Источники / SiCtechnologyPropertiesApplication

518 ǮȑȓȓȐ Ǽ.Ǯ., ǯȓșȭȓȐ Ǯ.dz., ǯȜșȠȜȐȓȤ ǻ.ǿ., ǸȖȟȓșȓȐ ǰ.ǿ., ǸȜțȎȘȜȐȎ Ǿ.ǰ. Ȗ ȒȞ.

ȕȎ ȟȥȓȠ ȒȐȖȔȓțȖȭ ȥȎȟȠȖȥțȩȣ ȒȖȟșȜȘȎȤȖȗ ȒȎȔȓ ȝȞȖ ȠȓȚȝȓȞȎȠȡȞȓ Țȓțȓȓ 1000°ǿ. ȋțȓȞȑȖȭ, ȜȟȐȜȏȜȔȒȎȓȚȎȭ ȝȞȖ ȏȓȕȖȕșȡȥȎȠȓșȪțȜȗ ȞȓȘȜȚȏȖțȎȤȖȖ, ȚȜȔȓȠ ȐȩȕȩȐȎȠȪ șȜȘȎșȪțȩȗ ȞȎȕȜȑȞȓȐ ȞȓȦȓȠȘȖ Ȗ ȞȜȟȠ ȢȜțȜțțȜȑȜ ȒȎȐșȓțȖȭ Ȑ ȜȘȞȓȟȠțȜȟȠȖ ȤȓțȠȞȎ ȞȓȘȜȚȏȖțȎȤȖȖ. ǾȎțȓȓ ȡȘȎȕȩȐȎșȜȟȪ [17], ȥȠȜ ȡȟȖșȓțȖȓ ȐȖȏȞȎȤȖȖ ȎȠȜȚȜȐ ȞȓȦȓȠȘȖ, ȝȞȖ ȏȓȕȖȕșȡȥȎȠȓșȪțȜȚȕȎȣȐȎȠȓțȜȟȖȠȓșȓȗȑșȡȏȜȘȖȚȖȡȞȜȐțȭȚȖȒȓȢȓȘȠȜȐ ȜȏȡȟșȜȐșȖȐȎȓȠ ȜȏȞȎȕȜȐȎțȖȓ țȜȐȩȣ ȒȓȢȓȘȠȜȐ Ȑ ȝȜșȡȝȞȜȐȜȒțȖȘȎȣ. ǰ p-i-n ȒȖȜȒȎȣ ȫȠȜ ȭȐșȓțȖȓ ȚȜȔțȜ ȞȎȟȟȚȎȠȞȖȐȎȠȪ ȘȎȘ ȟȎȚȜȟȜȑșȎȟȜȐȎțțȩȗ ȝȞȜȤȓȟȟ.

ǽȜșȎȑȎȭ, ȥȠȜȐȜȘȞȓȟȠțȜȟȠȖȤȓțȠȞȎȝȞȖȞȓȘȜȚȏȖțȎȤȖȖȐȜȕȏȡȔȒȎȓȠȟȭ ȐȓȟȪ ȟȝȓȘȠȞ ȠȓȝșȜȐȩȣ ȘȜșȓȏȎțȖȗ ȞȓȦȓȠȘȖ, șȜȘȎșȪțȜȓ ȖȕȚȓțȓțȖȓ ȢȜțȜțțȜȑȜ ȒȎȐșȓțȖȭ ȚȜȔțȜ ȜȤȓțȖȠȪ ȝȜ ȢȜȞȚȡșȓ:

ȑȒȓ %p= p p0, p0 – ȢȜțȜȐȜȓ ȒȎȐșȓțȖȓ ȢȜțȜțȜȐ; I – ȝȎȞȎȚȓȠȞ DZȞȬțȎȗȕȓțȎ; n0 – ȘȜțȤȓțȠȞȎȤȖȭ ȎȠȜȚȜȐ Ȑ ȞȓȦȓȠȘȓ; k – ȝȜȟȠȜȭțțȎȭ ǯȜșȪȤȚȎțȎ.

dzȟșȖ șȜȘȎșȪțȜȓ ȢȜțȜțțȜȓ ȒȎȐșȓțȖȓ ȏȡȒȓȠ ȝȞȓȐȜȟȣȜȒȖȠȪ țȎȝȞȭȔȓțȖȓǽȎȗȓȞșȟȎUm_10 4¸G (ȑȒȓG – ȚȜȒȡșȪȟȒȐȖȑȎ) [18], ȠȜȒȐȖȔȓțȖȓ ȒȖȟșȜȘȎȤȖȗȐȜȕȚȜȔțȜ ȒȎȔȓȝȞȖȚȎșȜȗȠȓȚȝȓȞȎȠȡȞȓ. ǰ ȟȜȜȠȐȓȠȟȠȐȖȓ ȟ ȢȜȞȚȡșȜȗ (5.6) ȡȐȓșȖȥȓțȖȓ ȠȓȚȝȓȞȎȠȡȞȩ %T, ȘȜȠȜȞȜȓ Ȑ ȟȜȟȠȜȭțȖȖ ȟȜȕȒȎȠȪ ȘȞȖȠȖȥȓȟȘȡȬ ȢșȡȘȠȡȎȤȖȬ ȒȎȐșȓțȖȭ %p.Um, ȒȜșȔțȜ ȏȩȠȪ țȓ ȚȓțȪȦȓ .2.5°ǿ. ȀȎȘȖȚ ȜȏȞȎȕȜȚ, ȒȎȔȓ țȓȏȜșȪȦȎȭ ȢșȡȘȠȡȎȤȖȭ ȠȓȚȝȓȞȎȠȡȞȩ ȚȜȔȓȠ ȖțȖȤȖȖȞȜȐȎȠȪ ȡȐȓșȖȥȓțȖȓ ȝșȜȧȎȒȖ Dzȁ. ǽȞȖțȖȚȎȭȐȜȐțȖȚȎțȖȓ, ȥȠȜȒȐȖȔȓțȖȓȥȎȟȠȖȥțȩȣȒȖȟșȜȘȎȤȖȗȐȏȎȕȜȐȜȗ ȝșȜȟȘȜȟȠȖ ȜȏȡȟșȜȐșȓțȜ ȒȐȖȔȓțȖȓȚ ȝȎȞțȩȣ ȝȓȞȓȑȖȏȜȐ ȐȒȜșȪ șȖțȖȖ ȒȖȟșȜȘȎȤȖȖ, Ȗ ȡȥȖȠȩȐȎȭ ȖțȘȡȏȎȤȖȜțțȩȗ ȣȎȞȎȘȠȓȞ țȎȥȎșȪțȜȗ ȟȠȎȒȖȖ ȒȓȑȞȎȒȎȤȖȜțțȜȑȜ ȝȞȜȤȓȟȟȎ ȚȜȔțȜ ȕȎȘșȬȥȖȠȪ, ȥȠȜ ȟȡȧȓȟȠȐȡȓȠ ȘȞȖȠȖȥȓȟȘȎȭ ȝșȜȠțȜȟȠȪ ȝȎȞțȩȣ ȝȓȞȓȑȖȏȜȐ, ȝȞȖȘȜȠȜȞȜȗ ȒȖȟșȜȘȎȤȖȖ ȐȏȎȕȜȐȜȗ ȝșȜȟȘȜȟȠȖ ȠȓȞȭȬȠȡȟȠȜȗȥȖȐȜȟȠȪ ȖțȎȥȖțȎȬȠ ȟȘȜșȪȕȖȠȪ ȝȜȒ ȒȓȗȟȠȐȖȓȚȐȜȕțȖȘȎȬȧȖȣțȎȝȞȭȔȓțȖȗ. ǽȞȜȒȜșȔȖȠȓșȪțȜȟȠȪȖțȘȡȏȎȤȖȜțțȜȑȜ ȝȓȞȖȜȒȎ, Ȑ ȠȓȥȓțȖȓ ȘȜȠȜȞȜȑȜ țȎȘȎȝșȖȐȎȓȠȟȭ ȘȞȖȠȖȥȓȟȘȎȭ ȝșȜȠțȜȟȠȪ ȝȎȞțȩȣ ȝȓȞȓȑȖȏȜȐ, ȘȎȘ Ȗ ȠȓȚȝȓȞȎȠȡȞțȎȭ ȕȎȐȖȟȖȚȜȟȠȪ Ud ȭȐșȭȓȠȟȭȢȡțȘȤȖȓȗȠȓȚȝȓȞȎȠȡȞȩ. ȀȎȘȖȚȜȏȞȎȕȜȚ, ȝȜșȡȥȓțțȎȭȫțȓȞȑȖȭ ȝȞȜȤȓȟȟȎ ȒȓȑȞȎȒȎȤȖȖ (0.34 ȫǰ) ȚȜȔȓȠ ȝȞȖțȖȚȎȠȪȟȭ ȘȎȘ ȫțȓȞȑȖȭ ȎȘȠȖȐȎȤȖȖ ȜȏȞȎȕȜȐȎțȖȭ ȝȎȞțȩȣ ȝȓȞȓȑȖȏȜȐ țȎ ȒȖȟșȜȘȎȤȖȖ ȐȜ ȐȞȓȚȭ ȒȓȗȟȠȐȖȭ ȏȓȕȖȕșȡȥȎȠȓșȪțȜȗ ȞȓȘȜȚȏȖțȎȤȖȖ.

5.4. ȋȐȜșȬȤȖȭ țȓȡȟȠȜȗȥȖȐȜȟȠȖ Ȗ ȝȎȒȓțȖȓ ȝȞȜȥțȜȟȠȖ ȞȓȦȓȠȘȖ Ȑ ȠȓȥȓțȖȖ ȖțȘȡȏȎȤȖȜțțȜȑȜ ȝȓȞȖȜȒȎ ȝȞȜȤȓȟȟȎ ȒȓȑȞȎȒȎȤȖȖ ȒȖȜȒȎ

ǾȎțȓȓ ȡȘȎȕȩȐȎșȜȟȪ, ȥȠȜ ȝȞȖ ȏȓȕȖȕșȡȥȎȠȓșȪțȜȚ ȕȎȣȐȎȠȓ ȟȐȜȏȜȒțȩȣțȜȟȖȠȓșȓȗțȎȑșȡȏȜȘȖȣȡȞȜȐțȭȣȝȜșȡȝȞȜȐȜȒțȖȘȜȐȐȜȕȏȡȔȒȎȓȠȟȭ ȖțȠȓțȟȖȐțȎȭ ȐȖȏȞȎȤȖȭ ȎȠȜȚȜȐ ȞȓȦȓȠȘȖ. DzȜȟȠȖȑȎȭ ȘȞȖȠȖȥȓȟȘȖȣ ȐȓșȖȥȖț, ȠȎȘȎȭȐȖȏȞȎȤȖȭȚȜȔȓȠȐȩȕȐȎȠȪțȓȠȜșȪȘȜȒȐȖȔȓțȖȓȒȓȢȓȘȠȎ, țȎȘȜȠȜȞȜȚțȎȏșȬȒȎȓȠȟȭȕȎȣȐȎȠ, țȜȖȜȏȞȎȕȜȐȎțȖȓȐȓȑȜȜȘȞȓȟȠțȜȟȠȖ țȜȐȩȣ ȒȓȢȓȘȠȜȐ [17].

ǽȜȒȜȏțȜ ȒȓȑȞȎȒȎȤȖȖ SiC p-i-n ȒȖȜȒȜȐ ȝȜȠȓȞȭ ȝȞȜȥțȜȟȠȖ ȠȐȓȞȒȜȑȜ ȠȓșȎ ȠȎȘȔȓ ȣȎȞȎȘȠȓȞȖȕȡȓȠȟȭ ȖțȘȡȏȎȤȖȜțțȩȚ ȝȓȞȖȜȒȜȚ, Ȑ ȠȓȥȓțȖȓ ȘȜȠȜȞȜȑȜ Ȑ ȎȠȜȚțȜȗ ȞȓȦȓȠȘȓ țȎȘȎȝșȖȐȎȓȠȟȭ ȘȞȖȠȖȥȓȟȘȎȭ ȘȜțȤȓțȠȞȎȤȖȭ ȞȎȕȜȞȐȎțțȩȣ ȟȐȭȕȓȗ, ȝȞȖ ȒȜȟȠȖȔȓțȖȖ ȘȜȠȜȞȜȗ Ȑ ȚȓȟȠȓ țȎȘȜȝșȓțȖȭ ȜȏȞȎȕȡȓȠȟȭ ȕȎȞȜȒȩȦȓȐȎȭ ȠȞȓȧȖțȎ, ȝȞȖȐȜȒȭȧȎȭ Ș ȞȎȕȞȡȦȓțȖȬ ȞȓȦȓȠȘȖ. DzȓȠȎșȪțȩȗ ȎțȎșȖȕ ȢȖȕȖȥȓȟȘȜȗ ȝȞȖȞȜȒȩ ȝȞȜȥțȜȟȠȖ ȝȜȘȎȕȎș, ȥȠȜ ȞȓȎșȪțȎȭ ȝȞȜȥțȜȟȠȪ ȠȐȓȞȒȜȑȜ ȠȓșȎ țȎ ȞȎȕȞȩȐ T ȜȝȞȓȒȓșȭȓȠȟȭ ȒȐȡȚȭ ȢȎȘȠȜȞȎȚȖ [19]:

ǽȓȞȐȩȗ ȢȎȘȠȜȞ E¸F ȭȐșȭȓȠȟȭ ȎȠȓȞȚȖȥȓȟȘȖȚ Ȗ ȜȝȞȓȒȓșȭȓȠȟȭ ȟȖșȎȚȖ ȝȞȖȠȭȔȓțȖȭ ȚȓȔȎȠȜȚțȩȣ ȟȐȭȕȓȗ. ǰȠȜȞȜȗ – ȠȓȚȝȓȞȎȠȡȞțȜȐȞȓȚȓțțȜȗ ȢȎȘȠȜȞ, ȜȏȡȟșȜȐșȓț ȠȓȝșȜȐȩȚȖ ȘȜșȓȏȎțȖȭȚȖ ȎȠȜȚȜȐ ȞȓȦȓȠȘȖ. ǰȢȜȞȚȡșȓ(5.7) B – ȘȜȫȢȢȖȤȖȓțȠ ȠȓȝșȜȐȜȑȜȞȎȟȦȖȞȓțȖȭ F – ȘȞȖȠȖȥȓȟȘȎȭ ȒȓȢȜȞȚȎȤȖȭ, ȝȜ ȒȜȟȠȖȔȓțȖȖ ȘȜȠȜȞȜȗ țȎȥȖțȎȓȠȟȭ ȖțȠȓțȟȖȐțȩȗȞȎȕȞȩȐȎȠȜȚțȩȣȟȐȭȕȓȗ Ƶ – ȎȏȟȜșȬȠțȎȭȠȓȚȝȓȞȎȠȡȞȎ k – ȝȜȟȠȜȭțțȎȭ ǯȜșȪȤȚȎțȎ ǿ – ȎȠȜȚțȎȭ ȠȓȝșȜȓȚȘȜȟȠȪ U0 – ȝȓȞȖȜȒ ȎȠȜȚțȩȣ ȘȜșȓȏȎțȖȗ U – ȝȞȜȒȜșȔȖȠȓșȪțȜȟȠȪ ȖțȘȡȏȎȤȖȜțțȜȑȜ ȝȓȞȖȜȒȎ.

ǹȜȘȎșȪțȡȬ ȜȏșȎȟȠȪ ȐțȡȠȞȖ ȜȏȨȓȚȎ ȚȎȠȓȞȖȎșȎ, ȘȜȠȜȞȎȭ țȎȣȜȒȖȠȟȭ ȝȜȒ ȐȜȕȒȓȗȟȠȐȖȓȚ ȞȎȟȠȭȑȖȐȎȬȧȓȑȜ țȎȝȞȭȔȓțȖȭ, țȎȝȞȖȚȓȞ, Ȑ ȜȘȞȓȟȠțȜȟȠȖ ȘȞȎȓȐȜȗ ȒȖȟșȜȘȎȤȖȖ, ȚȜȔțȜ ȟȜȝȜȟȠȎȐȖȠȪ ȟ ȒȖșȎȠȜțȜȚ, ȐȜȕțȖȘȎȬȧȖȚ Ȑ ȞȓȕȡșȪȠȎȠȓ ȢșȡȘȠȡȎȤȖȜțțȜȑȜ ȞȎȟȠȭȔȓțȖȭ ȞȓȦȓȠȘȖ[20, 21]. ǰȜȏșȎȟȠȖȞȎȟȠȭȔȓțȖȭ(ȒȖșȎȠȜțȎ) țȓȞȎȐțȜȐȓȟțȜȚȡ ȟȜȟȠȜȭțȖȬ ȠȐȓȞȒȜȑȜ ȠȓșȎ ȟȜȝȜȟȠȎȐșȭșȜȟȪ ȐȜȕțȖȘțȜȐȓțȖȓ Ȑ țȓȚ ȚȓȠȎȟȠȎȏȖșȪțȜȗ ȟȖȟȠȓȚȩ ȘȐȎȕȖȥȎȟȠȖȤ – «ȑȎȕȎ ȖȕȏȩȠȜȥțȩȣ ȢȜțȜțȜȐ». ǽȞȜȤȓȟȟ ȠȓȞȚȜȢșȡȘȠȡȎȤȖȜțțȜȑȜ ȕȎȞȜȔȒȓțȖȭ ȠȞȓȧȖțȩ, Ȑ ȟȜȜȠȐȓȠȟ-

520 ǮȑȓȓȐ Ǽ.Ǯ., ǯȓșȭȓȐ Ǯ.dz., ǯȜșȠȜȐȓȤ ǻ.ǿ., ǸȖȟȓșȓȐ ǰ.ǿ., ǸȜțȎȘȜȐȎ Ǿ.ǰ. Ȗ ȒȞ.

ȠȐȖȓ ȟ ȫȠȖȚ ȟȜȝȜȟȠȎȐșȓțȖȓȚ ȝȞȓȒȟȠȎȐșȭșȟȭ ȘȎȘ «ȘȜțȒȓțȟȎȤȖȭ» ȝȓȞȓȜȣșȎȔȒȓțțȜȑȜȑȎȕȎȖȕȏȩȠȜȥțȩȣȢȜțȜțȜȐ. ǽȞȜȤȓȟȟ«ȘȜțȒȓțȟȎȤȖȖ» ȘȎȘ șȬȏȜȗ ȢȎȕȜȐȩȗ ȝȓȞȓȣȜȒ ȜȟȡȧȓȟȠȐșȭȓȠȟȭ ȝȡȠȓȚ ȢșȡȘȠȡȎȤȖȜțțȜȑȜ ȐȜȕțȖȘțȜȐȓțȖȭ «ȘȞȖȠȖȥȓȟȘȜȑȜ ȕȎȞȜȒȩȦȎ» Ȗ ȓȑȜ ȒȎșȪțȓȗȦȓȑȜ ȟȎȚȜȝȞȜȖȕȐȜșȪțȜȑȜ Ȗ țȓȜȏȞȎȠȖȚȜȑȜ ȞȜȟȠȎ [20, 21].

ǺȜȔțȜ ȜȔȖȒȎȠȪ, ȥȠȜ ȝȞȖ ȞȓȘȜȚȏȖțȎȤȖȖ țȎ ȏȓȕȖȕșȡȥȎȠȓșȪțȩȣ ȤȓțȠȞȎȣ, Ȗȕ-ȕȎ ȡȒșȖțȓțȖȭ ȝȎȞȎȚȓȠȞȎ ȞȓȦȓȠȘȖ a> a0 Ȑ ȞȎȟȠȭțȡȠȜȗ ȜȏșȎȟȠȖ ȒȓȢȓȘȠȎ [14], țȓ ȏȡȒȡȠ ȐȜȕȏȡȔȒȎȠȪȟȭ ȐȩȟȜȘȜȥȎȟȠȜȠțȩȓ ȚȜȒȩ ȘȜșȓȏȎțȖȗ ȎȠȜȚȜȐ, Ȏ ȐȩȟȐȜȏȜȒȖȐȦȎȭȟȭ ȫțȓȞȑȖȭ ȫșȓȘȠȞȜțȎ ȞȎȟȣȜȒȡȓȠȟȭ țȎ ȡȐȓșȖȥȓțȖȓ ȎȚȝșȖȠȡȒȩ ȠȓȝșȜȐȩȣ ȘȜșȓȏȎțȖȗ. dzȟșȖ ȎȚȝșȖȠȡȒȎȠȓȝșȜȐȩȣȘȜșȓȏȎțȖȗȝȞȖȞȓȘȜȚȏȖțȎȤȖȭȣȟȠȎțȓȠȝȞȓȐȩȦȎȠȪȝȞȓȒȓșȪțȜȓȜȠȘșȜțȓțȖȓȎȠȜȚȜȐ, ȘȜȠȜȞȜȚȡȚȜȔȓȠȝȞȜȠȖȐȜȟȠȜȭȠȪ ȞȓȦȓȠȘȎ, ȫȠȜ ȝȞȖȐȓȒȓȠ Ș ȏȩȟȠȞȜȚȡ ȞȜȟȠȡ ȘȜșȖȥȓȟȠȐȎ ȞȎȕȜȞȐȎțțȩȣ ȟȐȭȕȓȗȖȡȐȓșȖȥȓțȖȬȑȞȎțȖȤȒȓȢȓȘȠȎ. ȃȎȞȎȘȠȓȞțȩȗȞȎȕȚȓȞȎȠȜȚțȜȗ ȝȜȒȟȖȟȠȓȚȩ, Ȑ ȘȜȠȜȞȜȗ ȏȓȕȖȕșȡȥȎȠȓșȪțȎȭ ȞȓȘȜȚȏȖțȎȤȖȭ ȐȩȕȩȐȎȓȠ ȖțȠȓțȟȖȢȖȘȎȤȖȬ ȠȓȝșȜȐȩȣ ȘȜșȓȏȎțȖȗ ȎȠȜȚȜȐ, ȚȜȔțȜ ȟȜȜȠțȓȟȠȖ ȟȜ ȟȞȓȒțȓȗ ȒșȖțȜȗ ȟȐȜȏȜȒțȜȑȜ ȝȞȜȏȓȑȎ ȢȜțȜțȜȐ - [21]. ǶȟȝȜșȪȕȡȭ ȢȜȞȚȡșȡ DZȞȬțȓȗȕȓțȎ [22]

Ȗ ȡȥȖȠȩȐȎȭ ȐȓșȖȥȖțȡ ȘȞȖȠȖȥȓȟȘȜȗ ȒȓȢȜȞȚȎȤȖȖ, ȘȜȠȜȞȜȗ Ȑ ȟȜȟȠȜȭțȖȖ ȝȞȜȠȖȐȜȟȠȜȭȠȪ ȎȠȜȚȎȞțȎȭ ȞȓȦȓȠȘȎ ȠȐȓȞȒȜȑȜ ȠȓșȎ [22]

ȢȜȞȚȡșȡȞȓȎșȪțȜȗȝȞȜȥțȜȟȠȖ(5.7) ȚȜȔțȜȐȩȞȎȕȖȠȪȥȓȞȓȕȒȎȐșȓțȖȓ ȠȓȝșȜȐȩȣ ȘȜșȓȏȎțȖȗ ȎȠȜȚȜȐ

ȭȐșȭȓȠȟȭ ȢȜțȜȐȩȚ ȒȎȐșȓțȖȓȚ ȜȏȡȟșȜȐșȓțțȩȚ ȠȓȝșȜȐȩȚȖ ȘȜșȓȏȎțȖȭȚȖȎȠȜȚȜȐȞȓȦȓȠȘȖ[22] ȖTd țȎȝȞȭȔȓțȖȓ, ȒȓȗȟȠȐȡȬȧȓȓȐ ȜȘȞȓȟȠ-

țȜȟȠȖ ȒȖȟșȜȘȎȤȖȜțțȜȗ șȖțȖȖ. ǵȒȓȟȪ Ȁ0 – ȢȜțȜȐȎȭ ȠȓȚȝȓȞȎȠȡȞȎ ȚȎȠȓȞȖȎșȎ; I – ȝȎȞȎȚȓȠȞ DZȞȬțȓȗȕȓțȎ n – ȘȜțȤȓțȠȞȎȤȖȭ ȎȠȜȚȜȐ Ȑ ȞȓȦȮȠȘȓ.

ǹȜȘȎșȪțȜȓ ȒȎȐșȓțȖȓ ȖȕȏȩȠȜȥțȩȣ ȢȜțȜțȜȐ %TR ȚȜȔțȜ ȜȤȓțȖȠȪ ȝȜ ȐȓșȖȥȖțȓ ȡȒȓșȪțȜȗ ȫțȓȞȑȖȖ %ER/H, ȘȜȠȜȞȎȭ ȐȩȒȓșȭȓȠȟȭ ȝȞȖ ȏȓȕȖȕșȡȥȎȠȓșȪțȜȗ ȞȓȘȜȚȏȖțȖȞȡȬȧȓȑȜ ȫșȓȘȠȞȜțȎ

ȑȒȓ H – ȣȎȞȎȘȠȓȞțȩȗ ȜȏȨȓȚ ȜȏșȎȟȠȖ, Ȑ ȘȜȠȜȞȜȗ ȐȩȒȓșȭȓȠȟȭ Ȗ ȞȓșȎȘȟȖȞȡȓȠ ȫțȓȞȑȖȭ ȫșȓȘȠȞȜțȎ.

ǰȓșȖȥȖțȡȎȘȠȖȐȎȤȖȜțțȜȑȜȜȏȨȓȚȎHȚȜȔțȜȜȤȓțȖȠȪȝȜȢȜȞȚȡșȓ, ȐȩȞȎȔȓțțȜȗȐȠȓȞȚȖțȎȣȣȎȞȎȘȠȓȞȖȟȠȖȥȓȟȘȖȣ ȝȎȞȎȚȓȠȞȜȐȞȓȦȓȠȘȖ ȠȐȮȞȒȜȑȜ ȠȓșȎ [21]. ȀȎȘ ȘȎȘ ȘȜțȟȠȎțȠȩ ȞȓȦȓȠȘȖ SiC ȐȒȜșȪ ȞȎȕțȩȣ ȘȜȜȞȒȖțȎȠțȩȣ Ȝȟȓȗ ȜȠșȖȥȎȬȠȟȭ, ȢȜȞȚȡșȡ Ȓșȭ ȎȘȠȖȐȎȤȖȜțțȜȑȜ ȜȏȨȓȚȎ ȝȞȖȐȓȒȓȚ Ȑ ȐȖȒȓ:

ȑȒȓ c Ȗ a ȭȐșȭȬȠȟȭ ȘȜțȟȠȎțȠȎȚȖ ȞȓȦȓȠȘȖ, Ȏ - ȟȞȓȒțȭȭ ȒșȖțȎ ȟȐȜȏȜȒțȜȑȜ ȝȞȜȏȓȑȎ ȢȜțȜțȜȐ [21]

ȑȒȓM– ȘȜȫȢȢȖȤȖȓțȠȠȓȝșȜȝȞȜȐȜȒțȜȟȠȖȚȎȠȓȞȖȎșȎ; C0 – ȡȒȓșȪțȎȭȠȓȝșȜȓȚȘȜȟȠȪ Ȗ CS!(E/S)1/2 – ȟȘȜȞȜȟȠȪ ȕȐȡȘȎ, S – ȝșȜȠțȜȟȠȪ ȚȎȠȓȞȖȎșȎ.

ǽȞȖțȖȚȎȭȐȜȐțȖȚȎțȖȓ, ȥȠȜȝȞȜȥțȜȟȠȪȠȐȓȞȒȜȑȜȠȓșȎțȎȞȎȕȞȩȐ ȝȞȖȏșȖȔȎȓȠȟȭ Ș țȡșȬ, ȘȜȑȒȎ țȎȥȖțȎȓȠȟȭ ȖțȠȓțȟȖȐțȜȓ ȞȎȕȞȡȦȓțȖȓ ȚȓȔȎȠȜȚțȩȣ ȟȐȭȕȓȗ, ȚȜȔțȜ ȝȜșȡȥȖȠȪ ȘȞȖȠȓȞȖȗ Ȓșȭ ȜȤȓțȘȖ ȐȞȓȚȓțȖ, ȝȞȖ ȘȜȠȜȞȜȚ ȞȓȦȓȠȘȎ ȠȓȞȭȓȠ ȟȝȜȟȜȏțȜȟȠȪ ȝȞȜȠȖȐȜȟȠȜȭȠȪ ȘȞȖȠȖȥȓȟȘȖȚ ȢșȡȘȠȡȎȤȖȭȚ ȎȠȜȚȜȐ ȞȓȦȓȠȘȖ

ȋȘȟȝȓȞȖȚȓțȠȎșȪțȜ ȏȩșȜ ȡȟȠȎțȜȐșȓțȜ, ȥȠȜ țȎȝȞȭȔȓțȖȓ Ȑ ȜȘȞȓȟȠțȜȟȠȖȒȖȟșȜȘȎȤȖȜțțȜȗșȖțȖȖȞȎȐțȜTd=(113 166) Mǽa [23], Ȏ țȎȝȞȭȔȓțȖȓ ȞȎȟȠȭȔȓțȖȭ, ȒȓȗȟȠȐȡȬȧȖȓ Ȑ țȎȝȞȎȐșȓțȖȖ ȐȓȘȠȜȞȎ ǯȬȞȑȓȞȟȎ, ȝȞȖȟȡȧȓȠȜșȪȘȜȘȞȎȓȐȜȗȒȖȟșȜȘȎȤȖȖ>24@. ǽȜȫȠȜȚȡ, ȝȞȖȐȜȕțȖȘțȜȐȓțȖȖ

522 ǮȑȓȓȐ Ǽ.Ǯ., ǯȓșȭȓȐ Ǯ.dz., ǯȜșȠȜȐȓȤ ǻ.ǿ., ǸȖȟȓșȓȐ ǰ.ǿ., ǸȜțȎȘȜȐȎ Ǿ.ǰ. Ȗ ȒȞ.

șȜȘȎșȪțȜȑȜȒȎȐșȓțȖȭȜȏȞȩȐȎȠȜȚțȩȣȟȐȭȕȓȗȖȜȏȞȎȕȜȐȎțȖȓȝȓȞȓȑȖȏȜȐ țȎȖȏȜșȓȓ ȐȓȞȜȭȠțȩ Ȓșȭ șȖțȖȖ ȘȞȎȓȐȩȣ ȒȖȟșȜȘȎȤȖȗ.

DzȓȑȞȎȒȎȤȖȭ SiC p-i-n ȒȖȜȒȜȐ țȎȥȖțȎȓȠȟȭ ȝȞȖ ȏȜșȪȦȖȣ ȠȜȘȎȣ ȥȓȞȓȕ ȒȖȜȒ, ȥȠȜ ȝȜȒȠȐȓȞȔȒȎȓȠ ȟȡȧȓȟȠȐȓțțȜȓ ȐșȖȭțȖȓ ȐȓȞȜȭȠțȜȟȠȖ ȝȜȐȠȜȞțȜȗ ȞȓȘȜȚȏȖțȎȤȖȖ țȎ ȖțȠȓțȟȖȢȖȘȎȤȖȬ ȝȞȜȤȓȟȟȎ ȒȓȑȞȎȒȎȤȖȖ. dzȟșȖ ȝȞȓȒȝȜșȜȔȖȠȪ, ȥȠȜ ȐȞȓȚȭ ȞȓșȎȘȟȎȤȖȖ ȎȘȠȖȐȖȞȜȐȎțțȜȑȜ ȟȜȟȠȜȭțȖȭ ȞȎȐțȜ ȟȞȓȒțȓȚȡ ȐȞȓȚȓțȖ ȔȖȕțȖ ȢȜțȜțȎ [20]

ȠȜȚȖțȖȚȎșȪțȎȭȟȘȜȞȜȟȠȪȞȓȘȜȚȏȖțȎȤȖȖ, ȟȝȜȟȜȏțȎȭ ȖțȖȤȖȖȞȜȐȎȠȪ ȝȞȜȤȓȟȟ ȒȓȑȞȎȒȎȤȖȖ, Ȗ ȟȜȜȠȐȓȠȟȠȐȡȬȧȖȗ ȫȠȜȗ ȟȘȜȞȜȟȠȖ ȝȎȞȎȚȓȠȞ ȝȜȐȠȜȞțȜȗ ȞȓȘȜȚȏȖțȎȤȖȖ ȒȜșȔțȩ ȏȩȠȪ ȞȎȐțȩȚȖ:

ȁȟșȜȐȖȭ(5.17) Ȗ(5.18) ȜȕțȎȥȎȬȠ, ȥȠȜȝȞȜȤȓȟȟȒȓȑȞȎȒȎȤȖȖȚȜȔȓȠ ȞȎȕȐȖȐȎȠȪȟȭ, ȓȟșȖ Ȑ ȠȓȥȓțȖȖ ȐȞȓȚȓțȖ ȔȖȕțȖ ȢȜțȜțȎ ȝȞȜȖȕȜȗȒȓȠ, ȣȜȠȭ ȏȩ ȜȒȖț ȎȘȠ ȝȜȐȠȜȞțȜȗ ȞȓȘȜȚȏȖțȎȤȖȖ.

Dzșȭ ȥȖȟșȓțțȩȣ ȜȤȓțȜȘ ȖȟȝȜșȪȕȜȐȎșȖȟȪ ȣȎȞȎȘȠȓȞȖȟȠȖȥȓȟȘȖȓ

ȝȎȞȎȚȓȠȞȩ SiC M!200.0 ǰȠ/Ț K; S= 3200 Șȑ/Ț3; C0 = Cm¸S (ȑȒȓ

Cm = 621 DzȔ/Șȑ¸K); c= 15¸10 10 Ȗa= 3.08¸10 10 țȚ; n= 4.8¸1028 Ț 3; I= 2.0; E!4¸1011 ǽa.

DzȖțȎȚȖȘȎ ȝȎȒȓțȖȭ ȝȞȜȥțȜȟȠȖ ȞȓȦȓȠȘȖ Ȗ ȒșȖȠȓșȪțȜȟȠȪ ȖțȘȡȏȎȤȖȜțțȜȑȜȝȓȞȖȜȒȎȝȞȜȤȓȟȟȎȒȓȑȞȎȒȎȤȖȖ, ȝȞȖȞȎȕșȖȥțȜȗȠȓȚȝȓȞȎȠȡȞȓ ȒȖȜȒȎ ȝȞȓȒȟȠȎȐșȓțȩ țȎ ȑȞȎȢȖȘȎȣ ȞȖȟ. 5.15 Ȗ 5.16. ǾȎȟȥȓȠțȩȓ

ȐȓșȖȥȖțȩ ȝȜșȡȥȓțȩ ȞȎȐțȩȚȖ: ȟȞȓȒțȭȭ ȒșȖțȎ ȟȐȜȏȜȒțȜȑȜ ȝȞȜȏȓȑȎ ȢȜțȜțȜȐ -= 9.002¸10 9 Ț; ȐȞȓȚȭ ȔȖȕțȖ ȢȜțȜțȎ Up !8.052¸10 13 ȟ;

ȐȓșȖȥȖțȎ ȎȘȠȖȐȎȤȖȜțțȜȑȜ ȜȏȨȮȚȎ H!2.079¸10 27 Ț 3. ǽȞȖ ȝȜȠȓȞȓ ȫșȓȘȠȞȜțȜȚ Ȑ ȚȜȚȓțȠ ȞȓȘȜȚȏȖțȎȤȖȖ ȫțȓȞȑȖȖ %ER = 2.23 ȫǰ, ȐȓșȖȥȖțȎ șȜȘȎșȪțȜȑȜ ȒȎȐșȓțȖȭ ȢȜțȜțȜȐ Ȑ ȠȜȥȘȓ ȞȎȟȝȜșȜȔȓțȖȭ ȏȓȕȖȕșȡȥȎȠȓșȪțȜȑȜȤȓțȠȞȎ%TR !171.6 Mǽa. ȀȎȘȖȚȜȏȞȎȕȜȚ, ȐȜȕțȖȘȎȬȧȓȓ ȒȎȐșȓțȖȓ ȒȎȔȓ ȝȞȖ ȓȒȖțȖȥțȜȗ ȞȓȘȜȚȏȖțȎȤȖȖ ȝȞȓȐȩȦȎȓȠ țȎȝȞȭȔȓțȖȓ țȓȜȏȣȜȒȖȚȜȓ Ȓșȭ ȞȎȟȧȓȝșȓțȖȭ ȥȎȟȠȖȥțȩȣ ȒȖȟșȜȘȎȤȖȗ Ȑ ȏȎȕȜȐȜȗ ȝșȜȟȘȜȟȠȖ ȟȘȜșȪȔȓțȖȭ SiC [15]. ǽȞȖ ȫȠȜȗ ȐȓșȖȥȖțȓ

șȜȘȎșȪțȜȑȜ ȒȎȐșȓțȖȭ ȒșȖȠȓșȪțȜȟȠȪ ȖțȘȡȏȎȤȖȜțțȜȑȜ ȝȓȞȖȜȒȎ ȒȓȑȞȎȒȎȤȖȖ ȘȜȞȞȓșȖȞȡȓȠ ȟ ȞȓȕȡșȪȠȎȠȎȚȖ ȫȘȟȝȓȞȖȚȓțȠȜȐ [12], ȘȜȑȒȎ ȝȎȞȎȚȓȠȞ ȝȜȐȠȜȞțȜȗ ȞȓȘȜȚȏȖțȎȤȖȖ ȞȎȐȓț C = 1.534, 1.442, 1.354 ȟȜȜȠȐȓȠȟȠȐȓțțȜ ȡȐȓșȖȥȓțȖȬ ȠȓȚȝȓȞȎȠȡȞȩ ȒȖȜȒȎ.

524 ǮȑȓȓȐ Ǽ.Ǯ., ǯȓșȭȓȐ Ǯ.dz., ǯȜșȠȜȐȓȤ ǻ.ǿ., ǸȖȟȓșȓȐ ǰ.ǿ., ǸȜțȎȘȜȐȎ Ǿ.ǰ. Ȗ ȒȞ.

ǹȖȠȓȞȎȠȡȞȎ

1.Maximenko S., Soloviev S., Cherednichenko D., Sudarshan T.S., Observation of dislocation in diffused 4H-SiC p-i-n diodes by Electron – beam induced current // J. Appl. Phys. – 2005. – 97. –

P.013533.

2.Maximenko S. Soloviev S. Cherednichenko D., Sudarshan T.S., Electron-beam-Induced current observed for dislocations in diffused 4H-SiC p-n diode // Appl. Phys. Lett. – 2004. – 84, N9. –

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