диафрагмированные волноводные фильтры / d6284909-4432-4766-9527-f3fefcc355a8

2095-4980(2021)05-0769-10

a a *b

( a. b. 210044)

的交叉前沿应用。滤波器作为太赫兹探测/

Review of terahertz waveguide filters research process

ZHANG Qinyia YAN Yutaoa DING Jiangqiao*b

(a.Changwang School of Honors b. School of Electronic & Information Engineering Nanjing University of Information Science & Technology

Nanjing Jiangsu 210044 China)

Abstract Terahertz waves with unique spectrum characteristics have provided important applications in cross frontier fields of astronomical observation, interstellar communication and defense security. As one of the key components in the terahertz detection/communication systems, the filter can extract characteristic signals and suppress interference frequencies to improve the target detection performance of the system. In recent years, thanks to the development of the high-precision manufacturing process, some breakthrough results have been achieved in terahertz waveguide filters. And the filters based on different types, structures and processes have been studied. In this review paper, the development status and common problems of terahertz waveguide filters are expounded based on the different processes. The advantages and disadvantages of filters developed by mainstream technologies are also summarized, which can provide a reference for the further development of terahertz waveguide filters with high performance.

Keywords terahertz waveguide filter

(THz) 0.1~10 THz [1]

[2–4] [5] [6] [7] [8] [9] [10][11]

/

2[12] [13]

2021-05-11 2021-07-17

(12003011) (20KJB510039)

* email:jqding@nuist.edu.cn

(Coplanar Waveguide CPW)[14] [15] [16]Q ( ) Q ( )[9] [7](Micro-Electromechanical Systems MEMS)

赫兹高性能滤波器的进一步发展提供基础。

1 CNC

(μm)MEMS [17–19]

(Deep Reactive Ion Etching DRIE) SU-8 (Thick SU-8 Photoresist)(UV–LIGA) MEMSBlock H–MEMS MEMS(Computer Numerical Control CNC)±10 μm [7] CNC ±2.5 μm 700 GHz[20] CNC CNC

upper block

Fig.1 Waveguide filter structures based on the magnetic coupling, the electrical coupling and the offset coupling

1

TE101

CNC W- (75~110 GHz) W-R3 (220~330 GHz) WR-2.8 (260~400 GHz) WR-1.5 (500~750 GHz) [20–26]1 [21,22,25] 1 H- E-

/( ) W-[27] - 2

5

CNC 400 GHz SU-8WR-3 WR-1.5 DRIE500 GHz

集成、可扩展性等多方向发展。

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