞȓȒȝȜșȎȑȎșȜȟȪ, ȥȠȜȐȠȐȓȞȒȜȠȓșȪțȩȣȫșȓȚȓțȠȎȣȝȓȥȖ

68 ǮȑȓȓȐ Ǽ.Ǯ., ǯȓșȭȓȐ Ǯ.dz., ǯȜșȠȜȐȓȤ ǻ.ǿ., ǸȖȟȓșȓȐ ǰ.ǿ., ǸȜțȎȘȜȐȎ Ǿ.ǰ. Ȗ ȒȞ.

ǾȖȟ. 3.7. ǾȎȟȝȞȓȒȓșȓțȖȓ ȝȜșȭ ȠȓȚȝȓȞȎȠȡȞȩ Ȑ ȞȓȎȘȠȜȞȓ ȞȜȟȠȎ: (Ȏ) t1 = 1 ȥȎȟ ȝȜȟșȓ ȐȘșȬȥȓțȖȭ țȎȑȞȓȐȎȠȓșȭ [6]

ȠȓȝșȜȜȏȚȓț ȜȟȡȧȓȟȠȐșȭȓȠȟȭ ȕȎ ȟȥȓȠ ȠȓȝșȜȝȞȜȐȜȒțȜȟȠȖ, Ȏ ȞȎȒȖȎȤȖȜțțȩȗ ȠȓȝșȜȜȏȚȓț ȖȚȓȓȠ ȚȓȟȠȜ Ȑ ȝȜȠȜȘȓ ȑȎȕȎ [10, 11].

ǾȎȟȥȓȠȩ ȝȜȘȎȕȎșȖ, ȥȠȜ țȎ țȎȥȎșȪțȜȗ ȟȠȎȒȖȖ ȟȘȜȞȜȟȠȪ țȎȑȞȓȐȎ ȦȖȣȠȩ Ȑ ȖȟȝȎȞȖȠȓșȓ ȟȡȧȓȟȠȐȓțțȜ ȜȠȟȠȎȓȠ ȜȠ ȟȘȜȞȜȟȠȖ țȎȑȞȓȐȎ ȝȜȒșȜȔȘȖ (ȞȖȟ. 3.7). ȋȠȜ ȜȏȨȭȟțȭȓȠȟȭ ȠȓȚ, ȥȠȜ ȚȓșȘȜ ȞȎȕȒȞȜȏșȓțțȎȭ SiC ȦȖȣȠȎ ȖȚȓȓȠ ȠȓȝșȜȝȞȜȐȜȒțȜȟȠȪ țȎ ȚțȜȑȜ ȚȓțȪȦȓ ȝȜ ȟȞȎȐțȓțȖȬ ȟ ȠȓȝșȜȝȞȜȐȜȒțȜȟȠȪȬ SiC ȝȜȒșȜȔȘȖ MC/ MP > 100 (ȑȒȓ MP MC – ȘȜȫȢȢȖȤȖȓțȠȩȠȓȝșȜȝȞȜȐȜȒțȜȟȠȖȦȖȣȠȩȖȝȜȒșȜȔȘȖ). ǿȡȧȓȟȠȐȓțțȜȓ ȞȎȕșȖȥȖȓȟȘȜȞȜȟȠȖȝȜȒȨȓȚȎȠȓȚȝȓȞȎȠȡȞȩȦȖȣȠȩȖȝȜȒșȜȔȘȖȣȜȞȜȦȜ ȜȠȟșȓȔȖȐȎȓȠȟȭ ȝȜ ȑȞȎȢȖȘȎȚ țȎ ȞȖȟ. 3.8. Ƕȕ ȑȞȎȢȖȘȜȐ ȥȓȠȘȜ ȐȖȒțȜ, ȥȠȜ ȝȞȜȒȜșȔȖȠȓșȪțȜȟȠȪ ȟȠȎȒȖȖ ȞȎȕȜȑȞȓȐȎ ȝȓȥȖ ȝȜȟșȓ ȐȘșȬȥȓțȖȭ, ȞȎȐțȎ ȠȞȓȚ ȥȎȟȎȚ. ǰ ȠȓȥȓțȖȓ ȫȠȜȑȜ ȐȞȓȚȓțȖ ȠȓȚȝȓȞȎȠȡȞȎ ȟȡȏșȖȚȎȤȖȖTV ȖȠȓȚȝȓȞȎȠȡȞȎȝȜȐȓȞȣțȜȟȠȖȞȜȟȠȎTS ȝȞȖȜȏȞȓȠȎȬȠȕțȎȥȓțȖȭ, ȜȝȞȓȒȓșȭȬȧȖȓȕȎȒȎțțȡȬȟȠȓȝȓțȪțȎȥȎșȪțȜȑȜȝȓȞȓȜȣșȎȔȒȓțȖȭȝȎȞȎ %TV = (TV TS). ǰȒȎșȪțȓȗȦȓȚ, țȎȝȜȟșȓȒȡȬȧȖȣȟȠȎȒȖȭȣȞȜȟȠȎ, ȠȓȚȝȓȞȎȠȡȞȎ ȟȡȏșȖȚȎȤȖȖ ȝȜȒȒȓȞȔȖȐȎȓȠȟȭ ȝȜȟȠȜȭțțȜȗ, Ȏ ȠȓȚȝȓȞȎȠȡȞȎ ȝȜȐȓȞȣțȜȟȠȖȞȜȟȠȎTS ȖȕȚȓțȭȓȠȟȭȐȟȜȜȠȐȓȠȟȠȐȖȓȟȡȟșȜȐȖȭȚȖȠȓȝșȜȐȜȑȜȏȎșȎțȟȎ țȎ ȢȞȜțȠȓ ȞȜȟȠȎ. ǵȒȓȟȪ ȞȎȟȟȚȎȠȞȖȐȎȓȠȟȭ ȟȜȜȠțȜȦȓțȖȓ ȠȓȚȝȓȞȎȠȡȞ ȟȜȜȠȐȓȠȟȠȐȡȬȧȖȣ ȠȜșȪȘȜ țȎȥȎșȪțȜȗ ȟȠȎȒȖȖ ȝȞȜȤȓȟȟȎ.

ǸȎȘ ȐȖȒțȜ Ȗȕ ȘȞȖȐȩȣ 1 Ȗ 3 țȎ ȞȖȟ. 3.8 Ȑ țȎȥȎșȓ ȫȠȜȗ ȟȠȎȒȖȖ 0< t-tB ȏȜșȪȦȎȭ ȥȎȟȠȪ ȜȏȨȓȚȎ ȦȖȣȠȩ ȜȟȠȎȓȠȟȭ țȓȝȞȜȑȞȓȠȜȗ. ȀȓȚȝȓȞȎȠȡȞȎ ȐțȡȠȞȖ ȦȖȣȠȩ (ȠȜȥȘȎ 3 țȎ ȞȖȟ. 3.7a) ȟȡȧȓȟȠȐȓțțȜ țȖȔȓ ȠȓȚȝȓȞȎȠȡȞȩ ȝȜȐȓȞȣțȜȟȠȖ ȟȡȏșȖȚȎȤȖȖ (ȠȜȥȘȎ 1 țȎ ȞȖȟ. 3.7a), Ȑ ȠȜ ȐȞȓȚȭ ȘȎȘ ȝȜȐȓȞȣțȜȟȠȪ ȝȜȒșȜȔȘȖ ȏȩȟȠȞȜ ȞȎȕȜȑȞȓșȎȟȪ ȝȜȥȠȖ ȒȜ țȎȥȎșȪțȜȗ ȠȓȚȝȓȞȎȠȡȞȩ ȞȜȟȠȎ (ȠȜȥȘȎ 2 țȎ ȞȖȟ. 3.7,a). ǿșȓȒȜȐȎȠȓșȪțȜ,

ǾȖȟ. 3.8. DzȖțȎȚȖȘȎțȎȑȞȓȐȎȦȖȣȠȩ Ȗ ȝȜȒșȜȔȘȖ Ȑ ȝȞȜȤȓȟȟȓ ȞȜȟȠȎ SiC ȘȞȖȟȠȎșșȎ: 1 – ȠȓȚȝȓȞȎȠȡȞȎ ȝȜȐȓȞȣțȜȟȠȖ ȦȖȣȠȩ Ȑ ȖȟȠȜȥțȖȘȓ ȟȜ ȟȠȜȞȜțȩ ȝȜȒșȜȔȘȖ (ȠȜȥȘȎ 1); 2 – ȠȓȚȝȓȞȎȠȡȞȎ Ȑ ȤȓțȠȞȓ ȝȜȐȓȞȣțȜȟȠȖ ȝȜȒșȜȔȘȖ (ȠȜȥȘȎ 2); 3 – ȠȓȚȝȓȞȎȠȡȞȎ Ȑ ȤȓțȠȞȓ ȦȖȣȠȩ (ȠȜȥȘȎ 3); ǻǾ – ȕȎȐȖȟȖȚȜȟȠȪȚȜȧțȜȟȠȖ țȎȑȞȓȐȎȠȓșȭ ȜȠ ȐȞȓȚȓțȖ (țȎ țȎȥȎșȪțȜȗ ȟȠȎȒȖȖ ȞȜȟȠȎ) [6]

ȘȜȑȒȎ ȠȓȚȝȓȞȎȠȡȞȎ ȝȜȐȓȞȣțȜȟȠȖ ȝȜȒșȜȔȘȖ ȟȠȎțȜȐȖȠȟȭ ȒȜȟȠȎȠȜȥțȜȗ ȒșȭȖțȠȓțȟȖȐțȜȗȟȡȏșȖȚȎȤȖȖ(ȠȜȥȘȎtǮ_30 ȚȖț, ȀǮ= 2171 K), Ȑ țȎȝȞȎȐșȓțȖȖȖȟȝȎȞȖȠȓșȭc ȝȜȒșȜȔȘȖȐȜȕțȖȘȎȓȠȒȖȢȢȡȕȖȜțțȩȗȝȜȠȜȘ ȟȡȏșȖȚȖȞȜȐȎțțȩȣ ȥȎȟȠȖȤ SixCy ȝȎȞȎ. ǿșȓȒȡȓȠ ȕȎȚȓȠȖȠȪ, ȥȠȜ ȐȜȕȚȜȔȓț ȠȎȘȔȓ ȜȏȞȎȠțȩȗ ȝȜȠȜȘ ȜȠ ȖȟȝȎȞȖȠȓșȭ țȎ ȝȜȒșȜȔȘȡ, ȘȜȠȜȞȩȗ ȚȜȔȓȠȐȜȕțȖȘȎȠȪ Ȗȕ-ȕȎțȓȞȎȐțȜȚȓȞțȜȑȜ ȞȎȟȝȞȓȒȓșȓțȖȭ ȠȓȚȝȓȞȎȠȡȞȩ ȐȒȜșȪ ȐȓȞȣțȓȗ ȝȜȐȓȞȣțȜȟȠȖ ȦȖȣȠȩ (ȠȜȥȘȖ 4 2 țȎ ȞȖȟ. 3.7).

ǺȜȔțȜ ȝȜȘȎȕȎȠȪ [12] , ȥȠȜ ȜȠțȜȦȓțȖȓ ȐȓșȖȥȖț ȒȖȢȢȡȕȖȜțțȩȣ ȝȜȠȜȘȜȐFa b / Fa c ȜȠȠȜȥȘȖȝȞȜȑȞȓȠȜȗȒȜȠȓȚȝȓȞȎȠȡȞȩTa ȐțȎȝȞȎȐșȓțȖȖ ȠȜȥȓȘ ȟ ȠȓȚȝȓȞȎȠȡȞȜȗ Tb Ȗ Tc ȚȜȔȓȠ ȏȩȠȪ ȑȞȡȏȜ ȜȝȞȓȒȓșȓțȜ ȝȜ ȢȜȞȚȡșȓ:

ȑȒȓ %Ta b = (Ta Tb) Ȗ %Ta c = (Ta Tc).

ǼȤȓțȘȖ, ȐȩȝȜșțȓțțȩȓȟȝȜȚȜȧȪȬȟȜȜȠțȜȦȓțȖȭ(3.2) ȝȞȖȠȓȚȝȓȞȎȠȡȞțȩȣȡȟșȜȐȖȭȣȡȟȠȎțȜȐȖȐȦȖȣȟȭȐțȡȠȞȖȭȥȓȗȘȖȞȜȟȠȎȥȓȞȓȕt=1.0 ȥȎȟ ȝȜȟșȓȐȘșȬȥȓțȖȭțȎȑȞȓȐȎȠȓșȭ, ȒȎșȖȐȓșȖȥȖțȡF4 2/F4 3=0.01, ȕȒȓȟȪ Ta=T4=2601 K – ȠȓȚȝȓȞȎȠȡȞȎȐȠȜȥȘȓ4 țȎȞȖȟ. 3.7Ȏ, Tb=T2=2511 K Ȗ Tc=T3=974 K – ȠȓȚȝȓȞȎȠȡȞȎ ȠȜȥȓȘ 2 Ȗ 3 țȎ ȞȖȟ. 3.7Ȏ ȟȜȜȠȐȓȠȟȠȐȓțțȜ. ǿșȓȒȜȐȎȠȓșȪțȜ, ȜȟțȜȐțȎȭ ȒȜșȭ SixCy ȝȜȠȜȘȎ, ȜȏȞȎȕȜȐȎțțȜȑȜ Ȑ ȕȜțȓ ȚȎȘȟȖȚȎșȪțȜȗ ȠȓȚȝȓȞȎȠȡȞȩ țȎ ȝȜȐȓȞȣțȜȟȠȖ ȦȖȣȠȩ, țȓ ȝȜȘȖȒȎȓȠ ȜȏșȎȟȠȪȟȡȏșȖȚȎȤȖȖȖȠȜșȪȘȜ1% ȝȎȞȎȡȣȜȒȖȠțȎȝȜȐȓȞȣțȜȟȠȪȝȜȒșȜȔȘȖ. ǼȠțȜȦȓțȖȓȖțȠȓțȟȖȐțȜȟȠȖȫȠȜȑȜȝȜȠȜȘȎȘȖțȠȓțȟȖȐțȜȟȠȖȝȜȠȜȘȎF2 3 ȐțȎȝȞȎȐșȓțȖȖȜȠȝȜȒșȜȔȘȖȘȦȖȣȠȓȞȎȐțȜF4 2/F4 3= 0.015. ǵțȎȘ ȚȖțȡȟ ȡȘȎȕȩȐȎȓȠ, ȥȠȜ ȝȜȠȜȘȖ F4 2 Ȗ F2 3 ȖȚȓȬȠ ȝȞȜȠȖȐȜȝȜșȜȔțȜȓ țȎȝȞȎȐșȓțȖȓ.

70 ǮȑȓȓȐ Ǽ.Ǯ., ǯȓșȭȓȐ Ǯ.dz., ǯȜșȠȜȐȓȤ ǻ.ǿ., ǸȖȟȓșȓȐ ǰ.ǿ., ǸȜțȎȘȜȐȎ Ǿ.ǰ. Ȗ ȒȞ.

ȀȎȘȖȚȜȏȞȎȕȜȚ, țȎȜȠȞȓȕȘȓȐȞȓȚȓțȖtA -t-tB ȝȜȠȜȘSixCy ȥȎȟȠȖȤ ȜȠ ȝȜȒșȜȔȘȖ Ȑ țȎȝȞȎȐșȓțȖȖ ȖȟȝȎȞȖȠȓșȭ țȎȚțȜȑȜ ȏȜșȪȦȓ ȝȜȠȜȘȎ ȝȎȞȎȜȠȟȎȚȜȗȝȞȜȑȞȓȠȜȗȟȝȜȐȓȞȣțȜȟȠȖ ȦȖȣȠȩțȎȝȜȒșȜȔȘȡ. ǰ ȫȠȜȚ ȟșȡȥȎȓ ȝȜȐȓȞȣțȜȟȠȪ ȘȞȖȟȠȎșșȖȕȎȤȖȖ țȎ ȝȜȒșȜȔȘȓ ȏȡȒȓȠ ȝȜȒȐȓȞȑȎȠȪȟȭ ȖțȠȓțȟȖȐțȜȚȡ ȠȓȞȚȖȥȓȟȘȜȚȡ ȠȞȎȐșȓțȖȬ (ȟȡȏșȖȚȎȤȖȖ). ǿȜ ȐȞȓȚȓțȓȚ ȟȘȜȞȜȟȠȪ ȠȞȎȐșȓțȖȭ ȏȡȒȓȠ ȡȚȓțȪȦȎȠȪȟȭ ȝȜ ȚȓȞȓ ȞȜȟȠȎ ȠȓȚȝȓȞȎȠȡȞȩ ȦȖȣȠȩ. ǸȜȑȒȎ ȠȓȚȝȓȞȎȠȡȞȎ Ȑ ȤȓțȠȞȓ ȝȜȐȓȞȣțȜȟȠȖ ȦȖȣȠȩ ȟȠȎțȜȐȖȠȟȭ ȞȎȐțȜȗ ȠȓȚȝȓȞȎȠȡȞȓ ȤȓțȠȞȎ ȝȜȒșȜȔȘȖ (ȠȜȥȘȎ ǰ țȎ ȞȖȟ. 3.8) ȒȐȖȔȓțȖȓ SixCy ȥȎȟȠȖȤ ȟ ȝȜȒșȜȔȘȖ Ș ȖȟȝȎȞȖȠȓșȬ ȝȞȓȘȞȎȧȎȓȠȟȭ, Ȑ ȠȜ ȐȞȓȚȭ ȘȎȘ, ȚȎȟȟȜȝȓȞȓțȜȟ ȜȠ ȑȜȞȭȥȓȗ ȜȏșȎȟȠȖ ȝȜȐȓȞȣțȜȟȠȖ ȖȟȝȎȞȖȠȓșȭ țȎ ȝȜȒșȜȔȘȡ ȐȜȕȞȎȟȠȎȓȠ. ǻȎ ȫȠȜȗ ȟȠȎȒȖȖ ȝȞȓȘȞȎȧȎȓȠȟȭ ȠȓȞȚȖȥȓȟȘȜȓ ȠȞȎȐșȓțȖȓ ȝȜȒșȜȔȘȖ Ȗ ȖțȖȤȖȖȞȡȓȠȟȭ țȎȥȎșȜȞȜȟȠȎSiC țȎȝȜȒșȜȔȘȓ. ȀȜșȧȖțȎȟȡȏșȖȚȖȞȜȐȎțțȜȑȜȕȎȐȞȓȚȭ ȠȓȞȚȖȥȓȟȘȜȑȜȠȞȎȐșȓțȖȭȟșȜȭSTE țȎȝȜȒșȜȔȘȓȚȜȔȓȠȏȩȠȪȜȤȓțȓțȎ ȟ ȝȜȚȜȧȪȬ ȡȞȎȐțȓțȖȭ [13]:

ǵȒȓȟȪ 8 – ȚȜșȓȘȡșȭȞțȩȗ ȜȏȨȓȚ SiC Ȗ F23 – ȟȞȓȒțȭȭ ȐȓșȖȥȖțȎ ȝȜȠȜȘȎ SixCy ȥȎȟȠȖȤ Ȑ ȠȓȥȓțȖȖ ȝȓȞȖȜȒȎ ȠȓȞȚȖȥȓȟȘȜȑȜ ȠȞȎȐșȓțȖȭ

tAB =(TB TA).

ǰȝȜȟșȓȒțȓȗȢȜȞȚȡșȓ P2 (T2 ) Ȗ P3 (T3 ) – ȞȎȐțȜȐȓȟțȩȓȝȎȞȤȖȎșȪ-

Ȑ ȠȓȥȓțȖȖ ȝȓȞȖȜȒȎ ȠȞȎȐșȓțȖȭ. ǵȒȓȟȪ n – ȥȖȟșȜ ȠȜȥȓȘ Ȑ ȖțȠȓȞȐȎșȓ

tAB =(tB tA) țȎȞȖȟ. 3.8; T = T2 ¸T3 – ȟȞȓȒțȭȭȠȓȚȝȓȞȎȠȡȞȎțȎȝȞȜȠȭȔȓțțȜȟȠȖȠȓȥȓțȖȭȝȜȠȜȘȎ; d – ȞȎȟȟȠȜȭțȖȓ«ȖȟȠȜȥțȖȘ–ȟȠȜȘ»; k – ȝȜȟȠȜȭțțȎȭ ǯȜșȪȤȚȎțȎ. ǸȜȫȢȢȖȤȖȓțȠ ȒȖȢȢȡȕȖȖ D [14], ȜȝȞȓȒȓșȭȬȧȖȗ ȖțȠȓțȟȖȐțȜȟȠȪ ȝȜȠȜȘȎ ȘȜȚȝȜțȓțȠ SixCy ȝȎȞȎ Ȑ ȕȎȧȖȠțȜȗ ȎȠȚȜȟȢȓȞȓ ȎȞȑȜțȎ, țȎȣȜȒȖȠȟȭ ȝȜ ȚȜȒȖȢȖȤȖȞȜȐȎțțȜȗ ȢȜȞȚȡșȓ (2.22, ȑș. 2):

Ƕȕ-ȕȎ țȓȟȠȓȣȖȜȚȓȠȞȖȖ ȝȞȜȤȓȟȟȎ ȟȡȏșȖȚȎȤȖȖ SiC [13] țȎ ȝȜȐȓȞȣțȜȟȠȖ ȝȜȒșȜȔȘȖ ȐȞȓȕȡșȪȠȎȠȓ ȠȓȞȚȖȥȓȟȘȜȑȜ ȠȞȎȐșȓțȖȭ ȜȏȞȎȕȡȓȠȟȭ ȟșȜȗ ȜȟȠȎȠȜȥțȜȑȜ ȡȑșȓȞȜȒȎ. ǿȠȓȝȓțȪ ȑȞȎȢȖȠȖȕȎȤȖȖ ȝȜȐȓȞȣțȜȟȠȖ ȝȜȒșȜȔȘȖ ȟȠȞȜȑȜ ȕȎȐȖȟȖȠ ȜȠ ȡȟșȜȐȖȗ ȝȞȜȤȓȟȟȎ. ǽȞȖ ȖȕȐȓȟȠțȜȗ ȕȎȐȖȟȖȚȜȟȠȖ ȘȜȫȢȢȖȤȖȓțȠȎ ȟȠȓȣȖȜȚȓȠȞȖȖ ȜȠ ȠȓȚȝȓȞȎȠȡȞȩ ȠȜșȧȖțȡ ȟșȜȭ ȜȟȠȎȠȜȥțȜȑȜ ȡȑșȓȞȜȒȎ țȎ ȝȜȐȓȞȣțȜȟȠȖ SiC ȝȜȒșȜȔȘȖ ȚȜȔțȜ ȜȤȓțȖȠȪ ȝȜ ȢȜȞȚȡșȓ:

ǾȓȕȡșȪȠȎȠȩȞȎȟȥȓȠȎȝȞȓȒȟȠȎȐșȓțȩțȎȞȖȟ. 3.9. ǸȎȘȐȖȒțȜȖȕ ȑȞȎȢȖȘȜȐ, ȠȜșȧȖțȎ ȟșȜȭ ȜȟȠȎȠȜȥțȜȑȜ ȡȑșȓȞȜȒȎ ȟȡȧȓȟȠȐȓțțȜ ȕȎȐȖȟȖȠ

ǾȖȟ. 3.9. ȀȜșȧȖțȎ ȟșȜȭ ȜȟȠȎȠȜȥțȜȑȜ ȑȞȎȢȖȠȎ țȎ SiC ȝȜȒșȜȔȘȓ Ȑ ȕȎȐȖȟȖȚȜȟȠȖ ȜȠ ȐȞȓȚȓțȖ: Ȓșȭ ȞȎȕșȖȥțȜȑȜ ȒȎȐșȓțȖȭ ȎȞȑȜțȎ Ȗ ȝȜȟȠȜȭțțȜȗȟȞȓȒțȓȗȠȓȚȝȓȞȎȠȡȞȓ ȝȜȒșȜȔȘȖȖȟȠȜȘȎ(Ȏ); ȒșȭȞȎȕșȖȥțȜȗ ȟȞȓȒțȓȗ ȠȓȚȝȓȞȎȠȡȞȓ ȝȜȒșȜȔȘȖ Ȗ ȝȜȟȠȜȭțțȩȣ ȒȎȐșȓțȖȖ ȎȞȑȜțȎ Ȗ ȟȞȓȒțȓȗ ȠȓȚȝȓȞȎȠȡȞȓ ȟȠȜȘȎ (ȏ) [6]

72 ǮȑȓȓȐ Ǽ.Ǯ., ǯȓșȭȓȐ Ǯ.dz., ǯȜșȠȜȐȓȤ ǻ.ǿ., ǸȖȟȓșȓȐ ǰ.ǿ., ǸȜțȎȘȜȐȎ Ǿ.ǰ. Ȗ ȒȞ.

ȜȠ ȒȐȡȣ ȢȎȘȠȜȞȜȐ: ȝȎȞȤȖȎșȪțȜȑȜ ȒȎȐșȓțȖȭ ȎȞȑȜțȎ Ȗ ȠȓȚȝȓȞȎȠȡȞȩ ȝȜȒșȜȔȘȖ. ȁȐȓșȖȥȓțȖȓ ȝȎȞȤȖȎșȪțȜȑȜ ȒȎȐșȓțȖȭ ȎȞȑȜțȎ PAr Ȑ ȭȥȓȗȘȓ ȞȜȟȠȎ (ȞȓȎȘȠȜȞȓ) ȜȠ 10 ȒȜ 150 ȀȜȞȞ ȐȜ ȐȞȓȚȭ ȠȓȞȚȖȥȓȟȘȜȑȜ ȠȞȎȐșȓțȖȭ ȝȜȒșȜȔȘȖ tAB = (tB tA) !45 ȚȖțȡȠ ȝȞȖ ȠȓȚȝȓȞȎȠȡȞȎȣ

T2 = 2411K Ȗ T3 = 974 K ȡȚȓțȪȦȎȓȠ ȠȜșȧȖțȡ ȜȟȠȎȠȜȥțȜȑȜ ȟșȜȭ ȑȞȎȢȖȠȎ țȎ ȝȜȒșȜȔȘȓ ȜȠ 6.2 ȒȜ 0.4 ȚȖȘȞȜțȎ (ȞȖȟ. 3.9Ȏ). ȋȠȜ ȜȏȨȭȟțȭȓȠȟȭȖȕȚȓțȓțȖȓȚȡȟșȜȐȖȗȞȎȐțȜȐȓȟȖȭțȎȝȜȐȓȞȣțȜȟȠȖȝȜȒșȜȔȘȖ, ȐȩȕȐȎțțȜȓ ȜȟșȎȏșȓțȖȓȚ ȜȠȠȜȘȎ ȝȞȜȒȡȘȠȜȐ ȟȡȏșȖȚȎȤȖȖ ȐȟșȓȒȟȠȐȖȓ ȟȡȧȓȟȠȐȓțțȜȑȜ ȡȚȓțȪȦȓțȖȭ ȐȓșȖȥȖțȩ ȘȜȫȢȢȖȤȖȓțȠȎ ȒȖȢȢȡȕȖȖ SixCy ȥȎȟȠȖȤ Ȑ ȎȞȑȜțȓ. ǿ ȒȞȡȑȜȗ ȟȠȜȞȜțȩ, țȎ ȞȖȟ. 3.9ȏ ȐȖȒțȜ, ȥȠȜ ȠȜșȧȖțȎȜȟȠȎȠȜȥțȜȑȜC-ȟșȜȭȡȚȓțȪȦȎȓȠȟȭȜȠ6.2 ȒȜ0.2 ȚȖȘȞȜțȎ, ȠȎȘ ȘȎȘȝȞȖȡȐȓșȖȥȓțȖȖȠȓȚȝȓȞȎȠȡȞȩȝȜȒșȜȔȘȖ T2 ȜȠ2411 ǸȒȜ2900 K ȘȜȫȢȢȖȤȖȓțȠ ȟȠȓȣȖȜȚȓȠȞȖȖ H(T) Ȑ ȫȠȜȚ ȒȖȎȝȎȕȜțȓ ȠȓȚȝȓȞȎȠȡȞȩ ȝȞȖȏșȖȔȎȓȠȟȭ Ș ȓȒȖțȖȤȓ.

Dzșȭ ȝȜȒȎȐșȓțȖȭ ȝȞȜȤȓȟȟȎ ȑȞȎȢȖȠȖȕȎȤȖȖ ȝȜȐȓȞȣțȜȟȠȖ ȝȜȒșȜȔȘȖ ȝȜȟșȓ ȐȘșȬȥȓțȖȭ ȝȓȥȖ ȟȡȧȓȟȠȐȓțțȜ ȠȞȓȏȡȓȠȟȭ ȡȚȓțȪȦȖȠȪ ȐȞȓȚȭ ȞȎȕȜȑȞȓȐȎ ȒȜ ȞȎȏȜȥȓȑȜ ȞȓȔȖȚȎ. ǼȒțȎȘȜ ȝȜșțȜȟȠȪȬ ȖȕȏȓȔȎȠȪ ȐȜȕțȖȘțȜȐȓțȖȭ ȠȓȞȚȖȥȓȟȘȜȑȜ ȠȞȎȐșȓțȖȭ ȟșȜȔțȜ Ȗȕ-ȕȎ ȏȜșȪȦȜȗ ȞȎȕțȖȤȩȠȓȝșȜȝȞȜȐȜȒțȜȟȠȖȝȜȞȜȦȘȎSiC ȦȖȣȠȩȖȠȓȝșȜȝȞȜȐȜȒțȜȟȠȖ ȚȜțȜȘȞȖȟȠȎșșȖȥȓȟȘȜȗ SiC ȝȜȒșȜȔȘȖ. dzȟșȖ Ȑ ȒȜȟȠȎȠȜȥțȜȗ ȟȠȓȝȓțȖ ȡȚȓțȪȦȖȠȪ ȒșȖȠȓșȪțȜȟȠȪ țȎȥȎșȪțȜȗ ȟȠȎȒȖȖ țȓȐȜȕȚȜȔțȜ, ȠȜ ȜȝȠȖȚȖȕȎȤȖȭ ȒȎȐșȓțȖȭ ȎȞȑȜțȎ Ȗ ȠȓȚȝȓȞȎȠȡȞȩ ȝȜȒșȜȔȘȖ țȎ ȟȠȎȒȖȖ ȠȞȎȐșȓțȖȭ ȚȜȑȡȠ ȟȡȧȓȟȠȐȓțțȜ ȝȜȒȎȐȖȠȪ ȝȞȜȤȓȟȟ ȑȞȎȢȖȠȖȕȎȤȖȖ ȝȜȐȓȞȣțȜȟȠȖ ȝȜȒșȜȔȘȖ.

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